Fabrication of superconducting qubits and auxiliary devices with niobium base layer

Su Fei-Fan; Yang Zhao-Hua; Zhao Shou-Kuan; Yan Hai-Sheng; Tian Ye; Zhao Shi-Ping

doi:10.7498/aps.71.20211865

Abstract

Over the past two decades significant advances have been made in the research of superconducting quantum computing and quantum simulation, in particular of the device design and fabrication that leads to ever-increasing superconducting qubit coherence times and scales. With Google’s announcement of the realization of “quantum supremacy”, superconducting quantum computing has attracted even more attention. Superconducting qubits are macroscopic objects with quantum properties such as quantized energy levels and quantum-state superposition and entanglement. Their quantum states can be precisely manipulated by tuning the magnetic flux, charge, and phase difference of the Josephson junctions with nonlinear inductance through electromagnetic pulse signals, thereby implementing the quantum information processing. They have advantages in many aspects and are expected to become the central part of universal quantum computing. Superconducting qubits and auxiliary devices prepared with niobium or other hard metals like tantalum as bottom layers of large-area components have unique properties and potentials for further development. In this paper the research work in this area is briefly reviewed, starting from the design and working principle of a variety of superconducting qubits, to the detailed procedures of substrate selection and pretreatment, film growth, pattern transfer, etching, and Josephson junction fabrication, and finally the practical superconducting qubit and their auxiliary device fabrications with niobium base layers are also presented. We aim to provide a clear overview for the fabrication process of these superconducting devices as well as an outlook for further device improvement and optimization in order to help establish a perspective for future progress.

Keywords:

Authors and contacts

1.
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
2.
School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China

Corresponding author: Zhao Shi-Ping, spzhao@iphy.ac.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 11874063) and the Key-Area Research and Development Program of Guangdong Province, China (Grant No. 2018B030326001)

