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The interaction between light and matter has attracted much attention not only for fundamental research but also for applications. The open Fabry-Perot cavity provides an excellent platform for such a study due to strong optical confinement, spectral and spatial and tunability, and the feasibility of optical fiber integration. In this review, first, the basic properties of open Fabry-Perot cavities and the fabrication techniques are introduced. Then recent progress of weak coupling, strong coupling and bad emitter regimes is discussed. Finally, the challenges to and perspectives in this respect are presented.
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Keywords:
- Fabry-Perot microcavity /
- open cavity /
- solid-state single quantum system /
- cavity quantum electrodynamics
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图 1 腔与TLS耦合的原理图. 该系统可通过3个参数进行描述:
$ g, \kappa $ 和$ \gamma $ , 它们分别量化了TLS与腔的耦合、腔损耗速率以及TLS的非共振自发辐射Figure 1. Schematic diagram of the operational principle for TLS coupling to the cavity. The system is described by three parameters:
$ g $ ,$ \kappa $ , and$ \gamma $ which quantify the cavity-TLS coupling, the photon decay from the cavity, and the non-resonant spontaneous emission of the TLS, respectively.图 2 JC模型下腔与TLS耦合前后的能级示意图. 当TLS与腔内光子共振时, 该系统的能级发生劈裂, 且劈裂量会随着腔内光子数的增大而增大
Figure 2. States of the cavity-two level system coupled system described by JC model. When the TLS comes into resonance with optical modes of the cavity, a generated energy level of the system will split into two with an energy difference. The magnitude of the splitting increases with the number of photons stored in the cavity.
图 4 早期的开放式FP微腔结构 (a)利用湿法刻蚀制备的第一个光纤-芯片型开放式FP微腔[36]; (b)利用气泡法制备光滑凹面结构[37]; (c) 利用转移技术制备的光纤型开放式FP微腔[38]; (d) 利用乳胶球辅助电化学沉积技术制备的凹面尺寸可控的微腔[39]
Figure 4. Early open FP microcavity structures: (a) The first fiber-chip type open FP microcavity fabricated by wet etching[36] ; (b) preparation of smooth concave structure by bubble method[37]; (c) fiber type FP microcavity fabricated by transfer technique[38]; (d) microcavity with controllable concave size prepared by latex ball assisted electrochemical deposition technique[39].
图 5 早期利用CO2激光烧蚀法构建光纤型FP腔的工作[17] (a)微腔结构示意图; (b) CO2激光脉冲处理后光纤端面的扫描电子显微镜图; (c) 利用干涉显微镜得到的曲面形貌(实线)与理想高斯形貌(虚线)的差别
Figure 5. Early fiber-type FP microcavity made by CO2 laser ablation method[17]: (a) Schematic diagram of cavity structure; (b) scanning electron microscope image of fiber endface after CO2 laser pulse treatment; (c) surface topography (solid line) obtained by interference microscope and an ideal Gaussian profile (dotted line).
图 6 最早利用FIB刻蚀法制备芯片型开放式FP微腔的工作[34] (a)腔结构示意图; (b)凹面阵列的扫描电子显微镜照片; (c)原子力显微镜得到的曲面面型(蓝线)以及拟合的光滑曲面(绿线), 面型粗糙度约0.7 nm
Figure 6. The earliest chip-type FP microcavity made by FIB etching technique[34]: (a) Schematic diagram of cavity structure; (b) scanning electron microscope image of the processed concave mirror array; (c) surface profile (blue line) obtained by atomic force microscope and the fitting curve (green line). The surface roughness is 0.7 nm.
图 7 可实现强耦合的典型量子点-腔系统[80] (a)量子点-腔系统结构; (b)为了控制量子点的电荷, 量子点层下面的n掺杂GaAs层与其上面的p掺杂GaAs层一起形成p-i-n二极管结构; (c)通过调节腔长优化量子点和腔之间的耦合, 基于该平台得到了具有反交叉特征的共振透射光谱
Figure 7. Typical quantum dot (QD)-cavity system in which the strong coupling could be observed[80]: (a) Setup of the QD-cavity system; (b) the n-doped GaAs layer below the QD layer and the p-doped GaAs layer above forming a p-i-n diode structure, which is used to control the charge state of the QDs; (c) the cavity length is adjusted to optimize the coupling between the QD and the cavity, an anti-crossing in resonant transmission spectroscopy is observed.
表 1 开放式FP微腔的性能比较
Table 1. Performance comparison of open FP microcavities.
