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Effect of high temperature rapid thermal annealing on flow pattern defects in heavily Sb-doped CZSi

Hao Qiu-Yan Liu Cai-Chi Sun Wei-Zhong Zhang Jian-Qiang Sun Shi-Long Zhao Li-Wei Zhang Jian-Feng Zhou Qi-Gang Wang Jing

Citation:

Effect of high temperature rapid thermal annealing on flow pattern defects in heavily Sb-doped CZSi

Hao Qiu-Yan, Liu Cai-Chi, Sun Wei-Zhong, Zhang Jian-Qiang, Sun Shi-Long, Zhao Li-Wei, Zhang Jian-Feng, Zhou Qi-Gang, Wang Jing
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  • Abstract views:  8108
  • PDF Downloads:  1267
  • Cited By: 0
Publishing process
  • Received Date:  27 January 2005
  • Accepted Date:  14 March 2005
  • Published Online:  05 May 2005

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