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References

[1]	Makhlin Y, Schon G, Shnirman A 2001 Rev. Mod. Phys. 73 357 Google Scholar
[2]	Clarke J, Wilhelm F K 2008 Nature 19 459
[3]	Devoret M H, Schoelkopf R J 2013 Science 339 1169 Google Scholar
[4]	Krantz P, Kjaergaard M, Yan F, Orlando T P, Gustavsson S, Oliver W D 2019 Appl. Phys. Lett. 60 21318
[5]	Kjaergaard M, Schwartz M E, Braumüller J, Krantz P, Wang I J, Gustavsson S, Oliver W D 2020 Annu. Rev. 11 369
[6]	Mi X, Ippoliti M, Quintana C, et al. 2021 arXiv: 2107.13571 v2 [quant-ph]
[7]	Makhlin Y, Schon G, Shnirman A 2007 Physics 73 357
[8]	Paik H, Schuster D I, Bishop L S, Kirchmair G, Catelani G, Sears A P, Johnson B R, Reagor M J, Frunzio L, Glazman L I, Girvin S M, Devoret M H, Schoelkopf R J 2011 Phys. Rev. Lett. 107 240501 Google Scholar
[9]	Nakamura Y, Pashkin Y A, Tsai J S 1999 Nature 398 786 Google Scholar
[10]	Swingle B 2018 Nat. Phys. 14 988 Google Scholar
[11]	Salathé Y, Mondal M, Oppliger M, Heinsoo J, Kurpiers P, Potocnik A, Mezzacapo A, Heras U Las, Lamata L, Solano E, Filipp S, Wallraff A 2015 Phys. Rev. X 5 021027
[12]	Barends R, Lamata L, Kelly J, et al. 2015 Nat. Commun. 6 7654 Google Scholar
[13]	Zhong Y P, Xu D, Wang P, Song C, Guo Q J, Liu W X, Xu K, Xia B X, Lu C Y, Han S, Pan J W, Wang H 2016 Phys. Rev. Lett. 117 110501 Google Scholar
[14]	Flurin E, Ramasesh V V, Hacohen-Gourgy S, Martin L S, Yao N Y, Siddiqi I 2017 Phys. Rev. X 7 031023
[15]	Roushan P, Neill C, Tangpanitanon J, et al. 2017 Science 358 1175 Google Scholar
[16]	Xu K, Chen J J, Zeng Y, Zhang Y R, Song C, Liu W X, Guo Q J, Zhang P F, Xu D, Deng H, Huang K Q, Wang H, Zhu X B, Zheng D N, Fan H 2018 Phys. Rev. Lett. 120 050507 Google Scholar
[17]	Song C, Xu D, Zhang P, Wang J, Guo Q, Liu W, Xu K, Deng H, Huang K, Zheng D, Zheng S B, Wang H, Zhu X, Lu C Y, Pan J W 2018 Phys. Rev. Lett. 121 030502 Google Scholar
[18]	Ma R, Saxberg B, Owens C, Leung N, Lu Y, Simon J, Schuster D I 2019 Nature 566 51 Google Scholar
[19]	Guo X Y, Yang C, Zeng Y, Peng Y, Li H K, Deng H, Jin Y R, Chen S, Zheng D N, Fan H 2019 Phys. Rev. Appl. 11 044080 Google Scholar
[20]	Arute F, Arya K, Babbush R, Bacon D, Bardin J C, Barends R, Biswas R, Boixo S, Brandao F G, Buell D A 2019 Nature 574 505 Google Scholar
[21]	Xu K, Sun Z H, Liu W, Zhang Y R, Li H, Dong H, Ren W, Zhang P, Nori F, Zheng D, Fan H, Wang H 2020 Sci. Adv. 6 4935 Google Scholar
[22]	Guo Q, Cheng C, Sun Z H, Song Z, Li H, Wang Z, Ren W, Dong H, Zheng D, Zhang Y R, Mondaini R, Fan H, Wang H 2021 Nat. Phys. 17 234 Google Scholar
[23]	Kandala A, Temme K, Corcoles A D, Mezzacapo A, Chow J M, Gambetta J M 2019 Nature 567 491 Google Scholar
[24]	KassalI, WhitfieldJD, Perdomo-OrtizA, YungMH, Aspuru-GuzikA, 2011 Ann. Rev. Phys. Chem. 62 185 Google Scholar
[25]	Lloyd S 1996 Science 273 1073 Google Scholar
[26]	O’Malley P J J, Babbush R, Kivlichan I D, et al. 2016 Phys. Rev. X. 6 031007
[27]	Peruzzo A, McClean J, Shadbolt P, Yung M H, Zhou X Q, Love P J, Aspuru-Guzik A, O’Brien J L 2014 Nat. Comm. 5 4213 Google Scholar
[28]	Emani P S, Warrell J, Anticevic A, et al. 2021 Nat. Methods. 18 701 Google Scholar
[29]	Biamonte J, Wittek P, Pancotti N, Rebentrost P, Wiebe N, Lloyd S 2017 Nature 549 195 Google Scholar
[30]	Ristè D, Silva M P, Ryan C A, Cross A W, Corcoles A D, Smolin J A, Gambetta J M, Chow J M, Johnson B R 2017 NPJ Quant. Inf. 3 16 Google Scholar
[31]	Woerner S, Egger D J 2019 NPJ Quant. Inf. 5 15 Google Scholar
[32]	Chakrabarti S, Krishnakumar R, Mazzola G, Stamatopoulos N, Woerner S, Zeng W J arXiv2012: 03819 [quant-ph]
[33]	Chang J B, Vissers M R, Corcoles A D, Sandberg M, Gao J S, Abraham D W, Chow J M, Gambetta J M, Rothwell M B, Keefe G A, Steffen M, Pappas D P 2013 Appl. Phys. Lett. 103 012602 Google Scholar
[34]	Zhang G Y, Liu Y B, James J, Andrew R, Houck A 2017 npj Quant. Info. 3 1 Google Scholar
[35]	Blok M S, Ramasesh V V, Schuster T, Brien K O, Kreikebaum J M, Dahlen D, Morvan A, Yoshida B, Yao N Y, Siddiqi I arXiv: 2003.03307 v1 [quant-ph]
[36]	Sage J M, Bolkhovsky V, Oliver W D, Turek B, Welander P B 2011 J. Appl. Phys. 109 063915 Google Scholar
[37]	Stammeier M, Garcia S, Wallraff A 2018 Quantum Sci. Technol. 3 045007 Google Scholar
[38]	Su F F, Liu W Y, Xu H K, Deng H, Li Z Y, Tian Y, Zhu X B, Zheng D N, Lu L, Zhao S P 2017 Chin. Phys. B 26 060308 Google Scholar
[39]	Su F F, Yang Z H, Zhao S K, Yan H S, Wang Z T, Song X H, Tian Y, Zhao S P 2021 Chin. Phys. B 30 100304 Google Scholar
[40]	Liu W Y, Su F F, Xu H K, Li Z Y, Tian Y, Zhu X B, Lu Li, Han S Y, Zhao S P 2018 Supercond. Sci. Tech. 31 045003 Google Scholar
[41]	Su F F, Wang Z T, Xu H K, Zhao S K, Yan H S, Yang Z H, TianY, Zhao S P 2019 Chin. Phys. B 28 110303 Google Scholar
[42]	Wang C L, Li X, Xu H K, et al. arXiv: 2105.09890 [quant-ph]
[43]	Chiorescu I, Nakamura Y, Harmans C J, Mooij J E 2003 Science 299 1869 Google Scholar
[44]	Simmonds R W, Lang K M, Hite D A, Nam S, Pappas D P, Martinis J M 2004 Phys. Rev. Lett. 93 077003 Google Scholar
[45]	Koch J, Terri M Y, Gambetta J, Houck A A, Schuster D I, Majer J, Blais A, Devoret M H, Girvin S M, Schoelkopf R J 2007 Phys. Rev. A 76 042319 Google Scholar
[46]	Majer J, Chow J M, Gambetta J M, Koch J, Johnson B R, Schreier J A, Frunzio L, Schuster D I, Houck A A, Wallraff A, Blais A, Devoret M H, Girvin S M, Schoelkopf R J 2007 Nature 449 443 Google Scholar
[47]	Barends R, Kelly J, Megrant A, Sank D, Jeffrey E, Chen Y, Yin Y, Chiaro B, Mutus J, Neill C, O'Malley P, Roushan P, Wenner J, White T C, Cleland A N, Martinis J M 2013 Phys. Rev. Lett. 111 080502 Google Scholar
[48]	Manucharyan V E, Koch J, Glazman L I, DevoretM H 2009 Science 326 113 Google Scholar
[49]	Yan F, Gustavsson S, Kamal A, Birenbaum J, Sears A P, Hover D, Gudmundsen T J, Rosenberg D, Samach G, Weber S, Yoder J L, Orlando T P, Clarke J, Kerman A J, Oliver W D 2016 Nat. Comm. 7 12964 Google Scholar
[50]	Zhong Y P, Li C Y, Wang H H, Chen Y 2013 Chin. Phys. B 22 110313 Google Scholar
[51]	Johnson M W, Amin M H S, Gildert S, Lanting T, Hamze F, Dickson N, Harris R, Berkley A J, Johansson J, Bunyk P 2011 Nature 473 194 Google Scholar
[52]	Su F F, Yang Z H 2021 Physics and Engineering 31 73
