Optimization of the longitudinal structure of intrinsic layer in microcrystalline silicon germanium solar cell

Cao Yu; Zhang Jian-Jun; Li Tian-Wei; Huang Zhen-Hua; Ma Jun; Ni Jian; Geng Xin-Hua; Zhao Ying

doi:10.7498/aps.62.036102

Abstract

Using radio-frequency plasma enhanced chemical vapor deposition, based on the influences of discharge power on structural and photoelectric properties of μc-SiGe:H thin films, RF power profiling technique is developed during the deposition of μc-SiGe:H intrinsic layer. The optimized μc-SiGe:H intrinsic layer not only maintains homogeneity of the crystalline volume fraction along the depth profile, but also forms a band gap profiling configuration from wide to narrow in the direction of growth. By this method, the fill factor and the short-circuit current density of μc-SiGe:H solar cell are significantly improved, and an efficiency of 9.54% for the a-Si:H/μc-SiGe:H tandem solar cell is achieved.

Keywords:

Authors and contacts

1.
Institute of Photo-electronic Thin Film Devices and Technique of Nankai University, Key Laboratory of Photo-electronics Thin Film Devices and Technique of Tianjin, Key Laboratory of Opto-electronic Information Science and Technology of Ministry of Education, Tianjin 300071, China
Funds: Project supported by the National Basic Research Program of China (Grant Nos. 2011CBA00705, 2011CBA00706, 2011CBA00707), the Natural Science Foundation of Tianjin, China (Grant No. 12JCQNJC01000), and the Fundamental Research Funds for the Central Universities, China.

