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It is difficult to cope with the changes in power and polarization for partially polarized light. The light polarization will also affect the image quality, especially for imaging with large numerical aperture. A novel method of analyzing the power and the polarization state of partially polarized light is proposed in this paper. This method has a good intuitiveness and requires much smaller computation. An aplanatic lens system is simulated. Polarization effect caused is analyzed with this method. The results show that for the imaging light the intensity of TM polarized light relatively increases because of large numerical aperture, which will influence image contrast. Imaging in high refractive index medium can be used to improve this problem.
[1] Hong K, Jia B H, Min G 2010 Opt. Express 18 10813
[2] Schön E, Munhoz F, Gasecka A, Brustlein S, Brasselet S 2008 Opt. Express 16 20891
[3] Yu G B, Yao H M, Liu Y Y, Hu S 2003 China Electronics Manufacturing Technology Forum ShenZhen, China, August 6-9, 2003 p388 (深圳: CIPC, 中国电子学会生产技术分会)
[4] Zhang Y L, Zhao Y Q, Zhan Q W, Li Y P 2006 Acta Phys. Sin. 55 1253 (in Chinese) [张艳丽, 赵逸琼, 詹其文, 李永平 2006 55 1253]
[5] Zhang J, Kim Y, Yang S H, Milster T D 2010 J. Opt. Soc. Am. A 27 2272
[6] Wang C, Yuan J H, Wang G Y, Xu Z Z 2003 Acta Phys. Sin. 52 3014 (in Chinese) [王琛, 袁景和, 王桂英, 徐至展 2003 52 3014]
[7] Yuan C J, Situ G H, Pedrini G, Ma J, Osten W G 2011 Appl. Opt. 5 B6
[8] Tschimwang A, Zhan Q 2010 Appl. Opt. 49 1574
[9] Su H M, Zheng X G, Wang X 2002 Acta Phys. Sin. 51 1044 (in Chinese) [苏慧敏, 郑锡光, 王霞 2002 51 1044]
[10] Zhang E F, Dai H Y 2011 Acta Phys. Sin. 60 064209 (in Chinese) [张二峰, 戴宏毅 2011 60 064209]
[11] Freniere E R, Gregory G G 1999 SPIE Conference on Optical Design and Analysis Software Denver, Colorado July 1999 p148
[12] Liu Ch, Liu Q Sh, Cen Zh F, Li X T 2010 SPIE Conference on Optical Design and Testing Beijing, China, Oct. 18-21, 2010 p78490G-1
[13] Born M, Wolf E (translated by Yang X S) 2009 Principles of Optics (7th Edition) (Beijing: Publishing House of Electronics Industry) p39-45 (in Chinese) [马科斯·波恩, 埃米尔·沃耳夫著 杨葭荪译 2009 光学原理 (第7版) (北京：电子工业出版社) 第39-45页]
[14] Cen Zh F, Li X T 2010 Acta Phys. Sin. 59 5784 (in Chinese) [岑兆丰, 李晓彤 2010 59 5784]
[15] Yu D Y, Tan H Y 2005 Engineering Optics (2ed Edition) (Beijing: China Machine Press) p420-422 (in Chinese) [郁道银, 谈恒英 2005 工程光学 (第2版) (北京: 机械工业出版社) 第420-422页]
[16] Lindlein N, Quabis S, Peschel U, Leuchs G 2007 Opt. Express 15 5827
[17] Yu G B 2006 Ph. D. Dissertation (Sichuan: the Institute of Optics and Electronics, Chinese Academy of Sciences) (in Chinese) [余国彬 2006 百纳米级微细图形投影光学光刻偏振成像原理及方法研究 博士学位论文 (四川: 中国科学院光电技术研究所)]
[18] Lerman G M, Levy U 2008 Opt. Express 16 4567
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[1] Hong K, Jia B H, Min G 2010 Opt. Express 18 10813
[2] Schön E, Munhoz F, Gasecka A, Brustlein S, Brasselet S 2008 Opt. Express 16 20891
[3] Yu G B, Yao H M, Liu Y Y, Hu S 2003 China Electronics Manufacturing Technology Forum ShenZhen, China, August 6-9, 2003 p388 (深圳: CIPC, 中国电子学会生产技术分会)
[4] Zhang Y L, Zhao Y Q, Zhan Q W, Li Y P 2006 Acta Phys. Sin. 55 1253 (in Chinese) [张艳丽, 赵逸琼, 詹其文, 李永平 2006 55 1253]
[5] Zhang J, Kim Y, Yang S H, Milster T D 2010 J. Opt. Soc. Am. A 27 2272
[6] Wang C, Yuan J H, Wang G Y, Xu Z Z 2003 Acta Phys. Sin. 52 3014 (in Chinese) [王琛, 袁景和, 王桂英, 徐至展 2003 52 3014]
[7] Yuan C J, Situ G H, Pedrini G, Ma J, Osten W G 2011 Appl. Opt. 5 B6
[8] Tschimwang A, Zhan Q 2010 Appl. Opt. 49 1574
[9] Su H M, Zheng X G, Wang X 2002 Acta Phys. Sin. 51 1044 (in Chinese) [苏慧敏, 郑锡光, 王霞 2002 51 1044]
[10] Zhang E F, Dai H Y 2011 Acta Phys. Sin. 60 064209 (in Chinese) [张二峰, 戴宏毅 2011 60 064209]
[11] Freniere E R, Gregory G G 1999 SPIE Conference on Optical Design and Analysis Software Denver, Colorado July 1999 p148
[12] Liu Ch, Liu Q Sh, Cen Zh F, Li X T 2010 SPIE Conference on Optical Design and Testing Beijing, China, Oct. 18-21, 2010 p78490G-1
[13] Born M, Wolf E (translated by Yang X S) 2009 Principles of Optics (7th Edition) (Beijing: Publishing House of Electronics Industry) p39-45 (in Chinese) [马科斯·波恩, 埃米尔·沃耳夫著 杨葭荪译 2009 光学原理 (第7版) (北京：电子工业出版社) 第39-45页]
[14] Cen Zh F, Li X T 2010 Acta Phys. Sin. 59 5784 (in Chinese) [岑兆丰, 李晓彤 2010 59 5784]
[15] Yu D Y, Tan H Y 2005 Engineering Optics (2ed Edition) (Beijing: China Machine Press) p420-422 (in Chinese) [郁道银, 谈恒英 2005 工程光学 (第2版) (北京: 机械工业出版社) 第420-422页]
[16] Lindlein N, Quabis S, Peschel U, Leuchs G 2007 Opt. Express 15 5827
[17] Yu G B 2006 Ph. D. Dissertation (Sichuan: the Institute of Optics and Electronics, Chinese Academy of Sciences) (in Chinese) [余国彬 2006 百纳米级微细图形投影光学光刻偏振成像原理及方法研究 博士学位论文 (四川: 中国科学院光电技术研究所)]
[18] Lerman G M, Levy U 2008 Opt. Express 16 4567
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