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STUDIES ON THE FEATURE OF Si(111) SURFACE IMPLANTED BY NITROGEN ATOM,MOLECULE AND CLUSTER IONS

WANG PEI-LU LIU ZHONG-YANG ZHENG SI-XIAO LIAO XIAO-DONG YANG CHAO-WEN TANG A-YOU SHI MIAN-GONG YANG BEI-FANG MIAO JING-WEI

Citation:

STUDIES ON THE FEATURE OF Si(111) SURFACE IMPLANTED BY NITROGEN ATOM,MOLECULE AND CLUSTER IONS

WANG PEI-LU, LIU ZHONG-YANG, ZHENG SI-XIAO, LIAO XIAO-DONG, YANG CHAO-WEN, TANG A-YOU, SHI MIAN-GONG, YANG BEI-FANG, MIAO JING-WEI
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  • Received Date:  25 November 2000
  • Published Online:  20 May 2001

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