Passivation and stability of thermal atomic layer deposited Al2O3 on CZ-Si

He Yue; Dou Ya-Nan; Ma Xiao-Guang; Chen Shao-Bin; Chu Jun-Hao

doi:10.7498/aps.61.248102

Abstract

Atomic layer deposited (ALD) aluminum oxide (Al2O3) has been known as an almost-perfect candidate of passivation dielectric layer for PERC-type c-Si solar cell. Its passivation performance and thermal stability are key issues for industrial PERC c-Si solar cell based on screen-printed technology. In this paper, 20 nm and 30nm Al2O3 films are synthesized on the solar grade CZ-Si by thermal atomic layer deposition. The results show that the effective lifetime can reach 100 μs for CZ-Si after annealing and is kept a half after the sintering process in the industrial beltline furnace, and the materials can be used in PERC-type solar cell. The SEM image demonstrates that the blisters occur in a thicker Al2O3 film, which explains why the passivation and thermal stability of 30 nm film are inferior to those of 20 nm film.

Keywords:

Authors and contacts

1.
Suntech Power Co., Ltd., Shanghai 200114, China;
2.
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
Funds: Project supported by the National Natural Science Foundation of China (Nos. 60821092, U1037604), the Shanghai Rising-Star Program (Grants No. 11QB1406800), and the Innovation Project of Shanghai Institute of Technical Physics (No. Q-ZY-51).

References

[1]	Hoex B, Heil S B S, Langereis E, van de Sanden M C M, Kessels W M M 2006 Appl. Phys. Lett. 89 042112
[2]	Hoex B, Schmidt J, Bock R, Altermatt P P, van de Sanden M C M, Kessels W M M 2007 Appl. Phys. Lett. 91 112107
[3]	Hoex B, Schmidt J, Pohl P, van de Sanden M C M, Kessels W M M 2008 J. of Appl. Phys. 104 044903
[4]	Dingemans G, Seguin R, Engelhart P, van de Sanden M C M, Kessels W M M 2010 Phys. Status Solidi (RRL) 4 10
[5]	Saint Cast P, Benick J, Kania D, Weiss L, Hofmann M, Rentsch J, Preu R, Glunz W G 2010 Ieee Electron Device Lett. 31 695
[6]	Benick J, Hoex B, van de Sande M C M, Kessels W M M, Schultz O, Glunz S W 2008 Appl. Phys. Lett. 92 253504
[7]	Poodt P, Lankhorst A, Roozeboom F, Spee K, Maas D, Vermeer A 2010 Adv. Mater. 22 3564
[8]	Sinton consulting, Inc, WCT-120 photoconductance lifetime tester, user manual
[9]	Dingemans G, Van de Sanden M C M, Kessels W M M 2011 Phys. Status Solidi (RRL) 5 22
[10]	Vermang B, Goverde H, Lorenz A, Uruena A, Vereecke G, Meersschaut J, Cornagliotti E, Rothschild A, John J, Poortmans J, Mertens R 2011 Proceedings of the 37th IEEE Photovoltaic Specialists Conference, Washington, June 19-24, 2011

Cited By

[1]	Hoex B, Heil S B S, Langereis E, van de Sanden M C M, Kessels W M M 2006 Appl. Phys. Lett. 89 042112
[2]	Hoex B, Schmidt J, Bock R, Altermatt P P, van de Sanden M C M, Kessels W M M 2007 Appl. Phys. Lett. 91 112107
[3]	Hoex B, Schmidt J, Pohl P, van de Sanden M C M, Kessels W M M 2008 J. of Appl. Phys. 104 044903
[4]	Dingemans G, Seguin R, Engelhart P, van de Sanden M C M, Kessels W M M 2010 Phys. Status Solidi (RRL) 4 10
[5]	Saint Cast P, Benick J, Kania D, Weiss L, Hofmann M, Rentsch J, Preu R, Glunz W G 2010 Ieee Electron Device Lett. 31 695
[6]	Benick J, Hoex B, van de Sande M C M, Kessels W M M, Schultz O, Glunz S W 2008 Appl. Phys. Lett. 92 253504
[7]	Poodt P, Lankhorst A, Roozeboom F, Spee K, Maas D, Vermeer A 2010 Adv. Mater. 22 3564
[8]	Sinton consulting, Inc, WCT-120 photoconductance lifetime tester, user manual
[9]	Dingemans G, Van de Sanden M C M, Kessels W M M 2011 Phys. Status Solidi (RRL) 5 22
[10]	Vermang B, Goverde H, Lorenz A, Uruena A, Vereecke G, Meersschaut J, Cornagliotti E, Rothschild A, John J, Poortmans J, Mertens R 2011 Proceedings of the 37th IEEE Photovoltaic Specialists Conference, Washington, June 19-24, 2011

