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Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon films

Huang Rui Lin Xuan-Ying Yu Yun-Peng Lin Kui-Xun Zhu Zu-Song Wei Jun-Hong

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Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon films

Huang Rui, Lin Xuan-Ying, Yu Yun-Peng, Lin Kui-Xun, Zhu Zu-Song, Wei Jun-Hong
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  • Abstract views:  8675
  • PDF Downloads:  1383
  • Cited By: 0
Publishing process
  • Received Date:  30 August 2005
  • Accepted Date:  11 November 2005
  • Published Online:  20 May 2006

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