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Influence of working pressure on the crystallinity and growth behavior of ZnO films deposited by reactive radio-frequency magnetron sputtering

Liu Zhi-Wen Gu Jian-Feng Fu Wei-Jia Sun Cheng-Wei Li Yong Zhang Qing-Yu

Citation:

Influence of working pressure on the crystallinity and growth behavior of ZnO films deposited by reactive radio-frequency magnetron sputtering

Liu Zhi-Wen, Gu Jian-Feng, Fu Wei-Jia, Sun Cheng-Wei, Li Yong, Zhang Qing-Yu
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  • Abstract views:  8814
  • PDF Downloads:  2073
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Publishing process
  • Received Date:  22 March 2006
  • Accepted Date:  08 April 2006
  • Published Online:  05 May 2006

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