[53]	Houck A A, Schreier J A, Johnson B R, Chow J M, Koch J, Gambetta J M, Schuster D I, Frunzio L, Devoret M H, Girvin S M, Schoelkopf R J 2008 Phys. Rev. Lett. 101 080502 Google Scholar
[54]	Gambetta J M, Murrayc E, Fung YK K 2017 IEEE Transactions on Applied Superconductivity 27 1
[55]	Pop I M, Geerlings K, Catelani G, Schoelkopf R J, Glazman L I, Devoret M H 2014 Nature 508 369 Google Scholar
[56]	Martinis J M, Megrant A arXiv: 14105793 [quant-ph]
[57]	Megrant A, Neill C, Barends R, et al. 2012 Appl. Phys. Lett. 100 113510 Google Scholar
[58]	Quintana C M, Megrant A, Chen Z, et al. 2014 Appl. Phys. Lett. 105 062601 Google Scholar
[59]	Wang C, Axline C, Gao Y Y, Brecht T, Chu Y, Frunzio L, Devoret M H, Schoelkopf R J 2015 Appl. Phys. Lett. 107 162601 Google Scholar
[60]	Gambetta J M, Murray C E, Fung Y K K, McClure D T, Dial O, Shanks W, Sleight J, Senior, Steffen M 2017 IEEE Trans. Appl. Supercond. 27 1
[61]	Leonard E, Beck M A, Nelson J, et al. 2019 Phys. Rev. Appl. 11 014009 Google Scholar
[62]	Bruno A, de Lange G, Asaad S, van der Enden K L, Langford N K, DiCarlo L 2015 Appl. Phys. Lett. 106 182601 Google Scholar
[63]	Vissers M R, Gao J, Wisbey D S, Hite D A, Tseui C C, Corcoles A D, Steffen M, Pappas D P 2010 Appl. Phys. Lett. 97 232509 Google Scholar
[64]	Gambetta J M, Murray C E, Fung Y K K, McClure D T, Dial O, Shanks W, Sleight J W, Steffen M 2017 IEEE Trans. Appl. Supercond. 27 1700205
[65]	Wisbey D S, Gao J, Vissers M R, da Silva F C S, Kline J S, Vale L, Pappas D P 2010 J. Appl. Phys. 108 093918 Google Scholar
[66]	Ohya S, Chiaro B, Megrant A, et al. 2014 Supercond. Sci. Tech. 27 015009 Google Scholar
[67]	Melville A, Calusine G, Woods W, Serniak K, Golden E, Niedzielski B M, Kim D K, Sevi A, Yoder J L, Dauler E A, Oliver W D 2020 Appl. Phys. Lett. 117 124004 Google Scholar
[68]	Geerlings K, Shankar S, Edwards E, Frunzio L, Schoelkopf R J, Devoret M H 2012 Appl. Phys. Lett. 100 192601 Google Scholar
[69]	Dunsworth A, Megrant A, Quintana C, et al. 2017 Appl. Phys. Lett. 111 022601 Google Scholar
[70]	Nersisyan A, Poletto S, Alidoust N, Manenti R, Renzas R, Bui C V, Vu K, Whyland T, Mohan Y, Sete E A, Stanwyck S, Bestwick A, Reagor M arxXiv1901.08042[quant-ph]
[71]	Altoé M V P, Banerjee A, Berk C, et al. arXiv2012.07604[quant-ph]
[72]	Premkumar A, Weiland C, Hwang S, et al. arXiv: 2004.02908 v1[quant-ph]
[73]	Kamal A, Yoder J L, Yan F, Gudmundsen T J, Hover D, Sears A P, Welander P, Orlando T P, Gustavsson S, Oliver W D arXiv1606.09262[cond-mat. mes-hall]
[74]	Earnest C T, Béjanin J H, McConkey T G, Peters E A, Korinek A, Yuan H, Mariantoni M 2018 Supercond. Sci. Tech. 31 125013 Google Scholar
[75]	You J Q and Nori F 2011 Nature 474 589 Google Scholar
[76]	Kjaergaard A, Schwartz M E, Braumüller J, Krantz P, Wang J I J, Gustavsson S, Oliver W D 2020 Ann. Rev. Cond. Matter Phys. 11 369 Google Scholar
[77]	Kreikebaum J M, Dove A, Livingston W, Kim E, Siddiqi I 2016 Supercond. Sci. Tech. 29 104002 Google Scholar
[78]	Segall K, Crankshaw D, Nakada D, Orlando T P, Levitov L S, Lloyd S, Markovic N, Valenzuela S O, Tinkham M, Berggren K K 2003 Phys. Rev. B 67 220506 Google Scholar
[79]	Gurvitch M, Washington M A, Huggins H A 1983 Appl. Phys. Lett. 42 472 Google Scholar
[80]	Cava R J, Batlogg B, Krajewski J J, Poulsen H F, Gammel P, Peck W F, Rupp L W 1991 Phys. Rev. B 44 6973 Google Scholar
[81]	Verjauw J, Potočnik A, Mongillo M, et al. 2021 Phys. Rev. Applied 16 014018 Google Scholar
[82]	Place A P M, Rodgers L V H, Rodgers L V H, et al. 2021 Nat. Comm. 12 1779 Google Scholar
[83]	Gladczuk L, Patel A, Paur C S, Sosnowski M 2004 Thin Solid Films 467 150 Google Scholar
[84]	Face D W, Probe D E 1987 J. Vac. Sci. Tech. 5 3406
[85]	Barends R, Baselmans J J A, Hovenier J N, Gao J R, Yates S J C, Klapwijk T M, Hoevers H F C 2007 IEEE Trans. Appl. Supercond. 17 263 Google Scholar
[86]	Schauer A, Roschy M 1972 Thin Solid Films 12 313 Google Scholar
[87]	Fàbrega L, Fernández-Martínez I, Parra-Borderías M, Gil O, Camón A, Arrabal R G, Sesé J, Santiso J, Costa-Krämer J L, Briones F 2009 IEEE Trans. Appl. Supercond. 19 3779 Google Scholar
[88]	Shearrow A, Koolstra G, Whiteley S J, Earnest N, Barry P S, Heremans F J, Awschalom D D, Shirokoff E, Schuster D I arXiv1808.06009 [cond-mat. mes-hall]
[89]	Profeta G, Franchini C, Lathiotakis N N, Floris A, Sanna A, Marques M A L, Lüders M, Massidda S, Gross E K U, Continenza A 2006 Phys. Rev. Lett. 96 047003 Google Scholar
[90]	Pickard C J, Errea I, Eremets M I 2020 Ann. Rev. Condens. Matter. Phys. 11 57 Google Scholar
[91]	Lisenfeld J, Bilmes A, Megrant A, Barends R, Kelly J, Klimov P, Weiss G, Martinis J M, Ustinov A V 2019 NPJ Quantum Inf. 5 105 Google Scholar
[92]	Park J, Yan A, Tilka J A, Sampson K C, Savage D E, Prance J R, Simmons C B, Lagally M G, Coppersmith S N, Eriksson M A, Holt M V, Evans P G 2016 Appl. Phys. Lett. 4 066102
[93]	Lisenfeld J, Grabovskij G J, Müller C, Cole J H, Weiss G, Ustinov A V 2015 Nat. Comm. 6 6182 Google Scholar
[94]	Pateras A, Park Y, Ahn Y, Tilka J A, Holt M V, Reichl C, Wegscheider W, Baart T A, Dehollain J P, Mukhopadhyay U, Vandersypen L M K, Evans P G 2018 Nano Lett. 18 2780 Google Scholar
[95]	Anderson A C, Smith S C 1973 J. Phys. Chem. Solids 34 111 Google Scholar
[96]	Wang H, Shi C, Hu J, Han S, Yu C, Wu R Q 2015 Phys. Rev. Lett. 115 077002 Google Scholar
[97]	Lee D, Du Bois J L, Lordi V 2014 Phys. Rev. Lett. 112 017001 Google Scholar
[98]	Kumar P, Sendelbach S, Beck M A, Freeland J W, Wang Z, Wang H, Yu C C, Wu R Q, Pappas D P, McDermott R 2016 Phys. Rev. Appl. 6 041001 Google Scholar
[99]	Choi S, Lee D H, Louie S G, Clarke J 2009 Phys. Rev. Lett. 103 197001 Google Scholar
[100]	Neill C, Megrant A, Barends R, Chen Y, Chiaro B, Kelly J, Mutus J Y, O’Malley P J J, Sank D, Wenner J, White T C, Yin Y, Cleland A N, Martinis J M 2013 Appl. Phys. Lett. 103 072601 Google Scholar
[101]	Lock E H, Xu P, Kohler T, Camacho L, Prestigiacomo J, Rosen Y J, Osborn K D 2019 IEEE Trans. Appl. Supercond. 29 1700108
[102]	Woods W, Calusine G, Melville A, Sevi A, Golden E, Kim D K, Rosenberg D, Yoder J L, Oliver W D 2019 Phys. Rev. Appl. 12 014012 Google Scholar