References

[1]	Yan B, Yue G, Sivec L, Yang J, Guha S, Jiang C S 2011 Appl. Phys. Lett. 99 113512
[2]	Zhang X D, Zheng X X, Wang G H, Xu S Z, Yue Q, Lin Q, Wei C C, Sun J, Zhang D K, Xiong S Z, Geng X H, Zhao Y 2010 Acta Phys. Sin. 59 8231 (in Chinese) [张晓丹, 郑新霞, 王光红, 许盛之, 岳强, 林泉, 魏长春, 孙建, 张德坤, 熊绍珍, 耿新华, 赵颖 2010 59 8231]
[3]	Zheng X X, Zhang X D, Yang S S, Wang G H, Xu S Z, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2011 Acta Phys. Sin 60 068801 (in Chinese) [郑新霞, 张晓丹, 杨素素, 王光红, 许盛之, 魏长春, 孙建, 耿新华, 熊绍珍, 赵颖 2011 60 068801]
[4]	Saito K, Sano M, Okabe S, Sugiyama S, Ogawa K 2005 Sol. Energy Mater. Sol. Cells 86 565
[5]	Hou G F, Xue J M, Yuan Y J, Zhang X D, Sun J, Chen X L, Geng X H, Zhao Y 2012 Acta Phys. Sin 61 058403 (in Chinese) [侯国付, 薛俊明, 袁育杰, 张晓丹, 孙建, 陈新亮, 耿新华, 赵颖 2011 61 058403]
[6]	Li G J, Hou G F, Han X Y, Yuan Y J, Wei C C, Sun J, Zhao Y, Geng X H 2009 Chin. Phys. B 18 1674
[7]	Deng X, Cao X, Ishikawa Y, Du W, Yang X, Das C, Vijh A 2006 Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion Hawaii, U.S.A, May, 2006 p1461
[8]	Matsui T, Jia H, Fujiwara H, Kondo M 2008 23rd European Photovoltaic Solar Energy Conference Valencia, Spain, September, 2008 p2113
[9]	Ganguly G, Ikeda T, Nishimiya T, Saitoh K, Kondo M, Matsuda A 1996 Appl. Phys. Lett. 69 4224
[10]	Zhang L P, Zhang J J, Zhang X, Shang Z R, Hu Z X, Zhang Y P, Geng X H, Zhao Y 2008 Acta Phys. Sin. 57 7338 (in Chinese) [张丽平, 张建军, 张鑫, 尚泽仁, 胡增鑫, 张亚萍, 耿新华, 赵颖 2008 57 7338]
[11]	Zhang L P, Zhang J J, Shang Z R, Hu Z X, Geng X H, Zhao Y 2008 Chin. Phys. B 17 3448
[12]	Rath J K, Tichelaar F D, Schropp R E I 2002 Sol. Energy Mater. Sol. Cells 74 553
[13]	Isomura M, Nakahata K, Shima M Taira S, Wakisaka K, Tanaka M, Kiyama S 2002 Sol. Energy Mater. Sol. Cells 74 519
[14]	Matsui T, Chang C W, Takada T, Isomura M, Fujiwara H, Kondo M 2009 Sol. Energy Mater Sol. Cells 93 1100
[15]	Matsui T, Chang C W, Takada T, Isomura M, Fujiwara H, Kondo M 2008 Appl. Phys. Express 1 031501
[16]	Matsui T, Jia H, Kondo M, Mizuno K, Tsuruga S, Sakai S, Takeuchi Y 2010 2010 35th IEEE Photovoltaic Specialists Conference (PVSC), Hawaii, U.S.A, June, 2010 p000311
[17]	Cao Y, Zhang J J, Ni J, Wang X B, Huang Z H, Sun J, Geng X H, Zhao Y 2010 the 11th China Solar PV Conference and Exhibition Nanjing, China, November, 2010 p600 (in Chinese) [曹宇, 张建军, 倪牮, 王先宝, 黄振华, 孙建, 耿新华, 赵颖 2010 第十一届中国太阳能光伏会议暨展会南京 2010 第600页]
[18]	Amanatides E, Stamou S, Mataras D 2001 J. Appl. Phys. 90 5786
[19]	Luo Y 2005 Comprehensive Handbook of Chemical Bond Energies (Beijing: Science Press) p300 (in Chinese) [罗渝然 2005 化学键能数据手册 (北京: 科学出版社) 第300页]
[20]	Han X Y, Hou G F, Zhang X D, Wei C C, Li G J, Zhang J J, Chen X L, Zhang D K, Sun J, Zhao Y, Geng X H 2010 Sol. Energy Mater. Sol. Cells 94 254
[21]	Yan B, Yue G, Yang J, Guha S, Williamson D L, Han D, Jiang C S 2004 Appl. Phys. Lett. 85 1955
[22]	Lundszien D, Finger F, Wagner H 2002 Sol. Energy Mater. Sol. Cells 74 365
[23]	Guha S, Yang J, Pawlikiewicz A, Glatfelter T, Ross R, Ovshinsky S R 1989 Appl. Phys. Lett. 54 2330
[24]	Jiang Z X, Kim K, Lerma J, Corbett A, Sieloff D, Kottke M, Gregory R, Schauer S 2006 Appl. Surf. Sci. 252 7262

