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CHEMICAL BONDING STRUCTURE OF FLUORINATED AMORPHOUS CARBON FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR DEPOSITION

NING ZHAO-YUAN CHENG SHAN-HUA YE CHAO

Citation:

CHEMICAL BONDING STRUCTURE OF FLUORINATED AMORPHOUS CARBON FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR DEPOSITION

NING ZHAO-YUAN, CHENG SHAN-HUA, YE CHAO
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  • Abstract views:  8054
  • PDF Downloads:  937
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Publishing process
  • Received Date:  22 August 2000
  • Accepted Date:  10 October 2000
  • Published Online:  20 March 2001

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