[103]	Dolan G J 1977 Appl. Phys. Lett. 31 337 Google Scholar
[104]	Costache M V, Bridoux G, Neumann I, Valenzuela S O 2012 J. Vac. Sci. Tech. B. 30 104
[105]	Kreikebaum J M, O’Brien K P, Morvan A, Siddiqi I 2020 Supercond. Sci. Tech. 33 0602 Google Scholar
[106]	Shapiro S 1963 Phys. Rev. Lett. 11 80 Google Scholar
[107]	Clarke J 1972 Phys. Rev. Lett. 28 1363 Google Scholar
[108]	Cai N, Zhou G, Müller K, Starr D E 2012 Appl. Phys. Lett. 101 171605 Google Scholar
[109]	Ambegaokar V, Baratoff A 1963 Phys. Rev. Lett. 10 486 Google Scholar
[110]	Steinbach A, Joyez P, Cottet A, Esteve D, Devoret M H, Huber M E, Martinis J M 2001 Phys. Rev. Lett. 87 137003 Google Scholar
[111]	Zhang E, Srinivasan S, Sundaresan N, et al. arXiv: 2012.08475 [quant-ph]
[112]	Bilmes A, Neumann A K, Volosheniuk S, Ustinov A V, Lisenfeld J arXiv: 2101.01453 v2 [quant-ph]
[113]	Osman A, Simon J, Bengtsson A, Kosen S, Krantz P, Perez D, Scigliuzzo M, Bylander J, Roudsari A F arXiv: 2011.05230 v1 [cond-mat. supr-con]
[114]	Chen Z, Megrant A, Kelly J, et al. 2014 Appl. Phys. Lett. 104 052602 Google Scholar
[115]	Rosenberg D, Weber S J, Conway D, Jost D R W, Mallek J, Calusine G, Das R, Kim D, Schwartz M E, Woods W, Yoder J L, Oliver W D 2020 IEEE Micro. Mag. 21 72
[116]	Jin Z C, Wu H T, Yu H F, Yu Y 2018 Chin. Phys. B 27 100310 Google Scholar
[117]	Burnett J J, Bylander J, Bengtsson A, Scigliuzzo M, Niepce D 2019 NPJ Quantum Inf. 5 1 Google Scholar
[118]	Schlor S, Lisenfeld J, Mueller C, Bilmes A, Schneider A, Pappas D P, Ustinov A V, Weides M 2019 Phys. Rev. Lett. 123 190502 Google Scholar
[119]	Nersisyan A, Poletto S, Alidoust N, Manenti R, Renzas R, Bui C V, Vu K, Whyland T, Mohan Y, Sete E A, Stanwyck S, Bestwick A, Reagor M arXiv1901.08042 [quant-ph]
[120]	Oliver W D, Welander P B 2013 MRS Bulletin 38 816 Google Scholar
[121]	de Graaf S E, Faoro L, Burnett J, Adamyan A A, Tzalenchuk A Y, Kubatkin S E, Lindström T, Danilov A V 2018 Nat. Commun. 9 1143 Google Scholar
[122]	Lisenfeld J, Mueller C, Cole J H, Bushev P, Lukashenko A, Shnirman A, Ustinov A V 2010 Phys. Rev. Lett. 105 230504 Google Scholar
[123]	Paz A, Lebedeva I, Tokatly I, Rubio A 2014 Phys. Rev. B 90 224202 Google Scholar
[124]	Muller C, Cole J H, Lisenfeld J 2019 Rep. Prog. Phys. 82 124501 Google Scholar
[125]	Martinis J M, Cooper K B, McDermott R, Steffen M, Ansmann M, Osborn K D, Cicak K, Oh S, Pappas D P, Simmonds RW and Yu C C 2005 Phys. Rev. Lett. 95 210503 Google Scholar
[126]	Neeley M, Ansmann M, Bialczak R C, Hofheinz M, Katz N, Lucero E, O’Connell A, Wang H, Cleland A N and Martinis J 2008 Phys. Rev. B 77 180508 Google Scholar
[127]	Martinis J M 2009 Quantum Inf. Process. 8 81 Google Scholar
[128]	Weides M, Bialczak R C, Lenander M, Lucero E, Mariantoni M, Neeley M, O’Connell A D, Sank D, Wang H, Wenner J, Yamamoto T, Yin Y, Cleland A N and Martinis J 2011 Supercond. Sci. Technol. 24 055005 Google Scholar
[129]	Lecocq F, Pop I M, Peng Z H, Matei I, Crozes T, Fournier T, Naud C, Guichard W and Buisson O 2011 Nanotechnology 22 315302 Google Scholar
[130]	Semenov V K, Danilov G V, Averin D V 2003 IEEE Trans. Appl. Supecond. 13 938 Google Scholar
[131]	Semenov V K, Danilov G V, Averin D V 2007 IEEE Trans. Appl. Supecond. 17 455 Google Scholar
[132]	Ren J, Semenov V K, Polyakov Y A, Averin D V, Tsai J S 2009 IEEE Trans. Appl. Supecond. 19 961 Google Scholar
[133]	Averin D V, Xu K, Zhong Y P, Song C, Wang H, Han S 2016 Phys. Rev. Lett. 116 010501 Google Scholar
[134]	Han S, Lapointe J, Lukens J E 1989 Phys. Rev. Lett. 63 1712 Google Scholar
[135]	Li S X, Yu Y, Zhang Y, Qiu W, Han S 2002 Phys. Rev. Lett. 89 098301 Google Scholar
[136]	Balestro F, Claudon J, Pekola J P, Buisson O 2003 Phys. Rev. Lett. 91 158301 Google Scholar
[137]	Lei C U, Krayzman L, Ganjam S, Frunzio L, Schoelkopf R J 2020 Appl. Phys. Lett. 116 154002
[138]	Barends R, Vercruyssen N, Endo A, de Visser P J, Zijlstra T, Klapwijk T M, Diener P, Yates S J C, Baselmans J J A 2010 Appl. Phys. Lett. 97 023508 Google Scholar
[139]	Leduc H G, Bumble B, Day P K, Eom B H, Gao J, Golwala S, Mazin B A, McHugh S, Merrill A, Moore D C, Noroozian O, Turner A D, Zmuidzinas J 2010 Appl. Phys. Lett. 97 102509 Google Scholar
[140]	Foxen B, Mutus J Y, Lucero E, et al. 2018 Quantum Sci. Technol. 3 014005 Google Scholar
[141]	Levenson-Falk E M, Vijay R, Siddiqi I 2011 Appl. Phys. Lett. 98 123115 Google Scholar
[142]	Castellanos-Beltran M A, Irwin K D, Hilton G C, Vale L R, Lehnert K W 2008 Nat. Phys. 4 929 Google Scholar
[143]	Siddiqi I, Vijay R, Pierre F, Wilson C M, Metcalfe M, Rigetti C, Frunzio L, Devoret M H 2004 Phys. Rev. Lett. 93 207002 Google Scholar
[144]	Reed M D, DiCarlo L, Johnson B R, Sun L, Schuster D I, Frunzio L, Schoelkopf R J 2010 Phys. Rev. Lett. 105 173601 Google Scholar
[145]	Huang K Q, Guo Q J, Song C, Zheng Y R, Deng H, Wu Y L, Jin Y R, Zhu X B, Zheng D N 2017 Chin. Phys. B 26 094203 Google Scholar
[146]	Yang R, DengH 2020 IEEE Trans. APP. Supercon. 30 4 Google Scholar
[147]	Roy T, Kundu S, Chand M, Vadiraj A M, Ranadive A, Nehra N, Patankar M P, Aumentado J, Clerk A A, Vijaz R 2015 Appl. Phy. Lett. 107 262601 Google Scholar
[148]	Xue H, Lin Z R, Jiang W B, Niu Z Q, Liu K, Peng W, Wang Z 2021 Chin. Phys. B 30 068503 Google Scholar
[149]	Lu Y P, Zuo Q, Pan J Z, Jiang J L, Wei X Y, Li Z S, Xu W Q, Zhang K X, Guo T T, Wang S, Cao C H, Xu W W, Sun G Z, Wu P H 2021 Chin. Phys. B 30 068504 Google Scholar
[150]	Eom B H, Day P K, LeDay H G, Zmuidzinas J 2012 Nat. Phy. 8 623 Google Scholar
[151]	White T C, Mutus J Y, Kelly J, Sank D, Martinis J M 2015 Appl. Phy. Lett. 106 242601 Google Scholar
[152]	Macklin C, O’Brien, Hover D, Schwartz M E, Bolkhovsky V, Zhang X, Oliver W D, Siddiqi I 2015 Science 350 307 Google Scholar
[153]	Harrow A W, Montanaro A 2017 Nature 549 203 Google Scholar
[154]	Kelly J, Barends R, Fowler A G, et al. 2015 Nature 519 66 Google Scholar
[155]	Xu H K, Song C, Liu W Y, Xue G M, Su F F, Deng H, Tian Y, Zheng D N, Han S Y, Zhong Y P, Wang H, Liu Y X, Zhao S P 2016 Nat. Comm. 7 11018 Google Scholar
[156]	Wu Y L, Bao W S, Cao S R, Chen F S, Chen M C, Pan J W, et al. arXiv: 2106.14734 v1 [quant-ph]

