Liu Heng, Li Ye, Du Meng-Chao, Qiu Peng, He Ying-Feng, Song Yi-Meng, Wei Hui-Yun, Zhu Xiao-Li, Tian Feng, Peng Ming-Zeng, Zheng Xin-He. Atomic layer deposition of AlGaN alloy and its application in quantum dot sensitized solar cellsJ. Acta Physica Sinica, 2023, 72(13): 137701. DOI: 10.7498/aps.72.20230113