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Effects of low-temperature annealing on oxygen precipitate nucleation in heavily arsenic-doped Czochralski silicon

Xi Guang-Ping Ma Xiang-Yang Tian Da-Xi Zeng Yu-Heng Gong Long-Fei Yang De-Ren

Citation:

Effects of low-temperature annealing on oxygen precipitate nucleation in heavily arsenic-doped Czochralski silicon

Xi Guang-Ping, Ma Xiang-Yang, Tian Da-Xi, Zeng Yu-Heng, Gong Long-Fei, Yang De-Ren
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  • Abstract views:  8503
  • PDF Downloads:  853
  • Cited By: 0
Publishing process
  • Received Date:  09 April 2008
  • Accepted Date:  12 May 2008
  • Published Online:  20 November 2008

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