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Fabrication and properties of the Y-doped Al2O3 high-k gate dielectric films

Guo De-Feng Geng Wei-Gang Lan Wei Huang Chun-Ming Wang Yin-Yue

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Fabrication and properties of the Y-doped Al2O3 high-k gate dielectric films

Guo De-Feng, Geng Wei-Gang, Lan Wei, Huang Chun-Ming, Wang Yin-Yue
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  • Abstract views:  8059
  • PDF Downloads:  1254
  • Cited By: 0
Publishing process
  • Received Date:  04 February 2005
  • Accepted Date:  05 July 2005
  • Published Online:  05 June 2005

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