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中国物理学会期刊
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Wu Zhong-Zhen, Tian Xiu-Bo, Li Chun-Wei, Ricky K. Y., Fu, Pan Feng. Phasic discharge characteristics in high power pulsed magnetron sputteringJ. Acta Physica Sinica, 2014, 63(17): 175201. DOI: 10.7498/aps.63.175201
Citation: Wu Zhong-Zhen, Tian Xiu-Bo, Li Chun-Wei, Ricky K. Y., Fu, Pan Feng. Phasic discharge characteristics in high power pulsed magnetron sputteringJ. Acta Physica Sinica, 2014, 63(17): 175201. DOI: 10.7498/aps.63.175201
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Phasic discharge characteristics in high power pulsed magnetron sputtering

Acta Phys. Sin., 2014, 63(17): 175201.
DOI: 10.7498/aps.63.175201
CSTR: 32037.14.aps.63.175201
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