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采用甚高频等离子体增强化学气相沉积技术,在前期单室沉积的微晶硅薄膜太阳电池和非晶硅/微晶硅叠层太阳电池研究的基础上,通过对微晶硅底电池本征层硅烷浓度的优化,获得了初始效率达到11.02%(电池面积1.0 cm2)的非晶硅/微晶硅叠层太阳电池.同时,100 cm2的非晶硅/微晶硅叠层太阳电池的组件效率也达到了9.04%.
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关键词:
- 非晶硅/微晶硅叠层电池 /
- 单室 /
- 甚高频
Based on the previous research on the deposition of amorphous/microcrystalline (micromorph) silicon tandem solar cells, silane concentration for the deposition of microcrystalline bottom cell is selected to further optimize the performance for micromorph tandem solar cells by using very high frequency technique. Finally, micromorph silicon tandem solar cell with 11.02% (Area=1.0cm2) initial conversion efficiency is fabricated at a certain silane concentration, and it has a structure suitable for trapping light. Furthermore, 100cm2 micromorph module with 9.04% initial conversion efficiency is also successfully obtained.-
Keywords:
- amorphous/microcrystalline silicon tandem solar cells /
- single chamber /
- very high frequency
[1] Yamamoto K, Nakajima A, Yoshimi M, Sawada T, Fukuda S, Suezaki T, Ichikawa M, Koi Y, Goto M, Meguro T, Matsuda T, Kondo M, Sasaki T, Tawada Y 2004 Solar Energy 77 939
[2] Shah A V, Meier J, Vallat-Sayvain E, Wyrsch N, Kroll U, Droz C, Graf U 2003 Solar Energy and Solar Cells 78 469
[3] Zhang X D, Zhao Y, Gao Y T, Zhu F, Wei C C, Chen X L, Sun J, Hou G F, Geng X H, Xiong S Z 2006 Journal of Non-Crystalline Solids 352 1863
[4] Meier J, Kroll U, Spitznagel J, Benagli S, Androutsopoulos G, Monteduro G, Borello D, Hügli A, Roschek T, Zimin D, Stein W, Springer J, Kluth O, Ellert Ch, Zindel A, Büchel G, Büchel A, Koch D, Feitknecht L, Bucher C, Freitas F 2006 Conference Record of the 2006 IEEE 4th Confenrence on Photovoltaic Energy Conversion Volumo 2 1720
[5] Repmann T, Appenzeller W, Sehrbrock B, Stiebig H, Rech B 2004 Proceedings of the 19th European Photovoltaic Solar Energy Conference 1334
[6] Li Yuan-Min, Anna Selvan J A, Foustotchenko A, Li Liwei, Delahoy A E 2005 Photovoltaic Specialists Conference, Conference Record of the Thirty-first IEEE 1 1420
[7] Yamamoto K, Nakajima A, Yoshimi M, Sawada T, Fukuda S, Suezaki T, Ichikawa M, Koi Y, Goto M, Megruo T, Matsuda T, Sasaki T, Tawada Y 2006 Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference 2 1489
[8] Zhang X D, Zhao Y, Gao Y T, Chen F, Zhu F, Wei C C, Sun J, Geng X H, Xiong S Z 2006 Acta Phys. Sin. 55 6697 (in Chinese) [张晓丹、赵 颖、高艳涛、陈 飞、朱 锋、魏长春、孙 建、耿新华、熊绍珍 2006 55 6697]
[9] Zhao Y, Zhang X D, Zhu F, Gao Y T, Wei C C, Xue J M, Ren H Z, Zhang D K, Hou G F, Sun J, Geng X H 2005 15th International Photovoltaic Science and Engineering Conference (PVSEC-15) Shanghai China 65-67
[10] Zhang X D, Sun F H, Wang G H, Xu S Z, Wei C C, Hou G F, Sun J, Xiong S Z, Geng X H, Zhao Y 2009 23rd ICANS, Utrecht Netherland, ID 53
[11] Wang G H, Zhang X D, Xu S Z, Wei C C, Sun J, Xiong S Z, Geng X H, Zhao Y 2009 23rd ICANS, Utrecht Netherland, ID 503
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[1] Yamamoto K, Nakajima A, Yoshimi M, Sawada T, Fukuda S, Suezaki T, Ichikawa M, Koi Y, Goto M, Meguro T, Matsuda T, Kondo M, Sasaki T, Tawada Y 2004 Solar Energy 77 939
[2] Shah A V, Meier J, Vallat-Sayvain E, Wyrsch N, Kroll U, Droz C, Graf U 2003 Solar Energy and Solar Cells 78 469
[3] Zhang X D, Zhao Y, Gao Y T, Zhu F, Wei C C, Chen X L, Sun J, Hou G F, Geng X H, Xiong S Z 2006 Journal of Non-Crystalline Solids 352 1863
[4] Meier J, Kroll U, Spitznagel J, Benagli S, Androutsopoulos G, Monteduro G, Borello D, Hügli A, Roschek T, Zimin D, Stein W, Springer J, Kluth O, Ellert Ch, Zindel A, Büchel G, Büchel A, Koch D, Feitknecht L, Bucher C, Freitas F 2006 Conference Record of the 2006 IEEE 4th Confenrence on Photovoltaic Energy Conversion Volumo 2 1720
[5] Repmann T, Appenzeller W, Sehrbrock B, Stiebig H, Rech B 2004 Proceedings of the 19th European Photovoltaic Solar Energy Conference 1334
[6] Li Yuan-Min, Anna Selvan J A, Foustotchenko A, Li Liwei, Delahoy A E 2005 Photovoltaic Specialists Conference, Conference Record of the Thirty-first IEEE 1 1420
[7] Yamamoto K, Nakajima A, Yoshimi M, Sawada T, Fukuda S, Suezaki T, Ichikawa M, Koi Y, Goto M, Megruo T, Matsuda T, Sasaki T, Tawada Y 2006 Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference 2 1489
[8] Zhang X D, Zhao Y, Gao Y T, Chen F, Zhu F, Wei C C, Sun J, Geng X H, Xiong S Z 2006 Acta Phys. Sin. 55 6697 (in Chinese) [张晓丹、赵 颖、高艳涛、陈 飞、朱 锋、魏长春、孙 建、耿新华、熊绍珍 2006 55 6697]
[9] Zhao Y, Zhang X D, Zhu F, Gao Y T, Wei C C, Xue J M, Ren H Z, Zhang D K, Hou G F, Sun J, Geng X H 2005 15th International Photovoltaic Science and Engineering Conference (PVSEC-15) Shanghai China 65-67
[10] Zhang X D, Sun F H, Wang G H, Xu S Z, Wei C C, Hou G F, Sun J, Xiong S Z, Geng X H, Zhao Y 2009 23rd ICANS, Utrecht Netherland, ID 53
[11] Wang G H, Zhang X D, Xu S Z, Wei C C, Sun J, Xiong S Z, Geng X H, Zhao Y 2009 23rd ICANS, Utrecht Netherland, ID 503
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