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Figure 1. Circuit diagram, potential energy and energy levels of three superconducting qubits: (a) Charge qubit; (b) flux qubit; (c) phase qubit ^[50].

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图 2 Xmon超导量子比特^[47]　(a) 器件照片; (b) 约瑟夫森结区放大图; (c) 电路示意图

Figure 2. Superconducting Xmon qubit ^[47]: (a) Optical micrograph; (b) magnified view of Josephson-junction area; (c) circuit diagram.

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图 3 Fluxonium量子比特^[48]　(a) 器件照片; (b) 天线; (c) 3D腔; (d) 电路示意; (e) 势能和能级示意图

Figure 3. Superconducting fluxonium qubit ^[48]: (a) Optical micrograph; (b) antenna; (c) 3D resonator; (d) circuit diagram; (e) potential energy and energy levels.

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图 4 并联电容磁通量子比特^[49]　(a) 样品基本结构; (b) 电容部分; (c) 约瑟夫森结部分

Figure 4. C-shunt flux qubit^[49]: (a) Device structure; (b) capacitor area; (c) Josephson-junction area.

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图 5 HiPIMS工艺制备的铌膜与普通磁控溅射方法生长的铌膜致密性对比^[72]

Figure 5. Comparison of the density of niobium film prepared by Hipims process with that by conventional magnetron sputtering^[72].

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图 6 两种约瑟夫森结设计方案 (a), (c)设计图; (b), (d)对应设计图制备的约瑟夫森结电镜照片^[112,113]

Figure 6. Two designs of Josephson junctions: (a), (c) Design drawings; (b), (d) electron micrographs of Josephson junctions prepared by corresponding designs ^[112,113].

