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The temperature characteristics of stress-induced voiding in Cu interconnects

Wu Zhen-Yu Chai Chang-Chun Li Yue-Jin Liu Jing Wang Jia-You Yang Yin-Tang

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The temperature characteristics of stress-induced voiding in Cu interconnects

Wu Zhen-Yu, Chai Chang-Chun, Li Yue-Jin, Liu Jing, Wang Jia-You, Yang Yin-Tang
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  • Abstract views:  11500
  • PDF Downloads:  1553
  • Cited By: 0
Publishing process
  • Received Date:  05 May 2008
  • Accepted Date:  27 September 2008
  • Published Online:  05 February 2009

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