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3UCVD deposition SiO2 on SiC wafer and its C-V measurement

Tang Xiao-Yan Zhang Yi-Men Zhang He-Ming Zhang Yu-Ming Dai Xian-Ying Hu Hui-Yong

Citation:

3UCVD deposition SiO2 on SiC wafer and its C-V measurement

Tang Xiao-Yan, Zhang Yi-Men, Zhang He-Ming, Zhang Yu-Ming, Dai Xian-Ying, Hu Hui-Yong
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  • Abstract views:  7752
  • PDF Downloads:  760
  • Cited By: 0
Publishing process
  • Received Date:  28 July 2003
  • Accepted Date:  06 February 2004
  • Published Online:  16 September 2004

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