[1]	Zhang Mei-Rong, Zhu Zeng-Wei, Yang Xiao-Qin, Yu Tong-Xu, Yu Xiao-Qi, Lu Di, Li Shun-Feng, Zhou Da-Yong, Yang Hui. Research progress of perovskite/crystalline silicon tandem solar cells with efficiency of over 30%. Acta Physica Sinica, 2023, 72(5): 058801. doi: 10.7498/aps.72.20222019
[2]	Dong Dian-Meng, Wang Cheng, Zhang Qing-Yi, Zhang Tao, Yang Yong-Tao, Xia Han-Chi, Wang Yue-Hui, Wu Zhen-Ping. Ga₂O₃-based metal-insulator-semiconductor solar-blind ultraviolet photodetector with HfO₂ inserting layer. Acta Physica Sinica, 2023, 72(9): 097302. doi: 10.7498/aps.72.20222222
[3]	Meng Xiang-Chen, Wang Dan, Cai Ya-Hui, Ye Zhen, He Yong-Ning, Xu Ya-Nan. Secondary electron emission suppression on alumina surface and its application in multipactor suppression. Acta Physica Sinica, 2023, 72(10): 107901. doi: 10.7498/aps.72.20222404
[4]	Tan Song-Lin, Zhuang Yong-Qi, Yi Jian-Hong. Preparation and properties of multi-walled carbon nanotube reinforced alumina composites by sol- spray method. Acta Physica Sinica, 2022, 71(1): 018801. doi: 10.7498/aps.71.20211043
[5]	Li Ye, Wang Xi-Xi, Wei Hui-Yun, Qiu Peng, He Ying-Feng, Song Yi-Meng, Duan Zhang, Shen Cheng-Tao, Peng Ming-Zeng, Zheng Xin-He. Enhancement of interface transportation for quantum dot solar cells using ultrathin InN by atomic layer deposition. Acta Physica Sinica, 2021, 70(18): 187702. doi: 10.7498/aps.70.20210554
[6]	Li Qi, Zhang Yong. Enhanced performance of inverted polymer solar cell based on Al2O3/MoO3 as composite anode buffer layer. Acta Physica Sinica, 2018, 67(6): 067201. doi: 10.7498/aps.67.20172311
[7]	Li Qi, Zhang Yong. Mechanism of inverted polymer solar cells based on poly(dopamine)/ZnO as composite cathode buffer layer. Acta Physica Sinica, 2017, 66(19): 198201. doi: 10.7498/aps.66.198201
[8]	Zhang Yong, Shi Yi-Min, Bao You-Zhen, Yu Xia, Xie Zhong-Xiang, Ning Feng. Effect of surface passivation on the electronic properties of GaAs nanowire:A first-principle study. Acta Physica Sinica, 2017, 66(19): 197302. doi: 10.7498/aps.66.197302
[9]	Tan Man-Lin, Zhou Dan-Dan, Fu Dong-Ju, Zhang Wei-Li, Ma Qing, Li Dong-Shuang, Chen Jian-Jun, Zhang Hua-Yu, Wang Gen-Ping. Performance investigation of black silicon solar cells with surface passivated by BiFeO3/ITO composite film. Acta Physica Sinica, 2017, 66(16): 167701. doi: 10.7498/aps.66.167701
[10]	Xiong Ying, Wen Qi-Ye, Tian Wei, Mao Qi, Chen Zhi, Yang Qing-Hui, Jing Yu-Lan. Researches on the electrical properties of vanadium oxide thin films on Si substrates. Acta Physica Sinica, 2015, 64(1): 017102. doi: 10.7498/aps.64.017102
