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Effect of nitrogen on oxygen precipitation in Czochralski silicon during high-te mperature annealing

Jiang Le Yang De-Ren Yu Xue-Gong Ma Xiang-Yang Xu Jin Que Duan-Lin

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Effect of nitrogen on oxygen precipitation in Czochralski silicon during high-te mperature annealing

Jiang Le, Yang De-Ren, Yu Xue-Gong, Ma Xiang-Yang, Xu Jin, Que Duan-Lin
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  • Abstract views:  7460
  • PDF Downloads:  888
  • Cited By: 0
Publishing process
  • Received Date:  07 August 2002
  • Accepted Date:  18 November 2002
  • Published Online:  05 April 2003

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