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Poly-SiGe films prepared by metal-induced growth using UHVCVD system

Wu Gui-Bin Ye Zhi-Zhen Zhao Xing Liu Guo-Jun Zhao Bin-Hui

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Poly-SiGe films prepared by metal-induced growth using UHVCVD system

Wu Gui-Bin, Ye Zhi-Zhen, Zhao Xing, Liu Guo-Jun, Zhao Bin-Hui
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  • Abstract views:  8143
  • PDF Downloads:  1321
  • Cited By: 0
Publishing process
  • Received Date:  31 August 2005
  • Accepted Date:  15 January 2006
  • Published Online:  20 July 2006

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