制备方法 反射膜层 结构 年份 $\mathit{L}/\text{μm }$ $\mathit{R}/\text{μm }$ $ \mathit{F} $ 文献 湿法刻蚀 Au 光纤型 2005 $ 20—200 $ $ 185 $ $ ~100 $ [36] 气泡法 DBR 芯片型 2006 $ 40—60 $ $ 40—100 $ $ 200 $ [37] 转移法 DBR 光纤型 2006 $ 27 $ $ 1000 $ $ 1050 $ [38] 电化学沉积 Au 芯片型 2007 $ 6.5—9.7 $ $ 10 $ $ ~15 $ [39] CO2激光烧蚀 DBR 光纤型 2007 $ 38.6 $ $ 150 $ $ 37000 $ [46] DBR 光纤型 2010 $ 20—60 $ $ 40—2000 $ $ 38600 $ [17] DBR 光纤型 2012 $ 20—2000 $ $ 20—2000 $ $ 100000 $ [47] DBR 光纤型 2013 $ 206 $ $ 209 $ $ 45000 $ [48] DBR 芯片型 2014 $ 1.34 $ $ 10 $ $ 15000 $ [26] DBR 芯片型 2017 $ 1.33 $ $ ~5 $ $ 25000 $ [49] DBR 光纤型 2017 $ 100 $ $ 200—360 $ $ 1300 $ [29] DBR 光纤型 2018 $ 20 $ $ 66 $ $ 40000 $ [50] DBR 光纤型 2019 $ 4 $ $ 43 $ $ ~60 $ [25] FIB刻蚀 DBR 芯片型 2010 $ 3—13 $ $ 5—25 $ $ 460 $ [34] DBR 芯片型 2012 $ 1.6 $ $ 7 $ $ ~1280 $ [14] DBR 光纤型 2014 $ 5.6 $ $ 14.1 $ $ 3600 $ [51]* DBR 芯片型 2015 $ 1.55 $ $ 4.3 $ $ ~1000 $ [33] DBR 芯片型 2016 $ 3 $ $ 6 $ $ ~1000 $ [32] DBR 芯片型 2018 $ 2.2 $ $ ~10 $ — [52] DBR 芯片型 2021 1 — $ 2500 $ [53] 注: 1)所选取微腔参数范围是对应文献典型微腔的参数, 并非涉及文献中所有微腔; 2)部分文献未直接给出F的值, 这里根据(3)式和(4)式进行换算; 3)带*标注是指文献[51]引用参数对应微腔一个端镜由FIB刻蚀产生, 另一个由CO2激光烧蚀产生; 4)这里R指的是微腔两面端镜的曲率半径中较小的. 表 2 开放式FP微腔在弱耦合中的典型应用
Table 2. Typical applications of open FP microcavity in weak coupling regime.
表 3 开放式FP微腔在强耦合中的典型应用
Table 3. Typical applications of open FP microcavity in strong coupling regime.
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[2] Bitarafan M, DeCorby R 2017 Sensors 17 1748Google Scholar
[3] Purcell E 1946 Phys. Rev. 69 681
[4] Wang H, He Y M, Chung T H, Hu H, Yu Y, Chen S, Ding X, Chen M C, Qin J, Yang X, Liu R Z, Duan Z C, Li J P, Gerhardt S, Winkler K, Jurkat J, Wang L J, Gregersen N, Huo Y H, Dai Q, Yu S, Höfling S, Lu C Y, Pan J W 2019 Nat. Photonics 13 770Google Scholar
[5] Tomm N, Javadi A, Antoniadis N O, Najer D, Lobl M C, Korsch A R, Schott R, Valentin S R, Wieck A D, Ludwig A, Warburton R J 2021 Nat. Nanotechnol. 16 399Google Scholar
[6] Baba T, Sano D 2003 IEEE J. Sel. Top. Quant. 9 1340Google Scholar
[7] Altug H, Englund D, Vučković J 2006 Nat. Phys. 2 484Google Scholar
[8] Li X, Gu Q 2019 Adv. Phys. X 4 1658541Google Scholar
[9] Walther H, Varcoe B T H, Englert B G, Becker T 2006 Rep. Prog. Phys. 69 1325Google Scholar
[10] Bajoni D, Senellart P, Wertz E, Sagnes I, Miard A, Lemaitre A, Bloch J 2008 Phys. Rev. Lett. 100 047401Google Scholar
[11] Birnbaum K M, Boca A, Miller R, Boozer A D, Northup T E, Kimble H J 2005 Nature 436 87Google Scholar
[12] Muller A, Flagg E B, Metcalfe M, Lawall J, Solomon G S 2009 Appl. Phys. Lett. 95 173101Google Scholar
[13] Barbour R J, Dalgarno P A, Curran A, Nowak K M, Baker H J, Hall D R, Stoltz N G, Petroff P M, Warburton R J 2011 J. Appl. Phys. 110 053107Google Scholar
[14] Di Z, Jones H V, Dolan P R, Fairclough S M, Wincott M B, Fill J, Hughes G M, Smith J M 2012 New J. Phys. 14 103048Google Scholar
[15] Muljarov E A, Langbein W 2016 Phys. Rev. B 94 235438Google Scholar
[16] Coccioli R, Boroditsky M, Yablonovitch E, Rahmat-Samii Y, Kim K W 1998 IEE Proc.-Optoelectron. 145 391Google Scholar
[17] Hunger D, Steinmetz T, Colombe Y, Deutsch C, Hänsch T W, Reichel J 2010 New J. Phys. 12 065038Google Scholar
