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汕头大学物理系,汕头515063
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[1] Wang Yi-Lin, Lan Zi-Xuan, Du Hui-Wei, Zhao Lei, Ma Zhong-Quan. Phosphorus oxides in heavily doped polysilicon films. Acta Physica Sinica, 2022, 71(18): 188201. doi: 10.7498/aps.71.20220706 [2] Wang Jian, Chuai Rong-Yan. Theoretical relationship between p-type polysilicon thin film gauge factor and doping concentration. Acta Physica Sinica, 2017, 66(24): 247201. doi: 10.7498/aps.66.247201 [3] Su Yuan-Jun, Xu Jun, Zhu Ming, Fan Peng-Hui, Dong Chuang. Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputtering. Acta Physica Sinica, 2012, 61(2): 028104. doi: 10.7498/aps.61.028104 [4] Tang Zheng-Xia, Shen Hong-Lie, Jiang Feng, Fang Ru, Lu Lin-Feng, Huang Hai-Bin, Cai Hong. Mechanism of large grain polycrystalline Si preparation by aluminum induced crystallization with temperature gradient profile. Acta Physica Sinica, 2010, 59(12): 8770-8775. doi: 10.7498/aps.59.8770 [5] Liu Li-Ying, Zhang Jia-Liang, Guo Qing-Chao, Wang De-Zhen. Diagnostics of the atmospheric pressure plasma jets for plasma enhanced chemical vapor deposition of polycrystalline silicon thin film. Acta Physica Sinica, 2010, 59(4): 2653-2660. doi: 10.7498/aps.59.2653 [6] Liu Zhao-Jun, Meng Zhi-Guo, Zhao Sun-Yun, Kwok Hoi Sing, Wu Chun-Ya, Xiong Shao-Zhen. Crystallized poly-silicon thin film laterally induced by the Ni/Si oxide source. Acta Physica Sinica, 2010, 59(4): 2775-2782. doi: 10.7498/aps.59.2775 [7] Qiu Sheng-Hua, Chen Cheng-Zhao, Liu Cui-Qing, Wu Yuan-Dan, Li Ping, Lin Xuan-Ying, Huang Chong, Yu Chu-Ying. Effect of hydrogen dilution on crystalline properties of nano-crystalline silicon thin films in fast growth. Acta Physica Sinica, 2009, 58(1): 565-569. doi: 10.7498/aps.58.565 [8] Luo Chong, Meng Zhi-Guo, Wang Shuo, Xiong Shao-Zhen. Preparation of poly-slicon thin film by aluminum induced crystallization based on Al-salt solution. Acta Physica Sinica, 2009, 58(9): 6560-6565. doi: 10.7498/aps.58.6560 [9] Li Shi-Bin, Wu Zhi-Ming, Yuan Kai, Liao Nai-Man, Li Wei, Jiang Ya-Dong. Study on thermal conductivity of hydrogenated amorphous silicon films. Acta Physica Sinica, 2008, 57(5): 3126-3131. doi: 10.7498/aps.57.3126 [10] Huang Rui, Lin Xuan-Ying, Yu Yun-Peng, Lin Kui-Xun, Zhu Zu-Song, Wei Jun-Hong. Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon films. Acta Physica Sinica, 2006, 55(5): 2523-2528. doi: 10.7498/aps.55.2523 [11] Zhao Shu-Yun, Wu Chun-Ya, Liu Zhao-Jun, Li Xue-Dong, Wang Zhong, Meng Zhi-Guo, Xiong Shao-Zhen, Zhang Fang. Study on the large grain size poly-Si prepared by metal induced crystallization using nickel chemical source. Acta Physica Sinica, 2006, 55(11): 6095-6100. doi: 10.7498/aps.55.6095 [12] Hao Hui-Ying, Kong Guang-Lin, Zeng Xiang-Bo, Xu Ying, Diao Hong-Wei, Liao Xian-Bo. Transition films from amporphous to microcrystalline silicon and solar cells. Acta Physica Sinica, 2005, 54(7): 3327-3331. doi: 10.7498/aps.54.3327 [13] Hao Hui-Ying, Kong Guang-Lin, Zeng Xiang-Bo, Xu Ying, Diao Hong-Wei, Liao Xian-Bo. Computer simulation of a-Si:H/μc-Si:H diphasic silicon solar cells. Acta Physica Sinica, 2005, 54(7): 3370-3374. doi: 10.7498/aps.54.3370 [14] Lin Xuan-Ying, Huang Chuang-Jun, Lin Kui-Xun, Yu Yun-Peng, Yu Chu-Ying, Huang Rui. Raman analysis of microstructure of polycrystalline silicon films deposited at low-temperatures from SiCl4-H2. Acta Physica Sinica, 2004, 53(5): 1558-1561. doi: 10.7498/aps.53.1558 [15] Huang Rui, Lin Xuan-Ying, Yu Yun-Peng, Lin Kui-Xun, Yao Ruo-He, Huang Wen-Yong, Wei Jun-Hong, Wang Zhao-Kui, Yu Chu-Ying. Control of grain size during low-temperature growth of polycrystalline silicon films. Acta Physica Sinica, 2004, 53(11): 3950-3955. doi: 10.7498/aps.53.3950 [16] Chen Yi-Kuang, Lin Kui-Xun, Luo Zhi, Liang Rui-Sheng, Zhou Fu-Fang. Aluminum-induced rapid crystallization of a-Si films at low temperatures in an electric field and microstructure analyses of the crystallized films. Acta Physica Sinica, 2004, 53(2): 582-586. doi: 10.7498/aps.53.582 [17] Wang Liu-Jiu, Zhu Mei-Fang, Liu Feng-Zhen, Liu Jin-Long, Han Yi-Qin. Structual and optoelectronic properties of polycrystalline silicon thin films p repared by hot-wire chemical vapor deposition at low temperatures. Acta Physica Sinica, 2003, 52(11): 2934-2938. doi: 10.7498/aps.52.2934 [18] Zhang Shi-Bin, Liao Xian-Bo, An Long, Yang Fu-Hua, Kong Guang-Lin, Wang Yong-Qian, Xu Yan-Yue, Chen Chang-Yong, Diao Hong-Wei. . Acta Physica Sinica, 2002, 51(8): 1811-1815. doi: 10.7498/aps.51.1811 [19] HE DE-YAN. CONTROL OF THE SURFACE REACTIONS DURING THE LOW-TEMPERATURE GROWTH OF POLYCRYSTALLINE SILICON FILMS. Acta Physica Sinica, 2001, 50(4): 779-783. doi: 10.7498/aps.50.779 [20] HE YU-LIANG, ZHOU HENG-NAN, LIU XIANG-NA, CHENG GUANG-XU, YU SHI-DONG. STUDIES AND ANALYSIS FOR MICROSTRUCTURES OF MICRO-CRYSTALLIZATION PROCESS OF AMORPHOUS SILICON FILMS. Acta Physica Sinica, 1990, 39(11): 1796-1802. doi: 10.7498/aps.39.1796
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Publishing process
- Received Date:
07 April 2001
- Accepted Date:
29 September 2001
- Published Online:
05 February 2002