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AUGER ELECTRON SPECTROSCOPIC STUDIES OF INTERFA CE AND BURIED LAYER OF SOI STRUCTURE FORMED BY ION IMPLANTATION

YU YUE-HUI LIN CHENG-LU ZHANG SHUN-KAI FANG ZI-ZEI ZOU SHI-CHANG

Citation:

AUGER ELECTRON SPECTROSCOPIC STUDIES OF INTERFA CE AND BURIED LAYER OF SOI STRUCTURE FORMED BY ION IMPLANTATION

YU YUE-HUI, LIN CHENG-LU, ZHANG SHUN-KAI, FANG ZI-ZEI, ZOU SHI-CHANG
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Publishing process
  • Received Date:  10 February 1989
  • Published Online:  05 June 1989

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