[18] Andreani L C, Panzarini G, Gérard J M 1999 Phys. Rev. B 60 13276Google Scholar
[19] Bitarafan M H, DeCorby R G 2017 Appl. Opt. 56 9992Google Scholar
[20] Wang D 2021 J. Phys. B: At., Mol. Opt. Phys. 54 133001Google Scholar
[21] Gerry C C, Knight P L 2005 Introductory Quantum Optics (New York: Cambridge University Press)
[22] Rasero D A, Portacio A A, Villamil P E, Rodríguez B A 2021 Physica E 129 114645Google Scholar
[23] Harder M, Hu C M 2018 Solid State Phys. 69 47Google Scholar
[24] Fox M 2006 Quantum Optics (Oxford: Oxford University Press)
[25] Qing P, Gong J, Lin X, Yao N, Shen W, Rahimi-Iman A, Fang W, Tong L 2019 Appl. Phys. Lett. 114 021106Google Scholar
[26] Greuter L, Starosielec S, Najer D, Ludwig A, Duempelmann L, Rohner D, Warburton R J 2014 Appl. Phys. Lett. 105 121105Google Scholar
[27] Kelkar H, Wang D, Martín-Cano D, Hoffmann B, Christiansen S, Götzinger S, Sandoghdar V 2015 Phys. Rev. Appl. 4 054010Google Scholar
[28] Potts C A, Melnyk A, Ramp H, Bitarafan M H, Vick D, LeBlanc L J, Davis J P, DeCorby R G 2016 Appl. Phys. Lett. 108 041103Google Scholar
[29] Zhou K, Cui J M, Huang Y F, Wang Z, Qian Z H, Wu Q M, Wang J, He R, Lv W M, Hu C K, Han Y J, Li C F, Guo G C 2017 Chin. Phys. Lett. 34 013701Google Scholar
[30] Yokoshi N, Imamura H, Kosaka H 2013 Phys. Rev. B 88 155321Google Scholar
[31] Wang D, Kelkar H, Martin-Cano D, Rattenbacher D, Shkarin A, Utikal T, Götzinger S, Sandoghdar V 2019 Nat. Phys. 15 483Google Scholar
[32] Flatten L C, Trichet A A P, Smith J M 2016 Laser Photonics Rev. 10 257Google Scholar
[33] Trichet A A, Dolan P R, Coles D M, Hughes G M, Smith J M 2015 Opt. Express 23 17205Google Scholar
[34] Dolan P R, Hughes G M, Grazioso F, Patton B R, Smith J M 2010 Opt. Lett. 35 3556Google Scholar
[35] Li F, Li Y, Cai Y, Li P, Tang H, Zhang Y 2019 Adv. Quantum Technol. 2 1900060Google Scholar
[36] Trupke M, Hinds E A, Eriksson S, Curtis E A, Moktadir Z, Kukharenka E, Kraft M 2005 Appl. Phys. Lett. 87 211106Google Scholar
[37] Cui G, Hannigan J M, Loeckenhoff R, Matinaga F M, Raymer M G, Bhongale S, Holland M, Mosor S, Chatterjee S, Gibbs H M, Khitrova G 2006 Opt. Express 14 2289Google Scholar
[38] Steinmetz T, Colombe Y, Hunger D, Hänsch T W, Balocchi A, Warburton R J, Reichel J 2006 Appl. Phys. Lett. 89 111110Google Scholar
[39] Pennington R C, D'Alessandro G, Baumberg J J, Kaczmarek M 2007 Opt. Lett. 32 3131Google Scholar
[40] Patel C K N 1964 Phys. Rev. 136 A1187Google Scholar
[41] Lai M H, Lim K S, Gunawardena D S, Lee Y S, Ahmad H 2017 IEEE Sens. J. 17 2961Google Scholar
[42] Madić M, Radovanović M, Manić M, Trajanović M 2014 Tribol. Ind. 36 236
[43] Bharatish A, Narasimha Murthy H N, Anand B, Madhusoodana C D, Praveena G S, Krishna M 2013 Opt. Laser Technol. 53 22Google Scholar
[44] Benyounis K Y, Olabi A G, Hashmi M S J 2005 J. Mater. Process. Technol. 164–165 978Google Scholar
[45] MarkillieG A J, Baker H J, VillarrealF J, HallD R 2002 Appl. Opt. 41 5660Google Scholar
[46] Colombe Y, Steinmetz T, Dubois G, Linke F, Hunger D, Reichel J 2007 Nature 450 272Google Scholar
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