532nm长脉冲激光致GaAs热分解损伤的半解析法分析

毕娟; 金光勇; 倪晓武; 张喜和; 姚志健

doi:10.7498/aps.61.244209

摘要

考虑到GaAs具有受热分解的特性, 采用热传导理论和半解析法研究了波长532 nm的毫秒量级长脉冲激光致GaAs 的表面热分解损伤. 首先, 建立了激光辐照GaAs的二维轴对称瞬态温度场及表面热分解损伤阈值的计算模型, 模拟了吸收率不同时, GaAs的瞬态温度场分布及热分解损伤阈值. 计算结果表明: 较高的吸收率引起GaAs表面的温升较高, 但所需的热分解损伤阈值较低; 增加作用激光能量密度, GaAs表面发生热分解损伤随之提前. 本文研究结果对激光与GaAs相互作用及其损伤机理的研究具有指导意义和实用价值.

关键词:

Abstract

Considering the fact that the GaAs has the characteristics of thermal decomposition, the thermal decomposition damage to GaAs surface, induced by a 532 nm wavelength long pulse laser with a millisecond pulse width is studied by the heat conduction theoretical and semi-analytical method. First, the calculation models of two-dimensional axisymmetric transient temperature field and the surface thermal decomposition damage threshold for long pulse laser irradiation of GaAs are established, and the transient temperature fields and the thermal decomposition damage thresholds in GaAs with different absorption rates are simulated. The results show that the higher absorption rate causes the higher temperature rise on the surface of material, but the required decomposition damage energy density is lower. With the increase of laser energy density, the decomposition damage occurs more early. This paper has guiding significance and practical value for investigating the interaction between long pulse laser and GaAs and its damage mechanism.

Keywords:

作者及机构信息

1.
长春理工大学理学院, 长春 130022;

2.
南京理工大学理学院, 南京 210094;

3.
中国兵器科学研究院, 北京 100089

基金项目: 吉林省科技支撑重点项目(批准号: 2010PT)资助的课题.

Authors and contacts

1.
School of Science, Changchun University of Science and Technology, Changchun 130022, China;

2.
School of Science, Nanjing University of Science and Technology, Nanjing 210094, China;

3.
China Research and Development Academy of Machinery Equipment, Beijing 100089, China

Funds: Project supported by the Key Program of Science Technology of Jilin Province (Grant No. 2010PT).

参考文献

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[2]	Qi H F, Wang Q P , Zhang X Y, Liu Z J, Liu Z J, Chang J, Xia W, Jin G F 2008 J. Appl. Phys. 103 033106
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[7]	Srivastava P K, Singh A P, Kapoor A 2006 Optics & Laser Technology 38 649
[8]	Bi J, Zhang X H, Ni X W 2007 Proceedings of SPIE 6839 683926
[9]	Qin Y, Chen Y B, Ni X W, Shen Z H, Bi J, Zhang X H 2010 Optics and Lasers in Engineering 48 361
[10]	Wang B, Qin Y, Ni X W, Shen Z H, Lu J 2010 Applied Optics 49 5537
[11]	Liu J, Lu J, Ni X W, Dai G, Chen Y B 2010 Chinese Journal of lasers 37 1398 (in Chinese) [刘剑, 陆建, 倪晓武, 戴罡, 陈彦北 2010 中国激光 37 1398]
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[13]	Bi J, Zhang X H, Ni X W, Jin G Y, Li C L, Xu L J, Chen Y B 2012 Lasers in Engineering 22 37
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施引文献

[1]	Qi H F, Wang Q P, Li Y F, Zhang X Y, Liu Z J, Wang Y R, Zhang S S, Xia W, Jin G F 2007 Appl. Sur. Sci. 254 1373
[2]	Qi H F, Wang Q P , Zhang X Y, Liu Z J, Liu Z J, Chang J, Xia W, Jin G F 2008 J. Appl. Phys. 103 033106
[3]	Garg A, Kapoor A, Tripathi K N 2003 Optics & Laser Technology 35 21
[4]	Kuanr A V, Bansal S K, Srivastava G P 1996 Optics & Laser Technology 28 25
[5]	Lv G H, Man B Y, Zhang Y H, Liu A H, Zhang Q G 2004 OPTIK 115 347
[6]	Trelenberg T W, Dinh L N, Saw C K, Stuart B C, Balooch M 2004 Applied Surface Science 221 364
[7]	Srivastava P K, Singh A P, Kapoor A 2006 Optics & Laser Technology 38 649
[8]	Bi J, Zhang X H, Ni X W 2007 Proceedings of SPIE 6839 683926
[9]	Qin Y, Chen Y B, Ni X W, Shen Z H, Bi J, Zhang X H 2010 Optics and Lasers in Engineering 48 361
[10]	Wang B, Qin Y, Ni X W, Shen Z H, Lu J 2010 Applied Optics 49 5537
[11]	Liu J, Lu J, Ni X W, Dai G, Chen Y B 2010 Chinese Journal of lasers 37 1398 (in Chinese) [刘剑, 陆建, 倪晓武, 戴罡, 陈彦北 2010 中国激光 37 1398]
[12]	Bi J, Zhang X H, Ni X W 2011 Acta Phys. Sin. 60 114210 (in Chinese) [毕娟, 张喜和, 倪晓武 2011 60 114210]
[13]	Bi J, Zhang X H, Ni X W, Jin G Y, Li C L, Xu L J, Chen Y B 2012 Lasers in Engineering 22 37
[14]	Ozisik M N (Translated by Yu C M) 1983 Heat conduction (Beijing: Higher Education Press) pp7-8 (in Chinese) [奥奇西克 M N著, 俞昌铭译 1983 热传导 (北京: 高等教育出版社) 第7—8页]
[15]	Gospavic R, Sreckovic M, Popov V 2004 Mathematics and Computers in Simulation 65 211
[16]	Press W H, Flannery B P, Teukolsky S A, Vetterling W T 1992 Numerical Recipes in FORTRAN 77 (Cambridge University Press)
[17]	Meyer J R, Kruer M R, Bartoli F J 1980 J. Appl. Phys. 51 5513

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