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图 7 (a)铌基位相量子位中心区域的光学显微镜照片, 硅基片呈绿色, 而较暗和较亮的金属部分是Nb和Al薄膜; (b)位相量子比特能谱与能量弛豫时间的测量结果^[38]

Figure 7. (a) Optical microscope image of the central region of Nb-based phase qubit, the substrate appears greenish in color while the darker and brighter parts are the Nb and Al films; (b) measurement results of energy spectrum and energy relaxation time of phase qubit^[38].

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图 8 (a) 铌基nSQUID量子比特中心部分的假色光学照片, 衬底、Nb层、Al层和α-Si层分别呈灰色、浅黄色、白色和棕色; (b)—(e) nSQUID量子比特不同条件下的典型二维势阱^[40]

Figure 8. (a) False-colored optical photograph of the central part of Nb-based nSQUID qubit with the substrate, Nb layer, Al layers, and α-Si layer appearing in gray, light yellow, white, and brown, respectively; (b)–(e) Typical 2D potential landscapes of the nSQUID qubit ^[40].

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图 9 (a)铌基耦合10比特器件中心区域; (b)跨过控制线的空气桥; (c)包含两个约瑟夫森结的SQUID环区域; (d)样品能量弛豫时间测量结果^[39]

Figure 9. Microscope images of (a) the central region of Nb-based coupled 10-qubit device; (b) an airbridge across the control line; (c) the SQUID loop area containing two Josephson junctions; (d) measurement results of sample energy relaxation time^[39].

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图 10 (a)铌基JPA光学照片; (b)增益与(c)噪声温度随频率的关系 ^[41]

Figure 10. (a) False-colored optical photograph of Nb-based JPA device; (b) frequency dependences of the device gain and noise temperature (c) ^[41].

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表 1 不同生长模式制备的铌薄膜器件性质^[72]

Table 1. Properties of niobium thin film devices with different growth modes^[72].

Deposition	Sputtered	HiPIMS opt	HiPIMS norm
T₁/μs	56 ± 12	33 ± 2	17 ± 9
RRR	8.9 ± 0.1	5.0 ± 0.2	2.9 ± 0.1
T_c/K	9.0 ± 0.1	8.6 ± 0.1	8.1 ± 0.1
GSA/nm²	1140 ± 70	500 ± 50	180 ± 30
Nb	61 ± 3	64 ± 3	45 ± 2
NbOx	15.1 ± 0.2	16.0 ± 0.3	20.4 ± 0.8
NbO	0 ± 2	0 ± 1	5 ± 1
NbO₂	3.1 ± 0.4	3.5 ± 0.2	10 ± 2
Nb₂O₅	20 ± 1	15.9 ± 0.8	19 ± 2
Suboxide	19 ± 2	20 ± 1	36 ± 2

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表 2 不同方法生长铌薄膜以及所制备谐振腔的性质^[57]

Table 2. Growth of niobium thin films by different methods and fabricated resonator properties ^[57].

Process^a	In vacuo cleaning	w/μm	f₀/GHz	Q_i-H×10⁶	Q_i-L×10⁶
(A) Sputter	100 eV Ar⁺ mill for 2 min	3 15	3.833 6.129	4.30 4.50	0.16 0.40
(B) E-beam	60 eV Ar⁺ mill for 2 min	3 15	3.810 6.089	9.90 4.40	0.66 0.72
(C) MBE	None	6 15	4.973 6.120	5.70 4.33	0.53 0.76
(D) MBE	LL^b anneal	3 15	3.773 6.125	6.58 5.38	0.75 0.80
(E) MBE	LL^b and 850 ℃ anneal	3 15	3.876 6.127	10.10 6.40	1.15 0.92