[11]	Qin Fei-Fei, Zhang Hai-Ming, Wang Cai-Xia, Guo Cong, Zhang Jing-Jing. Design and simulation of anodic aluminum oxide nanograting double light trapping structure for thin film silicon solar cells. Acta Physica Sinica, 2014, 63(19): 198802. doi: 10.7498/aps.63.198802
[12]	Yuan Si-Wei, Feng Yan-Hui, Wang Xin, Zhang Xin-Xin. Molecular dynamics simulation of thermal conductivity of mesoporous α-Al2O3. Acta Physica Sinica, 2014, 63(1): 014402. doi: 10.7498/aps.63.014402
[13]	He Su-Ming, Dai Shan-Shan, Luo Xiang-Dong, Zhang Bo, Wang Jin-Bin. Preparation of SiON film by plasma enhanced chemical vapor deposition and passivation on Si. Acta Physica Sinica, 2014, 63(12): 128102. doi: 10.7498/aps.63.128102
[14]	Zhang Xin, Zhang Xiao-Zhong, Tan Xin-Yu, Yu Yi, Wan Cai-Hua. Enhancing photovoltaic effect of Co2-C98/Al2O3/Si heterostructures by Al2O3. Acta Physica Sinica, 2012, 61(14): 147303. doi: 10.7498/aps.61.147303
[15]	Sun Zhan-Feng, He Hong-Liang, Li Ping, Li Qing-Zhong. The spall strength and shock compressive damage of AD95 ceramics. Acta Physica Sinica, 2012, 61(9): 096201. doi: 10.7498/aps.61.096201
[16]	Wang Xu-Long-Qi, Zhang Dong-Xian, Zhang Hai-Jun. A method of color modulation based on porous alumina and atomic layer deposition. Acta Physica Sinica, 2011, 60(5): 058104. doi: 10.7498/aps.60.058104
[17]	Wu Li-Hua, Zhang Xiao-Zhong, Yu Yi, Wan Cai-Hua, Tan Xin-Yu. Photovoltaic effect of a-C: Fe/AlOx /Si based heterostructures. Acta Physica Sinica, 2011, 60(3): 037807. doi: 10.7498/aps.60.037807
[18]	Wang Jun-Zhuan, Shi Zhuo-Qiong, Lou Hao-Nan, Zhang Xin-Luan, Zuo Ze-Wen, Pu Lin, Ma En, Zhang Rong, Zheng You-Liao, Lu Fang, Shi Yi. Influence of Si crystallization evolution on 1.54 μm luminescence in Er-doped Si/Al2O3 multilayer. Acta Physica Sinica, 2009, 58(6): 4243-4248. doi: 10.7498/aps.58.4243
[19]	Zeng Zhi-Jiang, Yang Qiu-Hong, Xu Jun. Spectroscopic characteristics of Cr3+:Al2O3 polycrystalline transparent alumina ceramics. Acta Physica Sinica, 2005, 54(11): 5445-5449. doi: 10.7498/aps.54.5445
[20]	Li Xiao-Xi, Jia Tian-Qing, Feng Dong-Hai, Xu Zhi-Zhan. The mechanism of ablation of sapphire by an ultra-short pulse laser. Acta Physica Sinica, 2004, 53(7): 2154-2158. doi: 10.7498/aps.53.2154

Catalog

Vol. 61, Issue 24 - 2012-12-20

Metrics

Abstract views: 10606
PDF Downloads: 2437
Cited By: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

Search

Article

留言板