Process parameters of large single crystal graphene prepared by chemical vapor deposition

Han Lin-Zhi; Zhao Zhan-Xia; Ma Zhong-Quan

doi:10.7498/aps.63.248103

Abstract

Graphene, as a two-dimensional sp2 hybridization allotropicity of carbon element, possesses unique properties of electricity, photology, thermology and mechanics. For industrialization, graphene possessing large dimension and homogeneous property is required. It can be prepared by chemical vapor deposition technology. In this paper, based on the progress of graphene research this year, we summarize the influence factors of graphene preparation, including substrate selection and preprocessing, carbon source and assist gas flow control, chamber temperature, pressure control, cooling rate, and deposition time setting, etc. Finally, we outlook the research direction of preparing the large-dimensional and single crystal graphenes.

Keywords:

Authors and contacts

1.
SHU-SolarE Research and Development Laboratory, Department of Physics, Shanghai University, Shanghai 200444, China
Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61274067, 60876045).

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[35]	Yu Q, Jauregui L A, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D 2011 Nature Mater. 10 443
[36]	Wofford J M, Nie S, McCarty K F, Bartelt N C, Dubon O D 2010 Nano Lett. 10 4890
[37]	Robinson Z R, Tyagi P, Mowll T R, Ventrice Jr C A, Hannon J B 2012 Phys. Rev. B 86 235413
[38]	Sun J, Cole M T, Lindvall N, Teo K B, Yurgens A 2012 Appl. Phys. Lett. 100 022102
[39]	Kim J, Ishihara M, Koga Y, Tsugawa K, Hasegawa M, Iijima S 2011 Appl. Phys. Lett. 98 091502
[40]	Kim Y, Song W, Lee S, Jeon C, Jung W, Kim M, Park C Y 2011 Appl. Phys. Lett. 98 263106
[41]	Zhang L, Shi Z, Liu D, Yang R, Shi D, Zhang G 2012 Nano Res. 5 258
[42]	Muñoz R, Gómez-Aleixandre C 2014 J. Phys. D: Appl. Phys. 47 045305
[43]	Lee S, Lee K, Zhong Z 2010 Nano Lett. 10 4702