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[1]	Makhlin Y, Schon G, Shnirman A 2001 Rev. Mod. Phys. 73 357 Google Scholar
[2]	Clarke J, Wilhelm F K 2008 Nature 19 459
[3]	Devoret M H, Schoelkopf R J 2013 Science 339 1169 Google Scholar
[4]	Krantz P, Kjaergaard M, Yan F, Orlando T P, Gustavsson S, Oliver W D 2019 Appl. Phys. Lett. 60 21318
[5]	Kjaergaard M, Schwartz M E, Braumüller J, Krantz P, Wang I J, Gustavsson S, Oliver W D 2020 Annu. Rev. 11 369
[6]	Mi X, Ippoliti M, Quintana C, et al. 2021 arXiv: 2107.13571 v2 [quant-ph]
[7]	Makhlin Y, Schon G, Shnirman A 2007 Physics 73 357
[8]	Paik H, Schuster D I, Bishop L S, Kirchmair G, Catelani G, Sears A P, Johnson B R, Reagor M J, Frunzio L, Glazman L I, Girvin S M, Devoret M H, Schoelkopf R J 2011 Phys. Rev. Lett. 107 240501 Google Scholar
[9]	Nakamura Y, Pashkin Y A, Tsai J S 1999 Nature 398 786 Google Scholar
[10]	Swingle B 2018 Nat. Phys. 14 988 Google Scholar
[11]	Salathé Y, Mondal M, Oppliger M, Heinsoo J, Kurpiers P, Potocnik A, Mezzacapo A, Heras U Las, Lamata L, Solano E, Filipp S, Wallraff A 2015 Phys. Rev. X 5 021027
[12]	Barends R, Lamata L, Kelly J, et al. 2015 Nat. Commun. 6 7654 Google Scholar
[13]	Zhong Y P, Xu D, Wang P, Song C, Guo Q J, Liu W X, Xu K, Xia B X, Lu C Y, Han S, Pan J W, Wang H 2016 Phys. Rev. Lett. 117 110501 Google Scholar
[14]	Flurin E, Ramasesh V V, Hacohen-Gourgy S, Martin L S, Yao N Y, Siddiqi I 2017 Phys. Rev. X 7 031023
[15]	Roushan P, Neill C, Tangpanitanon J, et al. 2017 Science 358 1175 Google Scholar
[16]	Xu K, Chen J J, Zeng Y, Zhang Y R, Song C, Liu W X, Guo Q J, Zhang P F, Xu D, Deng H, Huang K Q, Wang H, Zhu X B, Zheng D N, Fan H 2018 Phys. Rev. Lett. 120 050507 Google Scholar
[17]	Song C, Xu D, Zhang P, Wang J, Guo Q, Liu W, Xu K, Deng H, Huang K, Zheng D, Zheng S B, Wang H, Zhu X, Lu C Y, Pan J W 2018 Phys. Rev. Lett. 121 030502 Google Scholar
[18]	Ma R, Saxberg B, Owens C, Leung N, Lu Y, Simon J, Schuster D I 2019 Nature 566 51 Google Scholar
[19]	Guo X Y, Yang C, Zeng Y, Peng Y, Li H K, Deng H, Jin Y R, Chen S, Zheng D N, Fan H 2019 Phys. Rev. Appl. 11 044080 Google Scholar
[20]	Arute F, Arya K, Babbush R, Bacon D, Bardin J C, Barends R, Biswas R, Boixo S, Brandao F G, Buell D A 2019 Nature 574 505 Google Scholar
[21]	Xu K, Sun Z H, Liu W, Zhang Y R, Li H, Dong H, Ren W, Zhang P, Nori F, Zheng D, Fan H, Wang H 2020 Sci. Adv. 6 4935 Google Scholar
[22]	Guo Q, Cheng C, Sun Z H, Song Z, Li H, Wang Z, Ren W, Dong H, Zheng D, Zhang Y R, Mondaini R, Fan H, Wang H 2021 Nat. Phys. 17 234 Google Scholar
[23]	Kandala A, Temme K, Corcoles A D, Mezzacapo A, Chow J M, Gambetta J M 2019 Nature 567 491 Google Scholar
[24]	KassalI, WhitfieldJD, Perdomo-OrtizA, YungMH, Aspuru-GuzikA, 2011 Ann. Rev. Phys. Chem. 62 185 Google Scholar
[25]	Lloyd S 1996 Science 273 1073 Google Scholar
[26]	O’Malley P J J, Babbush R, Kivlichan I D, et al. 2016 Phys. Rev. X. 6 031007
[27]	Peruzzo A, McClean J, Shadbolt P, Yung M H, Zhou X Q, Love P J, Aspuru-Guzik A, O’Brien J L 2014 Nat. Comm. 5 4213 Google Scholar
[28]	Emani P S, Warrell J, Anticevic A, et al. 2021 Nat. Methods. 18 701 Google Scholar
[29]	Biamonte J, Wittek P, Pancotti N, Rebentrost P, Wiebe N, Lloyd S 2017 Nature 549 195 Google Scholar
[30]	Ristè D, Silva M P, Ryan C A, Cross A W, Corcoles A D, Smolin J A, Gambetta J M, Chow J M, Johnson B R 2017 NPJ Quant. Inf. 3 16 Google Scholar
[31]	Woerner S, Egger D J 2019 NPJ Quant. Inf. 5 15 Google Scholar
[32]	Chakrabarti S, Krishnakumar R, Mazzola G, Stamatopoulos N, Woerner S, Zeng W J arXiv2012: 03819 [quant-ph]
[33]	Chang J B, Vissers M R, Corcoles A D, Sandberg M, Gao J S, Abraham D W, Chow J M, Gambetta J M, Rothwell M B, Keefe G A, Steffen M, Pappas D P 2013 Appl. Phys. Lett. 103 012602 Google Scholar
[34]	Zhang G Y, Liu Y B, James J, Andrew R, Houck A 2017 npj Quant. Info. 3 1 Google Scholar
[35]	Blok M S, Ramasesh V V, Schuster T, Brien K O, Kreikebaum J M, Dahlen D, Morvan A, Yoshida B, Yao N Y, Siddiqi I arXiv: 2003.03307 v1 [quant-ph]
[36]	Sage J M, Bolkhovsky V, Oliver W D, Turek B, Welander P B 2011 J. Appl. Phys. 109 063915 Google Scholar
[37]	Stammeier M, Garcia S, Wallraff A 2018 Quantum Sci. Technol. 3 045007 Google Scholar
[38]	Su F F, Liu W Y, Xu H K, Deng H, Li Z Y, Tian Y, Zhu X B, Zheng D N, Lu L, Zhao S P 2017 Chin. Phys. B 26 060308 Google Scholar
[39]	Su F F, Yang Z H, Zhao S K, Yan H S, Wang Z T, Song X H, Tian Y, Zhao S P 2021 Chin. Phys. B 30 100304 Google Scholar
[40]	Liu W Y, Su F F, Xu H K, Li Z Y, Tian Y, Zhu X B, Lu Li, Han S Y, Zhao S P 2018 Supercond. Sci. Tech. 31 045003 Google Scholar
[41]	Su F F, Wang Z T, Xu H K, Zhao S K, Yan H S, Yang Z H, TianY, Zhao S P 2019 Chin. Phys. B 28 110303 Google Scholar
[42]	Wang C L, Li X, Xu H K, et al. arXiv: 2105.09890 [quant-ph]
[43]	Chiorescu I, Nakamura Y, Harmans C J, Mooij J E 2003 Science 299 1869 Google Scholar
[44]	Simmonds R W, Lang K M, Hite D A, Nam S, Pappas D P, Martinis J M 2004 Phys. Rev. Lett. 93 077003 Google Scholar
[45]	Koch J, Terri M Y, Gambetta J, Houck A A, Schuster D I, Majer J, Blais A, Devoret M H, Girvin S M, Schoelkopf R J 2007 Phys. Rev. A 76 042319 Google Scholar
[46]	Majer J, Chow J M, Gambetta J M, Koch J, Johnson B R, Schreier J A, Frunzio L, Schuster D I, Houck A A, Wallraff A, Blais A, Devoret M H, Girvin S M, Schoelkopf R J 2007 Nature 449 443 Google Scholar
[47]	Barends R, Kelly J, Megrant A, Sank D, Jeffrey E, Chen Y, Yin Y, Chiaro B, Mutus J, Neill C, O'Malley P, Roushan P, Wenner J, White T C, Cleland A N, Martinis J M 2013 Phys. Rev. Lett. 111 080502 Google Scholar
[48]	Manucharyan V E, Koch J, Glazman L I, DevoretM H 2009 Science 326 113 Google Scholar
[49]	Yan F, Gustavsson S, Kamal A, Birenbaum J, Sears A P, Hover D, Gudmundsen T J, Rosenberg D, Samach G, Weber S, Yoder J L, Orlando T P, Clarke J, Kerman A J, Oliver W D 2016 Nat. Comm. 7 12964 Google Scholar
[50]	Zhong Y P, Li C Y, Wang H H, Chen Y 2013 Chin. Phys. B 22 110313 Google Scholar
[51]	Johnson M W, Amin M H S, Gildert S, Lanting T, Hamze F, Dickson N, Harris R, Berkley A J, Johansson J, Bunyk P 2011 Nature 473 194 Google Scholar
[52]	Su F F, Yang Z H 2021 Physics and Engineering 31 73
[53]	Houck A A, Schreier J A, Johnson B R, Chow J M, Koch J, Gambetta J M, Schuster D I, Frunzio L, Devoret M H, Girvin S M, Schoelkopf R J 2008 Phys. Rev. Lett. 101 080502 Google Scholar
[54]	Gambetta J M, Murrayc E, Fung YK K 2017 IEEE Transactions on Applied Superconductivity 27 1
[55]	Pop I M, Geerlings K, Catelani G, Schoelkopf R J, Glazman L I, Devoret M H 2014 Nature 508 369 Google Scholar
[56]	Martinis J M, Megrant A arXiv: 14105793 [quant-ph]
[57]	Megrant A, Neill C, Barends R, et al. 2012 Appl. Phys. Lett. 100 113510 Google Scholar
[58]	Quintana C M, Megrant A, Chen Z, et al. 2014 Appl. Phys. Lett. 105 062601 Google Scholar
[59]	Wang C, Axline C, Gao Y Y, Brecht T, Chu Y, Frunzio L, Devoret M H, Schoelkopf R J 2015 Appl. Phys. Lett. 107 162601 Google Scholar
[60]	Gambetta J M, Murray C E, Fung Y K K, McClure D T, Dial O, Shanks W, Sleight J, Senior, Steffen M 2017 IEEE Trans. Appl. Supercond. 27 1
[61]	Leonard E, Beck M A, Nelson J, et al. 2019 Phys. Rev. Appl. 11 014009 Google Scholar
[62]	Bruno A, de Lange G, Asaad S, van der Enden K L, Langford N K, DiCarlo L 2015 Appl. Phys. Lett. 106 182601 Google Scholar
[63]	Vissers M R, Gao J, Wisbey D S, Hite D A, Tseui C C, Corcoles A D, Steffen M, Pappas D P 2010 Appl. Phys. Lett. 97 232509 Google Scholar
[64]	Gambetta J M, Murray C E, Fung Y K K, McClure D T, Dial O, Shanks W, Sleight J W, Steffen M 2017 IEEE Trans. Appl. Supercond. 27 1700205
[65]	Wisbey D S, Gao J, Vissers M R, da Silva F C S, Kline J S, Vale L, Pappas D P 2010 J. Appl. Phys. 108 093918 Google Scholar
[66]	Ohya S, Chiaro B, Megrant A, et al. 2014 Supercond. Sci. Tech. 27 015009 Google Scholar
[67]	Melville A, Calusine G, Woods W, Serniak K, Golden E, Niedzielski B M, Kim D K, Sevi A, Yoder J L, Dauler E A, Oliver W D 2020 Appl. Phys. Lett. 117 124004 Google Scholar
[68]	Geerlings K, Shankar S, Edwards E, Frunzio L, Schoelkopf R J, Devoret M H 2012 Appl. Phys. Lett. 100 192601 Google Scholar
[69]	Dunsworth A, Megrant A, Quintana C, et al. 2017 Appl. Phys. Lett. 111 022601 Google Scholar
[70]	Nersisyan A, Poletto S, Alidoust N, Manenti R, Renzas R, Bui C V, Vu K, Whyland T, Mohan Y, Sete E A, Stanwyck S, Bestwick A, Reagor M arxXiv1901.08042[quant-ph]
[71]	Altoé M V P, Banerjee A, Berk C, et al. arXiv2012.07604[quant-ph]
[72]	Premkumar A, Weiland C, Hwang S, et al. arXiv: 2004.02908 v1[quant-ph]
[73]	Kamal A, Yoder J L, Yan F, Gudmundsen T J, Hover D, Sears A P, Welander P, Orlando T P, Gustavsson S, Oliver W D arXiv1606.09262[cond-mat. mes-hall]
[74]	Earnest C T, Béjanin J H, McConkey T G, Peters E A, Korinek A, Yuan H, Mariantoni M 2018 Supercond. Sci. Tech. 31 125013 Google Scholar
[75]	You J Q and Nori F 2011 Nature 474 589 Google Scholar
[76]	Kjaergaard A, Schwartz M E, Braumüller J, Krantz P, Wang J I J, Gustavsson S, Oliver W D 2020 Ann. Rev. Cond. Matter Phys. 11 369 Google Scholar
[77]	Kreikebaum J M, Dove A, Livingston W, Kim E, Siddiqi I 2016 Supercond. Sci. Tech. 29 104002 Google Scholar
[78]	Segall K, Crankshaw D, Nakada D, Orlando T P, Levitov L S, Lloyd S, Markovic N, Valenzuela S O, Tinkham M, Berggren K K 2003 Phys. Rev. B 67 220506 Google Scholar
