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Low-cost triple junction solar cells, which much attention has been paid to by industry, are studied in this paper. Based on the amorphous silicon/amorphous silicon tandem solar cells realized in industry using completely single chamber deposition technique, amorphous silicon/amorphous silicon/microcrystalline silicon triple junction solar cell with 9.52% conversion efficiency is fabricated by changing deposition conditions for microcrystalline bottom solar cell and n-p junction in a single chamber developed on our own.
[1] Ballutaud J, Bucher C, Hollenstein C, Howing A A, Kroll U, Benagli S, Shah A, Buechel A 2004 Thin Solid Films 468 222
[2] Bauer J, Calwer H, Marklstorfer P, Milla P, Schulze F W, Ufert K D 1993 J. Non-Cryst. Solids 164—166 685
[3] Kroll U, Bucher C, Benagli S, Schǒnbchler I, Meier J, Shah A, Ballutaud J, Howling A, Hollenstein C, Büchel A, Poppeller M 2004 Thin Solid Films 451—452 525
[4] Tsuo Y S, Xu Y, Crandall Richard S, Han Daxing, Qiu C, Pankove J I 1999 IEEE Photovoltaic Specialists Conf. Oakland, California, May 9—12 1416
[5] Zhao Y, Zhang X D, Zhu F, Gao Y T, Wei C C, Xue J M, Ren H Z, Zhang D K, Hou G F, Sun J, Geng X H 2005 15th International Photovoltaic Science & Engineering Conference,Shanghai,China 65—67
[6] Sun F H, Zhang X D, Wang G H, Xu S Z, Yue Q, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2009 Acta Phys. Sin. 58 1293 (in Chinese) [孙福河、张晓丹、王光红、许盛之、岳 强、魏长春、孙 建、耿新华、熊绍珍、赵 颖 2009 58 1293]
[7] Sun F H, Zhang X D, Xu S Z, Wang G H, Yue Q, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2008 The 10th China Solar PV Conference and Exhibition, Changzhou, China 344—347 (in Chinese) [孙福河、张晓丹、许盛之、王光红、岳 强、魏长春、孙 建、耿新华、熊绍珍、赵 颖 2008 第十届中国太阳能光伏会议暨展览会 常州 第344—347页]
[8] Zhang X D, Sun F H, Wang G H, Xu S Z, Wei C C, Hou G F, Sun J, Xiong S Z, Geng X H, Zhao Y 2010 Phys. Stat. Sol. C 3—4 1116
[9] Wang G H, Zhang X D, Xu S Z, Sun F H, Yue Q, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2009 Acta Phys. Sin. 58 7294 (in Chinese) [王光红、张晓丹、许盛之、孙福河、岳 强、魏长春、孙 建、耿新华、熊绍珍、赵 颖 2009 58 7294]
[10] Wang G H, Zhang X D, Xu S Z, Zheng X X, Wei C C, Sun J, Xiong S Z, Geng X H, Zhao Y 2010 Chin. Phys. B 19 098102
[11] Wang G H, Zhang X D, Xu S Z, Wei C C, Sun J, Xiong S Z, Geng X H, Zhao Y 2010 Phys. Stat. Sol. (C) 7 1073
[12] Gao Y T, Zhang X D, Zhu F, Wei C C, Sun J, Zhao Y 2006 J. Synth. Cryst. 35 514 (in Chinese) [高艳涛、张晓丹、朱 锋、魏长春、孙 建、赵 颖 2006 人工晶体学报35 514]
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[1] Ballutaud J, Bucher C, Hollenstein C, Howing A A, Kroll U, Benagli S, Shah A, Buechel A 2004 Thin Solid Films 468 222
[2] Bauer J, Calwer H, Marklstorfer P, Milla P, Schulze F W, Ufert K D 1993 J. Non-Cryst. Solids 164—166 685
[3] Kroll U, Bucher C, Benagli S, Schǒnbchler I, Meier J, Shah A, Ballutaud J, Howling A, Hollenstein C, Büchel A, Poppeller M 2004 Thin Solid Films 451—452 525
[4] Tsuo Y S, Xu Y, Crandall Richard S, Han Daxing, Qiu C, Pankove J I 1999 IEEE Photovoltaic Specialists Conf. Oakland, California, May 9—12 1416
[5] Zhao Y, Zhang X D, Zhu F, Gao Y T, Wei C C, Xue J M, Ren H Z, Zhang D K, Hou G F, Sun J, Geng X H 2005 15th International Photovoltaic Science & Engineering Conference,Shanghai,China 65—67
[6] Sun F H, Zhang X D, Wang G H, Xu S Z, Yue Q, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2009 Acta Phys. Sin. 58 1293 (in Chinese) [孙福河、张晓丹、王光红、许盛之、岳 强、魏长春、孙 建、耿新华、熊绍珍、赵 颖 2009 58 1293]
[7] Sun F H, Zhang X D, Xu S Z, Wang G H, Yue Q, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2008 The 10th China Solar PV Conference and Exhibition, Changzhou, China 344—347 (in Chinese) [孙福河、张晓丹、许盛之、王光红、岳 强、魏长春、孙 建、耿新华、熊绍珍、赵 颖 2008 第十届中国太阳能光伏会议暨展览会 常州 第344—347页]
[8] Zhang X D, Sun F H, Wang G H, Xu S Z, Wei C C, Hou G F, Sun J, Xiong S Z, Geng X H, Zhao Y 2010 Phys. Stat. Sol. C 3—4 1116
[9] Wang G H, Zhang X D, Xu S Z, Sun F H, Yue Q, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2009 Acta Phys. Sin. 58 7294 (in Chinese) [王光红、张晓丹、许盛之、孙福河、岳 强、魏长春、孙 建、耿新华、熊绍珍、赵 颖 2009 58 7294]
[10] Wang G H, Zhang X D, Xu S Z, Zheng X X, Wei C C, Sun J, Xiong S Z, Geng X H, Zhao Y 2010 Chin. Phys. B 19 098102
[11] Wang G H, Zhang X D, Xu S Z, Wei C C, Sun J, Xiong S Z, Geng X H, Zhao Y 2010 Phys. Stat. Sol. (C) 7 1073
[12] Gao Y T, Zhang X D, Zhu F, Wei C C, Sun J, Zhao Y 2006 J. Synth. Cryst. 35 514 (in Chinese) [高艳涛、张晓丹、朱 锋、魏长春、孙 建、赵 颖 2006 人工晶体学报35 514]
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