Cited By

[1]	Yan B, Yue G, Sivec L, Yang J, Guha S, Jiang C S 2011 Appl. Phys. Lett. 99 113512
[2]	Zhang X D, Zheng X X, Wang G H, Xu S Z, Yue Q, Lin Q, Wei C C, Sun J, Zhang D K, Xiong S Z, Geng X H, Zhao Y 2010 Acta Phys. Sin. 59 8231 (in Chinese) [张晓丹, 郑新霞, 王光红, 许盛之, 岳强, 林泉, 魏长春, 孙建, 张德坤, 熊绍珍, 耿新华, 赵颖 2010 59 8231]
[3]	Zheng X X, Zhang X D, Yang S S, Wang G H, Xu S Z, Wei C C, Sun J, Geng X H, Xiong S Z, Zhao Y 2011 Acta Phys. Sin 60 068801 (in Chinese) [郑新霞, 张晓丹, 杨素素, 王光红, 许盛之, 魏长春, 孙建, 耿新华, 熊绍珍, 赵颖 2011 60 068801]
[4]	Saito K, Sano M, Okabe S, Sugiyama S, Ogawa K 2005 Sol. Energy Mater. Sol. Cells 86 565
[5]	Hou G F, Xue J M, Yuan Y J, Zhang X D, Sun J, Chen X L, Geng X H, Zhao Y 2012 Acta Phys. Sin 61 058403 (in Chinese) [侯国付, 薛俊明, 袁育杰, 张晓丹, 孙建, 陈新亮, 耿新华, 赵颖 2011 61 058403]
[6]	Li G J, Hou G F, Han X Y, Yuan Y J, Wei C C, Sun J, Zhao Y, Geng X H 2009 Chin. Phys. B 18 1674
[7]	Deng X, Cao X, Ishikawa Y, Du W, Yang X, Das C, Vijh A 2006 Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion Hawaii, U.S.A, May, 2006 p1461
[8]	Matsui T, Jia H, Fujiwara H, Kondo M 2008 23rd European Photovoltaic Solar Energy Conference Valencia, Spain, September, 2008 p2113
[9]	Ganguly G, Ikeda T, Nishimiya T, Saitoh K, Kondo M, Matsuda A 1996 Appl. Phys. Lett. 69 4224
[10]	Zhang L P, Zhang J J, Zhang X, Shang Z R, Hu Z X, Zhang Y P, Geng X H, Zhao Y 2008 Acta Phys. Sin. 57 7338 (in Chinese) [张丽平, 张建军, 张鑫, 尚泽仁, 胡增鑫, 张亚萍, 耿新华, 赵颖 2008 57 7338]
[11]	Zhang L P, Zhang J J, Shang Z R, Hu Z X, Geng X H, Zhao Y 2008 Chin. Phys. B 17 3448
[12]	Rath J K, Tichelaar F D, Schropp R E I 2002 Sol. Energy Mater. Sol. Cells 74 553
[13]	Isomura M, Nakahata K, Shima M Taira S, Wakisaka K, Tanaka M, Kiyama S 2002 Sol. Energy Mater. Sol. Cells 74 519
[14]	Matsui T, Chang C W, Takada T, Isomura M, Fujiwara H, Kondo M 2009 Sol. Energy Mater Sol. Cells 93 1100
[15]	Matsui T, Chang C W, Takada T, Isomura M, Fujiwara H, Kondo M 2008 Appl. Phys. Express 1 031501
[16]	Matsui T, Jia H, Kondo M, Mizuno K, Tsuruga S, Sakai S, Takeuchi Y 2010 2010 35th IEEE Photovoltaic Specialists Conference (PVSC), Hawaii, U.S.A, June, 2010 p000311
[17]	Cao Y, Zhang J J, Ni J, Wang X B, Huang Z H, Sun J, Geng X H, Zhao Y 2010 the 11th China Solar PV Conference and Exhibition Nanjing, China, November, 2010 p600 (in Chinese) [曹宇, 张建军, 倪牮, 王先宝, 黄振华, 孙建, 耿新华, 赵颖 2010 第十一届中国太阳能光伏会议暨展会南京 2010 第600页]
[18]	Amanatides E, Stamou S, Mataras D 2001 J. Appl. Phys. 90 5786
[19]	Luo Y 2005 Comprehensive Handbook of Chemical Bond Energies (Beijing: Science Press) p300 (in Chinese) [罗渝然 2005 化学键能数据手册 (北京: 科学出版社) 第300页]
[20]	Han X Y, Hou G F, Zhang X D, Wei C C, Li G J, Zhang J J, Chen X L, Zhang D K, Sun J, Zhao Y, Geng X H 2010 Sol. Energy Mater. Sol. Cells 94 254
[21]	Yan B, Yue G, Yang J, Guha S, Williamson D L, Han D, Jiang C S 2004 Appl. Phys. Lett. 85 1955
[22]	Lundszien D, Finger F, Wagner H 2002 Sol. Energy Mater. Sol. Cells 74 365
[23]	Guha S, Yang J, Pawlikiewicz A, Glatfelter T, Ross R, Ovshinsky S R 1989 Appl. Phys. Lett. 54 2330
[24]	Jiang Z X, Kim K, Lerma J, Corbett A, Sieloff D, Kottke M, Gregory R, Schauer S 2006 Appl. Surf. Sci. 252 7262

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Vol. 62, Issue 3 - 2013-02-05

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