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Zhu Zi-Yao, Liu Xiang-Xin, Jiang Fu-Guo, Zhang Yue. The twins structure and electric properties of Cl doped CdTe film by magnetron sputtering. Acta Physica Sinica,
2017, 66(8): 088101.
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Tian Jing, Yang Xing, Liu Shang-Jun, Lian Xiao-Juan, Chen Jin-Wei, Wang Rui-Lin. Effect of thickness on the properties of Cu(Inx,Ga1-x)Se2 back conduct Mo thin films prepared by DC sputtering. Acta Physica Sinica,
2013, 62(11): 116801.
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Liu Yun-Chuan, Zhou Yan-Ping, Wang Xue-Rong, Meng Xiang-Yan, Duan Jian, Zheng Hui-Bao. Accurate Rutherford backscattering spectrocsopy measurement of aluminium composition in AlxGa1-xN crystal film. Acta Physica Sinica,
2013, 62(16): 162901.
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Wang Yong-Jun, Li Hong-Xuan, Ji Li, Liu Xiao-Hong, Wu Yan-Xia, Zhou Hui-Di, Chen Jian-Min. Preparation and properties of graphite-like carbon films fabricated by unbalanced magnetron sputtering. Acta Physica Sinica,
2012, 61(5): 056103.
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Chen Xiao-Xue, Yao Ruo-He. DC characteristic research based on surface potential for a-Si:H thin-film transistor. Acta Physica Sinica,
2012, 61(23): 237104.
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Mu Zong-Xin, Mu Xiao-Dong, Wang Chun, Jia Li, Dong Chuang. Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current. Acta Physica Sinica,
2011, 60(1): 015204.
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Jia Lu, Xie Er-Qing, Pan Xiao-Jun, Zhang Zhen-Xing. Optical properties of amorphous GaN films deposited by sputtering. Acta Physica Sinica,
2009, 58(5): 3377-3382.
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Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputtering. Acta Physica Sinica,
2009, 58(6): 4109-4116.
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Wang Huan, Yao Shu-De, Pan Yao-Bo, Zhang Guo-Yi. Strain in AlInGaN thin films caused by different contents of Al and In studied by Rutherford backscattering/channeling and high resolution X-ray diffraction. Acta Physica Sinica,
2007, 56(6): 3350-3354.
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Liu Zhi-Wen, Gu Jian-Feng, Sun Cheng-Wei, Zhang Qing-Yu. Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputtering. Acta Physica Sinica,
2006, 55(4): 1965-1973.
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Wang Kun, Yao Shu-De, Hou Li-Na, Ding Zhi-Bo, Yuan Hong-Tao, Du Xiao-Long, Xue Qi-Kun. Depth-dependent elastic strain in ZnO/Zn0.9Mg0.1O/ZnO heterostructure studied by Rutherford backscattering/channeling. Acta Physica Sinica,
2006, 55(6): 2892-2896.
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Yang Wu-Bao, Fan Song-Hua, Zhang Gu-Ling, Ma Pei-Ning, Zhang Shou-Zhong, Du Jian. Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering. Acta Physica Sinica,
2005, 54(10): 4944-4948.
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Mu Zong-Xin, Li Guo-Qing, Che De-Liang, Huang Kai-Yu, Liu Cui. Investigation of the model of the discharge properties of the unbalanced magnetron sputtering system. Acta Physica Sinica,
2004, 53(6): 1994-1999.
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Song Shu-Fang, Zhou Sheng-Qiang, Chen Wei-De, Zhu Jian-Jun, Chen Chang-Yong, Xu Zhen-Jia. RBS/channeling study and photoluminscence properties of Er-implanted GaN. Acta Physica Sinica,
2003, 52(10): 2558-2562.
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2002, 51(8): 1811-1815.
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2000, 49(1): 164-169.
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REN MENG-MEI, JIANG WEI-LIN, ZHU PEI-RAN. COMPOSITION ANALYSIS AND OXYGEN CONTENT DETERMINATION OF HIGH T SUPERCONDUCTING FILMS BY RBS AND EBS METHODS. Acta Physica Sinica,
1994, 43(2): 340-344.
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1994, 43(10): 1569-1575.
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JI HANG, ZHAO TE-XIU, WANG XIAO-PING, DONG YI. AN IN-SITU STUDY OF ELECTRICAL RESISTIVITY OF MAGNETRON SPUTTERING Mo FILM. Acta Physica Sinica,
1993, 42(8): 1340-1345.
doi: 10.7498/aps.42.1340
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