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TiO2 thin films were prepared by direct current magnetron sputtering on glass substrates, then were implanted by cobalt ions, and finally annealed at 500 ℃ for 50 min. Specimens for transmission electron microscopy were prepared by peeling-scattering technology, and were observed in situ by scanning electron microscopy (SEM), energy dispersive X-ray (EDX) and high resolution transmission electron microscopy (HRTEM). The films were identified as anatase structure. The Co ions exist mainly in a thin layer beneath the surface of the films. The implanted Co ions damage the TiO2 crystals and some of them exist as CoO. The annealing treatment could repair the TiO2 grains and make the Co ions diffuse into the TiO2 lattice. The vibrating sample magnetometer (VSM) measurements show that the Co ion implanted TiO2 films are ferromagnetic at room temperature and the annealing treatment in vacuum could enhance the ferromagnetism, which could be explained within the scope of the BMP theory.
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Keywords:
- cobalt ions implanted TiO2 films /
- in-situ observation by HRTEM and SEM /
- room temperature ferromagnetism
[1] Shen L, Zhu G H, Guo W B, Chen T, Zhang X D, Liu C X, Chen W Y, Ruan S P, Zhong Z C 2008 Appl. Phys. Lett. 92 073307
[2] Yu H Z, Peng J B, Liu J C 2009 Acta Phys. Sin. 58 669 (in Chinese) [於黄忠、 彭俊彪、 刘金成 2009 58 669]
[3] Liang L Y, Dai S Y, Fang X Q, Hu L H 2008 Acta Phys. Sin. 57 1956 (in Chinese) [梁林云、 戴松元、 方霞琴、 胡林华 2008 57 1956]
[4] Zhang Y, Zhao Y, Cai N, Xiong S Z 2008 Acta Phys. Sin. 57 5806 (in Chinese) [张 苑、 赵 颖、 蔡 宁、 熊绍珍 2008 57 5806]
[5] Asahi R, Morikawa T, Ohwaki T, Aoki K, Taga Y 2001 Science 293 269
[6] Zhao Z Y, Liu Q J, Zhu Z Q, Zhang J 2008 Acta Phys. Sin. 57 3760 (in Chinese) [赵宗彦、 柳清菊、 朱忠其、 张 瑾 2008 57 3760]
[7] Zeng W, Liu T M 2010 Physica B 405 1345
[8] Matsumoto Y, Murakami M, Shono T, Hasegawa T, Fukumura T, Kawasaki M, Ahmet P, Chikyow T, Koshihara S, Koinuma H 2001 Science 291 854
[9] Karthik K, Pandian S K, Kumar K S, Jaya N V 2010 Appl. Surf. Sci. 256 4757
[10] Xu J P, Shi S B, Li L, Zhang X S, Wang Y X, Chen X M, Wang J F, Lv L Y, Zhang F M, Zhong W 2010 J. Appl. Phys. 107 053910
[11] Lee Y J, de Jong M P, Jansen R 2010 Appl. Phys. Lett. 96 082506
[12] Lee J K, Jung H S, Valdez J A, Hundley M F, Thompson J D, Sickafus K E, Nastasi M, Hamby D W, Lucca D A 2006 Nucl. Instrum. Methods Phys. Res. B 250 279
[13] Liu F M, Ding P, Yang X A, Li J Q 2009 Nucl. Instrum. Methods Phys. Res. B 267 3104
[14] Mi W B, Jiang E Y, Bai H L 2009 J. Magn. Magn. Mater. 321 2472
[15] Sakurai J, Buyers W J L, Cowley R A, Dolling G 1968 Phys. Rev. 167 510
[16] Das S, Patra M, Majumdar S, Giri S 2009 J. Alloys Compd. 488 27
[17] Coey J M D, Venkatesan M, Fitzgerald C B 2005 Nature Mater. 4 173
[18] Pereira L C J, Nunes M R, Monteiro O C, Silvestre A J 2008 Appl. Phys. Lett. 93 222502
[19] Bak T, Nowotny J, Rekas M, Sorrell C C 2003 J. Phys. Chem. Solids 64 1057
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[1] Shen L, Zhu G H, Guo W B, Chen T, Zhang X D, Liu C X, Chen W Y, Ruan S P, Zhong Z C 2008 Appl. Phys. Lett. 92 073307
[2] Yu H Z, Peng J B, Liu J C 2009 Acta Phys. Sin. 58 669 (in Chinese) [於黄忠、 彭俊彪、 刘金成 2009 58 669]
[3] Liang L Y, Dai S Y, Fang X Q, Hu L H 2008 Acta Phys. Sin. 57 1956 (in Chinese) [梁林云、 戴松元、 方霞琴、 胡林华 2008 57 1956]
[4] Zhang Y, Zhao Y, Cai N, Xiong S Z 2008 Acta Phys. Sin. 57 5806 (in Chinese) [张 苑、 赵 颖、 蔡 宁、 熊绍珍 2008 57 5806]
[5] Asahi R, Morikawa T, Ohwaki T, Aoki K, Taga Y 2001 Science 293 269
[6] Zhao Z Y, Liu Q J, Zhu Z Q, Zhang J 2008 Acta Phys. Sin. 57 3760 (in Chinese) [赵宗彦、 柳清菊、 朱忠其、 张 瑾 2008 57 3760]
[7] Zeng W, Liu T M 2010 Physica B 405 1345
[8] Matsumoto Y, Murakami M, Shono T, Hasegawa T, Fukumura T, Kawasaki M, Ahmet P, Chikyow T, Koshihara S, Koinuma H 2001 Science 291 854
[9] Karthik K, Pandian S K, Kumar K S, Jaya N V 2010 Appl. Surf. Sci. 256 4757
[10] Xu J P, Shi S B, Li L, Zhang X S, Wang Y X, Chen X M, Wang J F, Lv L Y, Zhang F M, Zhong W 2010 J. Appl. Phys. 107 053910
[11] Lee Y J, de Jong M P, Jansen R 2010 Appl. Phys. Lett. 96 082506
[12] Lee J K, Jung H S, Valdez J A, Hundley M F, Thompson J D, Sickafus K E, Nastasi M, Hamby D W, Lucca D A 2006 Nucl. Instrum. Methods Phys. Res. B 250 279
[13] Liu F M, Ding P, Yang X A, Li J Q 2009 Nucl. Instrum. Methods Phys. Res. B 267 3104
[14] Mi W B, Jiang E Y, Bai H L 2009 J. Magn. Magn. Mater. 321 2472
[15] Sakurai J, Buyers W J L, Cowley R A, Dolling G 1968 Phys. Rev. 167 510
[16] Das S, Patra M, Majumdar S, Giri S 2009 J. Alloys Compd. 488 27
[17] Coey J M D, Venkatesan M, Fitzgerald C B 2005 Nature Mater. 4 173
[18] Pereira L C J, Nunes M R, Monteiro O C, Silvestre A J 2008 Appl. Phys. Lett. 93 222502
[19] Bak T, Nowotny J, Rekas M, Sorrell C C 2003 J. Phys. Chem. Solids 64 1057
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