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The research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputtering

Han Liang Zhao Yu-Qing Zhang Hai-Bo

Citation:

The research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputtering

Han Liang, Zhao Yu-Qing, Zhang Hai-Bo
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  • Abstract views:  8986
  • PDF Downloads:  1394
  • Cited By: 0
Publishing process
  • Received Date:  08 May 2007
  • Accepted Date:  15 May 2007
  • Published Online:  05 January 2008

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