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Study on the optical and electrical properties of plasma for the deposition of microcrystalline silicon

Zhang Fa-Rong Zhang Xiao-Dan Amanatides E. Mataras D. Zhao Jing Zhao Ying

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Study on the optical and electrical properties of plasma for the deposition of microcrystalline silicon

Zhang Fa-Rong, Zhang Xiao-Dan, Amanatides E., Mataras D., Zhao Jing, Zhao Ying
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  • Abstract views:  8218
  • PDF Downloads:  757
  • Cited By: 0
Publishing process
  • Received Date:  17 August 2007
  • Accepted Date:  18 September 2007
  • Published Online:  28 May 2008

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