Search

Article

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

Plasma power and impedance measurement in silicon thin film deposition

Zhang Xiao-Dan Zhang Fa-Rong Elefterious Amanatides Dimitris Mataras Zhao Ying

Citation:

Plasma power and impedance measurement in silicon thin film deposition

Zhang Xiao-Dan, Zhang Fa-Rong, Elefterious Amanatides, Dimitris Mataras, Zhao Ying
PDF
Get Citation

(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

Metrics
  • Abstract views:  8153
  • PDF Downloads:  881
  • Cited By: 0
Publishing process
  • Received Date:  14 September 2006
  • Accepted Date:  13 October 2006
  • Published Online:  20 September 2007

/

返回文章
返回
Baidu
map