[79]	Gurvitch M, Washington M A, Huggins H A 1983 Appl. Phys. Lett. 42 472 Google Scholar
[80]	Cava R J, Batlogg B, Krajewski J J, Poulsen H F, Gammel P, Peck W F, Rupp L W 1991 Phys. Rev. B 44 6973 Google Scholar
[81]	Verjauw J, Potočnik A, Mongillo M, et al. 2021 Phys. Rev. Applied 16 014018 Google Scholar
[82]	Place A P M, Rodgers L V H, Rodgers L V H, et al. 2021 Nat. Comm. 12 1779 Google Scholar
[83]	Gladczuk L, Patel A, Paur C S, Sosnowski M 2004 Thin Solid Films 467 150 Google Scholar
[84]	Face D W, Probe D E 1987 J. Vac. Sci. Tech. 5 3406
[85]	Barends R, Baselmans J J A, Hovenier J N, Gao J R, Yates S J C, Klapwijk T M, Hoevers H F C 2007 IEEE Trans. Appl. Supercond. 17 263 Google Scholar
[86]	Schauer A, Roschy M 1972 Thin Solid Films 12 313 Google Scholar
[87]	Fàbrega L, Fernández-Martínez I, Parra-Borderías M, Gil O, Camón A, Arrabal R G, Sesé J, Santiso J, Costa-Krämer J L, Briones F 2009 IEEE Trans. Appl. Supercond. 19 3779 Google Scholar
[88]	Shearrow A, Koolstra G, Whiteley S J, Earnest N, Barry P S, Heremans F J, Awschalom D D, Shirokoff E, Schuster D I arXiv1808.06009 [cond-mat. mes-hall]
[89]	Profeta G, Franchini C, Lathiotakis N N, Floris A, Sanna A, Marques M A L, Lüders M, Massidda S, Gross E K U, Continenza A 2006 Phys. Rev. Lett. 96 047003 Google Scholar
[90]	Pickard C J, Errea I, Eremets M I 2020 Ann. Rev. Condens. Matter. Phys. 11 57 Google Scholar
[91]	Lisenfeld J, Bilmes A, Megrant A, Barends R, Kelly J, Klimov P, Weiss G, Martinis J M, Ustinov A V 2019 NPJ Quantum Inf. 5 105 Google Scholar
[92]	Park J, Yan A, Tilka J A, Sampson K C, Savage D E, Prance J R, Simmons C B, Lagally M G, Coppersmith S N, Eriksson M A, Holt M V, Evans P G 2016 Appl. Phys. Lett. 4 066102
[93]	Lisenfeld J, Grabovskij G J, Müller C, Cole J H, Weiss G, Ustinov A V 2015 Nat. Comm. 6 6182 Google Scholar
[94]	Pateras A, Park Y, Ahn Y, Tilka J A, Holt M V, Reichl C, Wegscheider W, Baart T A, Dehollain J P, Mukhopadhyay U, Vandersypen L M K, Evans P G 2018 Nano Lett. 18 2780 Google Scholar
[95]	Anderson A C, Smith S C 1973 J. Phys. Chem. Solids 34 111 Google Scholar
[96]	Wang H, Shi C, Hu J, Han S, Yu C, Wu R Q 2015 Phys. Rev. Lett. 115 077002 Google Scholar
[97]	Lee D, Du Bois J L, Lordi V 2014 Phys. Rev. Lett. 112 017001 Google Scholar
[98]	Kumar P, Sendelbach S, Beck M A, Freeland J W, Wang Z, Wang H, Yu C C, Wu R Q, Pappas D P, McDermott R 2016 Phys. Rev. Appl. 6 041001 Google Scholar
[99]	Choi S, Lee D H, Louie S G, Clarke J 2009 Phys. Rev. Lett. 103 197001 Google Scholar
[100]	Neill C, Megrant A, Barends R, Chen Y, Chiaro B, Kelly J, Mutus J Y, O’Malley P J J, Sank D, Wenner J, White T C, Yin Y, Cleland A N, Martinis J M 2013 Appl. Phys. Lett. 103 072601 Google Scholar
[101]	Lock E H, Xu P, Kohler T, Camacho L, Prestigiacomo J, Rosen Y J, Osborn K D 2019 IEEE Trans. Appl. Supercond. 29 1700108
[102]	Woods W, Calusine G, Melville A, Sevi A, Golden E, Kim D K, Rosenberg D, Yoder J L, Oliver W D 2019 Phys. Rev. Appl. 12 014012 Google Scholar
[103]	Dolan G J 1977 Appl. Phys. Lett. 31 337 Google Scholar
[104]	Costache M V, Bridoux G, Neumann I, Valenzuela S O 2012 J. Vac. Sci. Tech. B. 30 104
[105]	Kreikebaum J M, O’Brien K P, Morvan A, Siddiqi I 2020 Supercond. Sci. Tech. 33 0602 Google Scholar
[106]	Shapiro S 1963 Phys. Rev. Lett. 11 80 Google Scholar
[107]	Clarke J 1972 Phys. Rev. Lett. 28 1363 Google Scholar
[108]	Cai N, Zhou G, Müller K, Starr D E 2012 Appl. Phys. Lett. 101 171605 Google Scholar
[109]	Ambegaokar V, Baratoff A 1963 Phys. Rev. Lett. 10 486 Google Scholar
[110]	Steinbach A, Joyez P, Cottet A, Esteve D, Devoret M H, Huber M E, Martinis J M 2001 Phys. Rev. Lett. 87 137003 Google Scholar
[111]	Zhang E, Srinivasan S, Sundaresan N, et al. arXiv: 2012.08475 [quant-ph]
[112]	Bilmes A, Neumann A K, Volosheniuk S, Ustinov A V, Lisenfeld J arXiv: 2101.01453 v2 [quant-ph]
[113]	Osman A, Simon J, Bengtsson A, Kosen S, Krantz P, Perez D, Scigliuzzo M, Bylander J, Roudsari A F arXiv: 2011.05230 v1 [cond-mat. supr-con]
[114]	Chen Z, Megrant A, Kelly J, et al. 2014 Appl. Phys. Lett. 104 052602 Google Scholar
[115]	Rosenberg D, Weber S J, Conway D, Jost D R W, Mallek J, Calusine G, Das R, Kim D, Schwartz M E, Woods W, Yoder J L, Oliver W D 2020 IEEE Micro. Mag. 21 72
[116]	Jin Z C, Wu H T, Yu H F, Yu Y 2018 Chin. Phys. B 27 100310 Google Scholar
[117]	Burnett J J, Bylander J, Bengtsson A, Scigliuzzo M, Niepce D 2019 NPJ Quantum Inf. 5 1 Google Scholar
[118]	Schlor S, Lisenfeld J, Mueller C, Bilmes A, Schneider A, Pappas D P, Ustinov A V, Weides M 2019 Phys. Rev. Lett. 123 190502 Google Scholar
[119]	Nersisyan A, Poletto S, Alidoust N, Manenti R, Renzas R, Bui C V, Vu K, Whyland T, Mohan Y, Sete E A, Stanwyck S, Bestwick A, Reagor M arXiv1901.08042 [quant-ph]
[120]	Oliver W D, Welander P B 2013 MRS Bulletin 38 816 Google Scholar
[121]	de Graaf S E, Faoro L, Burnett J, Adamyan A A, Tzalenchuk A Y, Kubatkin S E, Lindström T, Danilov A V 2018 Nat. Commun. 9 1143 Google Scholar
[122]	Lisenfeld J, Mueller C, Cole J H, Bushev P, Lukashenko A, Shnirman A, Ustinov A V 2010 Phys. Rev. Lett. 105 230504 Google Scholar
[123]	Paz A, Lebedeva I, Tokatly I, Rubio A 2014 Phys. Rev. B 90 224202 Google Scholar
[124]	Muller C, Cole J H, Lisenfeld J 2019 Rep. Prog. Phys. 82 124501 Google Scholar
[125]	Martinis J M, Cooper K B, McDermott R, Steffen M, Ansmann M, Osborn K D, Cicak K, Oh S, Pappas D P, Simmonds RW and Yu C C 2005 Phys. Rev. Lett. 95 210503 Google Scholar
[126]	Neeley M, Ansmann M, Bialczak R C, Hofheinz M, Katz N, Lucero E, O’Connell A, Wang H, Cleland A N and Martinis J 2008 Phys. Rev. B 77 180508 Google Scholar
[127]	Martinis J M 2009 Quantum Inf. Process. 8 81 Google Scholar
[128]	Weides M, Bialczak R C, Lenander M, Lucero E, Mariantoni M, Neeley M, O’Connell A D, Sank D, Wang H, Wenner J, Yamamoto T, Yin Y, Cleland A N and Martinis J 2011 Supercond. Sci. Technol. 24 055005 Google Scholar
[129]	Lecocq F, Pop I M, Peng Z H, Matei I, Crozes T, Fournier T, Naud C, Guichard W and Buisson O 2011 Nanotechnology 22 315302 Google Scholar
[130]	Semenov V K, Danilov G V, Averin D V 2003 IEEE Trans. Appl. Supecond. 13 938 Google Scholar
[131]	Semenov V K, Danilov G V, Averin D V 2007 IEEE Trans. Appl. Supecond. 17 455 Google Scholar
[132]	Ren J, Semenov V K, Polyakov Y A, Averin D V, Tsai J S 2009 IEEE Trans. Appl. Supecond. 19 961 Google Scholar
[133]	Averin D V, Xu K, Zhong Y P, Song C, Wang H, Han S 2016 Phys. Rev. Lett. 116 010501 Google Scholar
[134]	Han S, Lapointe J, Lukens J E 1989 Phys. Rev. Lett. 63 1712 Google Scholar
[135]	Li S X, Yu Y, Zhang Y, Qiu W, Han S 2002 Phys. Rev. Lett. 89 098301 Google Scholar
[136]	Balestro F, Claudon J, Pekola J P, Buisson O 2003 Phys. Rev. Lett. 91 158301 Google Scholar
[137]	Lei C U, Krayzman L, Ganjam S, Frunzio L, Schoelkopf R J 2020 Appl. Phys. Lett. 116 154002
[138]	Barends R, Vercruyssen N, Endo A, de Visser P J, Zijlstra T, Klapwijk T M, Diener P, Yates S J C, Baselmans J J A 2010 Appl. Phys. Lett. 97 023508 Google Scholar
[139]	Leduc H G, Bumble B, Day P K, Eom B H, Gao J, Golwala S, Mazin B A, McHugh S, Merrill A, Moore D C, Noroozian O, Turner A D, Zmuidzinas J 2010 Appl. Phys. Lett. 97 102509 Google Scholar
[140]	Foxen B, Mutus J Y, Lucero E, et al. 2018 Quantum Sci. Technol. 3 014005 Google Scholar
[141]	Levenson-Falk E M, Vijay R, Siddiqi I 2011 Appl. Phys. Lett. 98 123115 Google Scholar
[142]	Castellanos-Beltran M A, Irwin K D, Hilton G C, Vale L R, Lehnert K W 2008 Nat. Phys. 4 929 Google Scholar
[143]	Siddiqi I, Vijay R, Pierre F, Wilson C M, Metcalfe M, Rigetti C, Frunzio L, Devoret M H 2004 Phys. Rev. Lett. 93 207002 Google Scholar
[144]	Reed M D, DiCarlo L, Johnson B R, Sun L, Schuster D I, Frunzio L, Schoelkopf R J 2010 Phys. Rev. Lett. 105 173601 Google Scholar
[145]	Huang K Q, Guo Q J, Song C, Zheng Y R, Deng H, Wu Y L, Jin Y R, Zhu X B, Zheng D N 2017 Chin. Phys. B 26 094203 Google Scholar
[146]	Yang R, DengH 2020 IEEE Trans. APP. Supercon. 30 4 Google Scholar
[147]	Roy T, Kundu S, Chand M, Vadiraj A M, Ranadive A, Nehra N, Patankar M P, Aumentado J, Clerk A A, Vijaz R 2015 Appl. Phy. Lett. 107 262601 Google Scholar
[148]	Xue H, Lin Z R, Jiang W B, Niu Z Q, Liu K, Peng W, Wang Z 2021 Chin. Phys. B 30 068503 Google Scholar
[149]	Lu Y P, Zuo Q, Pan J Z, Jiang J L, Wei X Y, Li Z S, Xu W Q, Zhang K X, Guo T T, Wang S, Cao C H, Xu W W, Sun G Z, Wu P H 2021 Chin. Phys. B 30 068504 Google Scholar
[150]	Eom B H, Day P K, LeDay H G, Zmuidzinas J 2012 Nat. Phy. 8 623 Google Scholar
[151]	White T C, Mutus J Y, Kelly J, Sank D, Martinis J M 2015 Appl. Phy. Lett. 106 242601 Google Scholar
[152]	Macklin C, O’Brien, Hover D, Schwartz M E, Bolkhovsky V, Zhang X, Oliver W D, Siddiqi I 2015 Science 350 307 Google Scholar
[153]	Harrow A W, Montanaro A 2017 Nature 549 203 Google Scholar
[154]	Kelly J, Barends R, Fowler A G, et al. 2015 Nature 519 66 Google Scholar
[155]	Xu H K, Song C, Liu W Y, Xue G M, Su F F, Deng H, Tian Y, Zheng D N, Han S Y, Zhong Y P, Wang H, Liu Y X, Zhao S P 2016 Nat. Comm. 7 11018 Google Scholar
[156]	Wu Y L, Bao W S, Cao S R, Chen F S, Chen M C, Pan J W, et al. arXiv: 2106.14734 v1 [quant-ph]

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