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The electron cyclotron resonance (ECR) plasma is characterized by low working pressure and high dissociation rate, and it has important applications in the deuterium negative ion $ {{\mathrm{D}}}^{-} $ source technology. In this paper, the Yacora collisional-radiative model is applied to the emission spectrum diagnosis of $ {{\mathrm{D}}}^{-} $ in ECR deuterium plasma. The $ {{\mathrm{D}}}^{-} $ density is estimated by using the $ {I}_{{{\mathrm{D}}}_{{\mathrm{\alpha }}}}/{I}_{{{\mathrm{D}}}_{{\mathrm{\beta }}}} $ ratio and the relative intensity of other deuterium molecular lines, thereby avoiding complex calibration procedure of absolute intensity. The spatial structure of $ {{\mathrm{D}}}^{-} $ is studied by the multichannel emission spectrum measured in the source region and diffusion region. The experiments are conducted on a 2.45-GHz ECR plasma source at a deuterium gas pressure of 1 Pa and microwave power of 660 W. The Balmer series of atomic deuterium ($ {{\mathrm{D}}}_{{\mathrm{\alpha }}} $, $ {{\mathrm{D}}}_{{\mathrm{\beta }}} $, $ {{\mathrm{D}}}_{{\mathrm{\gamma }}} $, $ {{\mathrm{D}}}_{{\mathrm{\delta }}} $) and the Fulcher band Q-branches of molecular deuterium are measured in the source region and expanding region of the ECR plasma. It is found that the intensity of $ {{\mathrm{D}}}_{{\mathrm{\alpha }}} $ in the source region is much higher than that of $ {{\mathrm{D}}}_{{\mathrm{\beta }}} $, specifically, the $ {I}_{{{\mathrm{D}}}_{{\mathrm{\alpha }}}}/{I}_{{{\mathrm{D}}}_{{\mathrm{\beta }}}} $ ratio reaches as high as 23, indicating a selective enhancement of Balmer lines due to the mutual neutralization process of $ {{\mathrm{D}}}^{-} $. Furthermore, $ {{\mathrm{D}}}^{-} $ density in the source region is estimated to be about $ 3.6\times {10}^{15}\;{{\mathrm{m}}}^{-3} $, and the $ {{\mathrm{D}}}^{-} $ density in the expanding region decreases significantly. In the ECR plasma source region, the plasma-wall interaction is strong due to the small volume of the cavity. The recombination desorption process produces more vibrationally excited molecules, thereby further enhancing the dissociation attachment reaction, which is beneficial to the generation of deuterium negative ions. On the other hand, the axial electric field within the ECR plasma inhibits the axial transport of $ {{\mathrm{D}}}^{-} $, suggesting that the production and loss of $ {{\mathrm{D}}}^{-} $ are both localized. These characteristics of the ECR plasma source contribute to the formation of a large gradient of $ {{\mathrm{D}}}^{-} $ density between the source region and the expanding region. -
图 1 ECR等离子体源示意图
Figure 1. The layout of ECR plasma source.
图 2 磁感应强度轴向分量沿z轴的分布
Figure 2. The profile of magnetic field along z axis.
图 3 A位置的氘等离子体光谱
Figure 3. The spectrum of ECR deuterium plasma at A position.
图 4 A, B, C位置谱线相对强度的实验值与模型拟合值
Figure 4. The experimental and fitted line ratios at A, B, C positions.
图 5 A, B, C位置Fulcher band Q支谱线强度的实验值和相应的模拟值
Figure 5. The experimental and fitted intensity of Fulcher band Q-lines at A, B, C positions.
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