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EXPERIMENTAL STUDY ON DIFFRACTIVE PERFORMANCE OF CONCAVE GROOVES WITH SUBMICRON WIDTH

ZHENG SHI-HAI LI DE-HUA CHEN YAN-SONG DAI LUN

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EXPERIMENTAL STUDY ON DIFFRACTIVE PERFORMANCE OF CONCAVE GROOVES WITH SUBMICRON WIDTH

ZHENG SHI-HAI, LI DE-HUA, CHEN YAN-SONG, DAI LUN
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Publishing process
  • Received Date:  11 May 1995
  • Published Online:  05 April 1996

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