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CHARACTERISTIC ELECTRON ENERGY LOSS SPECTRA IN SiC BURIED LAYERS FORMED BY C+ IMPLANTATION INTO CRYSTALLINE SILICON

YAN HUI CHEN GUANG-HUA S.P.WONG R.W.M.KWOK

Citation:

CHARACTERISTIC ELECTRON ENERGY LOSS SPECTRA IN SiC BURIED LAYERS FORMED BY C+ IMPLANTATION INTO CRYSTALLINE SILICON

YAN HUI, CHEN GUANG-HUA, S.P.WONG, R.W.M.KWOK
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  • Abstract views:  7356
  • PDF Downloads:  599
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Publishing process
  • Received Date:  22 October 1997
  • Published Online:  20 May 1998

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