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Ag2O film has a potential application in high-density optical and magneto-optical disks. In this paper, a series of Ag2O films is deposited by radio-frequency reactive magnetron sputtering at different substrate temperatures, a deposition pressure of 0.2 Pa and an oxygen flow ratio of 2:3. The spectroscopic ellipsometry spectra of the films are fitted by using a general oscillator model (including one Tauc-Lorentz oscillator and two Lorentz oscillators). In an energy range between 1.5 eV and 3.5 eV, the refractive index and extinctive coefficient of the film are in ranges between 2.2 and 2.7, and between 0.3 and 0.9, respectively. The film indicates a clear abnormal dispersion in an energy range of 3.5 eV and 4.5 eV, meaning that the plasma oscillator frequency of the film is in this energy range . A redshift of the absorption edge of the film occurs with substrate temperature increasing, which can be attributed to the increased lattice strain. The optical constants of the film clearly show the dielectric properties.
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Keywords:
- Ag2O film /
- spectroscopic ellipsometry /
- radio-frequency reactive magnetron sputtering /
- optical properties
[1] Fuji H, Tominaga J, Men L, Nakano T, Katayama H, Atoda N 2000Jpn. J. Appl. Phys. 39 980
[2] Kim J, Fuji H, Yamakama Y, Nakano T, Büchel D, Tominaga J,Atoda N 2001 Jpn. J. Appl. Phys. 40 1634
[3] Pierson J F, Wiederkehr D, Billard A 2005 Thin Solid Films 478196
[4] Varkey A J, Fort A F 1993 Sol. Energy Matt. Sol. Cells 29 253
[5] Rivers S B, Bernhardt G, Wright M W, Frankel D J, Steeves M M,Lad R J 2007 Thin Solid Films 515 8684
[6] Fortin E, Weichman F L 1964 Phys. Status Solidi. 5 515
[7] Pierson J F, Rousselot C 2005 Surf. Coat. Technol. 200 276
[8] Gao X Y, Wang S Y, Li J, Zheng Y X, Zhang R J, Zhou P, Yang YM, Chen L Y 2004 Thin Solid Films 455-456 438
[9] Chiu Y, Rambabu U, Hsu M H, Shieh H P D, Chen C Y, Lin H H2003 J. Appl. Phys. 94 1996
[10] Qiu J H, Zhou P, Gao X Y, Yu J N, Wang S Y, Li J, Zheng X Y,Yang Y M, Song Q H, Chen L Y 2005 J. Korean Phys. Soc. 46S269
[11] Gao X Y, Feng H L, Ma J M, Zhang Z Y, Lu J X, Chen Y S, YangS E, Gu J H 2010 Physica B 405 1922
[12] Gao X Y, Feng H L, Zhang Z Y, Ma J M, Lu J X 2010 Chin. Phys.Lett. 27 026804
[13] Feng H L, Liang Y, Gao X Y, Lin Q G, Zhang Z Y, Ma J M, Lu JX, Ning H 2010 Chin. J. Vac. Sci. Technol. 30 211 (in Chinese) [冯红亮, 梁艳, 郜小勇, 林清耿, 张增院, 马姣民, 卢景霄, 宁皓2010 真空科学与技术学报 30 211]
[14] Zhang Z Y, Gao X Y, Feng H L, Ma J M, Lu J X 2011 Acta Phys.Sin. 60 016110 (in Chinese) [张增院, 郜小勇, 冯红亮, 马姣民, 卢景霄 2011 60 016110]
[15] Zhang Z Y, Gao X Y, Feng H L, Ma J M, Lu J X 2011 Acta Phys. Sin. 60 036107 (in Chinese) [张增院, 郜小勇, 冯红亮, 马姣民, 卢景霄 2011 60 036107]
[16] Gao X Y, Zhang Z Y, Ma J M, Lu J X, Gu J H, Yang S E 2011Chin. Phys. B 20 026103
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[1] Fuji H, Tominaga J, Men L, Nakano T, Katayama H, Atoda N 2000Jpn. J. Appl. Phys. 39 980
[2] Kim J, Fuji H, Yamakama Y, Nakano T, Büchel D, Tominaga J,Atoda N 2001 Jpn. J. Appl. Phys. 40 1634
[3] Pierson J F, Wiederkehr D, Billard A 2005 Thin Solid Films 478196
[4] Varkey A J, Fort A F 1993 Sol. Energy Matt. Sol. Cells 29 253
[5] Rivers S B, Bernhardt G, Wright M W, Frankel D J, Steeves M M,Lad R J 2007 Thin Solid Films 515 8684
[6] Fortin E, Weichman F L 1964 Phys. Status Solidi. 5 515
[7] Pierson J F, Rousselot C 2005 Surf. Coat. Technol. 200 276
[8] Gao X Y, Wang S Y, Li J, Zheng Y X, Zhang R J, Zhou P, Yang YM, Chen L Y 2004 Thin Solid Films 455-456 438
[9] Chiu Y, Rambabu U, Hsu M H, Shieh H P D, Chen C Y, Lin H H2003 J. Appl. Phys. 94 1996
[10] Qiu J H, Zhou P, Gao X Y, Yu J N, Wang S Y, Li J, Zheng X Y,Yang Y M, Song Q H, Chen L Y 2005 J. Korean Phys. Soc. 46S269
[11] Gao X Y, Feng H L, Ma J M, Zhang Z Y, Lu J X, Chen Y S, YangS E, Gu J H 2010 Physica B 405 1922
[12] Gao X Y, Feng H L, Zhang Z Y, Ma J M, Lu J X 2010 Chin. Phys.Lett. 27 026804
[13] Feng H L, Liang Y, Gao X Y, Lin Q G, Zhang Z Y, Ma J M, Lu JX, Ning H 2010 Chin. J. Vac. Sci. Technol. 30 211 (in Chinese) [冯红亮, 梁艳, 郜小勇, 林清耿, 张增院, 马姣民, 卢景霄, 宁皓2010 真空科学与技术学报 30 211]
[14] Zhang Z Y, Gao X Y, Feng H L, Ma J M, Lu J X 2011 Acta Phys.Sin. 60 016110 (in Chinese) [张增院, 郜小勇, 冯红亮, 马姣民, 卢景霄 2011 60 016110]
[15] Zhang Z Y, Gao X Y, Feng H L, Ma J M, Lu J X 2011 Acta Phys. Sin. 60 036107 (in Chinese) [张增院, 郜小勇, 冯红亮, 马姣民, 卢景霄 2011 60 036107]
[16] Gao X Y, Zhang Z Y, Ma J M, Lu J X, Gu J H, Yang S E 2011Chin. Phys. B 20 026103
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