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Infrared analysis on hydrogen content and Si-H bonding configurations of hydrogenated amorphous silicon films

Luo Zhi Lin Xuan-Ying Lin Shun-Hui Yu Chu-Ying Lin Kui-Xun Yu Yun-Peng Tan Wei-Feng

Citation:

Infrared analysis on hydrogen content and Si-H bonding configurations of hydrogenated amorphous silicon films

Luo Zhi, Lin Xuan-Ying, Lin Shun-Hui, Yu Chu-Ying, Lin Kui-Xun, Yu Yun-Peng, Tan Wei-Feng
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  • Abstract views:  9905
  • PDF Downloads:  11882
  • Cited By: 0
Publishing process
  • Received Date:  20 February 2002
  • Accepted Date:  10 May 2002
  • Published Online:  03 April 2005

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