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Preparation and properties of GeC thin films deposited by reactive RF magnetron sputtering

Li Yang-Ping Liu Zheng-Tang Liu Wen-Ting Yan Feng Chen Jing

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Preparation and properties of GeC thin films deposited by reactive RF magnetron sputtering

Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing
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  • Abstract views:  8598
  • PDF Downloads:  1289
  • Cited By: 0
Publishing process
  • Received Date:  20 November 2007
  • Accepted Date:  03 February 2008
  • Published Online:  05 May 2008

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