Cited By

[1]	Novoselov K S, Geim A K, Morozov S, Jiang D, Zhang Y, Dubonos S, Grigorieva I, Firsov A 2004 Science 306 666
[2]	Yu H L, Zhu J Q, Cao W X, Han J C 2013 Acta Phys. Sin. 62 028201 (in Chinese) [于海玲, 朱嘉琦, 曹文鑫, 韩杰才 2013 62 028201]
[3]	Zeng M, Wang W L, Bai X D 2013 Chin. Phys. B 22 098105
[4]	Park S, Ruoff R S 2009 Nature Nanotech. 4 217
[5]	Qin M M, Ji W, Feng Y Y, Feng W 2014 Chin. Phys. B 23 028103
[6]	Nyakiti L, Myers-Ward R, Wheeler V, Imhoff E, Bezares F, Chun H, Caldwell J, Friedman A, Matis B, Baldwin J 2012 Nano Lett. 12 1749
[7]	Xu W Y, Huang L, Que Y D, Lin X, Wang Y L, Du S X, Gao H J 2014 Chin. Phys. B 23 088108
[8]	Tang J, Liu Z L, Kang C Y, Pan H B, Wei S Q, Xu P S, Gao Y Q, Xu X G 2009 Chin. Phys. Lett. 26 088104
[9]	Wei C, Li J, Liu Q B, Cai S J, Feng Z H 2014 Acta Phys. Sin. 63 038102 (in Chinese) [蔚翠, 李佳, 刘庆彬, 蔡树军, 冯志红 2014 63 038102]
[10]	Somani P R, Somani S P, Umeno M 2006 Chem. Phys. Lett. 430 56
[11]	Feng D J, Huang W Y, Jiang S Z, Ji W, Jia D F 2013 Acta Phys. Sin. 62 054202 (in Chinese) [冯德军, 黄文育, 姜守振, 季伟, 贾东方 2013 62 054202]
[12]	Bae S, Kim H, Lee Y, Xu X, Park J S, Zheng Y, Balakrishnan J, Lei T, Kim H R, Song Y I 2010 Nature Nanotech. 5 574
[13]	Zhou H, Yu W J, Liu L, Cheng R, Chen Y, Huang X, Liu Y, Wang Y, Huang Y, Duan X 2013 Nat. Commun. 4 2096
[14]	Mohsin A, Liu L, Liu P, Deng W, Ivanov I N, Li G, Dyck O E, Duscher G, Dunlap J R, Xiao K 2013 ACS Nano 7 8924
[15]	Fuhrer M S, Lau C N, MacDonald A H 2010 MRS Bull. 35 289
[16]	Kim K S, Zhao Y, Jang H, Lee S Y, Kim J M, Kim K S, Ahn J H, Kim P, Choi J Y, Hong B H 2009 Nature 457 706
[17]	Pan Y, Zhang H, Shi D, Sun J, Du S, Liu F, Gao H J 2009 Adv. Mater. 21 2777
[18]	Coraux J, N'Diaye A T, Busse C, Michely T 2008 Nano Lett. 8 565
[19]	Sutter P, Sadowski J T, Sutter E 2009 Phys. Rev. B 80 245411
[20]	Varykhalov A, Rader O 2009 Phys. Rev. B 80 035437
[21]	Xue Y, Wu B, Guo Y, Huang L, Jiang L, Chen J, Geng D, Liu Y, Hu W, Yu G 2011 Nano Res. 4 1208
[22]	Wang H, Wang G, Bao P, Yang S, Zhu W, Xie X, Zhang W J 2012 J. Am. Chem. Soc. 134 3627
[23]	Yan Z, Lin J, Peng Z, Sun Z, Zhu Y, Li L, Xiang C, Samuel E L, Kittrell C, Tour J M 2012 ACS Nano 6 9110
[24]	Chen S, Ji H, Chou H, Li Q, Li H, Suk J W, Piner R, Liao L, Cai W, Ruoff R S 2013 Adv. Mater. 25 2062
[25]	Geng D, Wu B, Guo Y, Huang L, Xue Y, Chen J, Yu G, Jiang L, Hu W, Liu Y 2012 Proc. Natl. Acad. Sci. 109 7992
[26]	Wu Y A, Fan Y, Speller S, Creeth G L, Sadowski J T, He K, Robertson A W, Allen C S, Warner J H 2012 ACS Nano 6 5010
[27]	Kim S M, Hsu A, Lee Y H, Dresselhaus M, Palacios T, Kim K K, Kong J 2013 Nano Technology 24 365602
[28]	Wu T, Ding G, Shen H, Wang H, Sun L, Jiang D, Xie X, Jiang M 2013 Adv. Funct. Mater. 23 198
[29]	Zhang B, Lee W H, Piner R, Kholmanov I, Wu Y, Li H, Ji H, Ruoff R S 2012 ACS Nano 6 2471
[30]	Luo Y R 2007 Comprehensive Handbook of Chemical Bond Energies (Boca Raton: CRC Press) p7
[31]	Hwang C, Yoo K, Kim S J, Seo E K, Yu H, Biró L P 2011 J. Phys. Chem. C 115 22369
[32]	Losurdo M, Giangregorio M M, Capezzuto P, Bruno G 2011 Phys. Chem. Chem. Phys. 13 20836
[33]	Wu B, Geng D, Xu Z, Guo Y, Huang L, Xue Y, Chen J, Yu G, Liu Y 2013 NPG Asia Mater. 5 e36
[34]	Bhaviripudi S, Jia X, Dresselhaus M S, Kong J 2010 Nano Lett. 10 4128
[35]	Yu Q, Jauregui L A, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D 2011 Nature Mater. 10 443
[36]	Wofford J M, Nie S, McCarty K F, Bartelt N C, Dubon O D 2010 Nano Lett. 10 4890
[37]	Robinson Z R, Tyagi P, Mowll T R, Ventrice Jr C A, Hannon J B 2012 Phys. Rev. B 86 235413
[38]	Sun J, Cole M T, Lindvall N, Teo K B, Yurgens A 2012 Appl. Phys. Lett. 100 022102
[39]	Kim J, Ishihara M, Koga Y, Tsugawa K, Hasegawa M, Iijima S 2011 Appl. Phys. Lett. 98 091502
[40]	Kim Y, Song W, Lee S, Jeon C, Jung W, Kim M, Park C Y 2011 Appl. Phys. Lett. 98 263106
[41]	Zhang L, Shi Z, Liu D, Yang R, Shi D, Zhang G 2012 Nano Res. 5 258
[42]	Muñoz R, Gómez-Aleixandre C 2014 J. Phys. D: Appl. Phys. 47 045305
[43]	Lee S, Lee K, Zhong Z 2010 Nano Lett. 10 4702

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Vol. 63, Issue 24 - 2014-12-20

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