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Grown-in oxygen precipitates in czochralski silicon investigated by transmission electron microscopy

Xu Jin Li Fu-Long Yang De-Ren

Citation:

Grown-in oxygen precipitates in czochralski silicon investigated by transmission electron microscopy

Xu Jin, Li Fu-Long, Yang De-Ren
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  • Abstract views:  8479
  • PDF Downloads:  1104
  • Cited By: 0
Publishing process
  • Received Date:  10 November 2006
  • Accepted Date:  15 December 2006
  • Published Online:  20 July 2007

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