Improving electrochromic properties of tungsten trioxide by constructing gradient distribution oxygen vacancies through plasma treatment

JIANG Yihang; CAO Fenghua; LI Haomiao; NIE Yongjie; LI Guochang; WEI Yanhui; LU Guanghao; LI Shengtao; ZHU Yuanwei

doi:10.7498/aps.74.20241663

Abstract

In recent years, electrochromic materials have been extensively utilized in smart windows, displays, and dimmable devices. WO₃, as a typical electrochromic material has received significant attention. Existing researches indicate that the concentration and distribution of oxygen vacancies in WO₃ are both important in determining electrochromic effect. However, it has been reported that traditional preparation methods such as annealing can significantly reduce the ability to modulate the crystallinity and optical performance. Hence, proposing a novel approach to enhance the electrochromic properties of WO₃ films holds important research significance and application prospects. In this work, the electrochromic properties of WO₃ thin films are enhanced by increasing the oxygen vacancy concentration and forming its gradient distribution on the surface through plasma treatment. Firstly, the oxygen vacancy concentration and distribution of the film are optimized by regulating the power and duration of the plasma treatment. Secondly, the structure and optical properties of the plasma treated WO₃ films are analyzed using X-ray diffraction (XRD), scanning electron microscopy (SEM), and UV-Vis spectroscopy. Finally, the stability and response speed of each film during the electrochromic cycle are evaluated via electrochemical tests. Through plasma treatment, the concentrations of oxygen vacancies on the surfaces of WO₃ films are all significantly increased, and a gradient distribution is formed, which is conducive to enhancing the ability to inject and extract electrons. The treated WO₃ films demonstrate better electrochemical stability and chromic stability during the electrochromic cycle, and their transparencies and electrochromic response speeds are also significantly enhanced. Additionally, by increasing the concentration of oxygen vacancies through plasma treatment, the band gap of the film decreases and the electrical conductivity increases, which further validates the effectiveness of modulating concentration of oxygen vacancies on the electrical conductivity of WO₃ film. Overall, these results indicate that plasma treatment is an emerging method of significantly improving the electrochromic properties of WO₃ films.

Keywords:

Authors and contacts

1.
State Key Laboratory of Electrical Insulation and Power Equipment, Xi’an Jiaotong University, Xi’an 710049, China
2.
Electric Power Research Institute, Yunnan Power Gird Co., Ltd., Kunming 650217, China
3.
College of Automation and Electronic Engineering, Qingdao University of Science and Technology, Qingdao 266000, China
4.
Frontier Institute of Science and Technology, Xi’an Jiaotong University, Xi’an 710054, China

Corresponding author: LI Shengtao, zhuyuanwei@xjtu.edu.cn ; ZHU Yuanwei, sli@xjtu.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 52477028), the Open Research Fund of State Key Laboratory of Polymer Physics and Chemistry, China (Grant No. PPCL2023-13), the Youth Fund of State Key Laboratory of Electrical Insulation and Power Equipment, China (Grant No. EIPE23407), and the Fundamental Research Funds for the Central Universities of Ministry of Education of China (Grant No. sxzy012023180).

FullText HTML

References

[1]	Thai L H, Thanh N, Le T, Hiep N M, Khan D T, Dat T N, Truong S, Le V T, Truong T Q, Sinh L H 2024 Sol. Energy Mater Sol. Cells 278 113179 Google Scholar
[2]	Invernale M A, Ding Y J, Sotzing G A 2010 ACS Appl. Mater. Interfaces 2 296 Google Scholar
[3]	Liu L, Wang T, He Z B, Yi Y, Wang M Y, Luo Z H, Liu Q R, Huang J L, Zhong X L, Du K, Diao, X G 2021 Chem. Eng. J. 414 128892 Google Scholar
[4]	Zhang D S, Wang J X, Tong Z F, Ji H B , Qu H Y 2021 Adv. Funct. Mater. 31 2106577 Google Scholar
[5]	邵光伟, 于瑞, 傅婷, 陈南梁, 刘向阳 2022 71 028201 Google Scholar Shao G W, Yu R, Fu T, Chen N L, Liu X Y 2022 Acta Phys. Sin. 71 028201 Google Scholar
[6]	方成, 汪洪, 施思齐 2016 65 168201 Google Scholar Fang C, Wang H, Shi S Q 2016 Acta Phys. Sin. 65 168201 Google Scholar
[7]	Shi, Y D, Sun M J, Zhang Y, Cui J W, Shu X, Wang Y, Qin Y Q, Liu J Q, Tan H H , Wu Y C 2020 ACS Appl. Mater. Interfaces 12 32658 Google Scholar
[8]	Wang X Q, Yang Y, Jin Q Y, Lou Q C, Hu Q Z, Xie Z L, Song W J 2023 Adv. Funct. Mater. 33 2214417 Google Scholar
[9]	Zheng Y F, Fu K X, Yu Z H, Su Y, Han R, Liu Q L 2023 J. Mater. Chem. A 10 14171 Google Scholar
[10]	Shi Y D, Sun M J, Zhang Y, Cui J W, Wang Y, Shu X, Qin Y, Tan H H, Liu J Q, Wu Y C 2020 Sol. Energy Mater. Sol. Cells 212 110579 Google Scholar
[11]	Yu H, Guo J J, Wang C, Zhang J Y, Liu J, Dong G B, Zhong X L, Diao X G 2020 Electrochim. Acta 332 135504 Google Scholar
[12]	Li Z X, Liu Z F, Li J W, Yan W G 2022 Colloids Surf. , A 641 128615 Google Scholar
[13]	Qiao N, Wei P, Xing Y F, Qin X S, Wang X, Li X, Bu L J, Lu G H, Zhu Y W 2022 Adv. Mater. Interfaces 9 2200713 Google Scholar
[14]	Qiu Y M, Wei P, Wang Z H, Lu W L, Jiang Y H, Zhang C F, Qu Y Q, LuG H 2018 Phys. Status Solidi RRL 12 1800297 Google Scholar
[15]	Xing Y F, Qiao N, Yu J D, Zhang M, Dai J P, Niu T T, Wang Y H, Zhu Y W, Bu L J, LuG H 2022 Rev. Sci. Instrum. 93 073903 Google Scholar
[16]	陈锦峰, 朱林繁 2024 73 095201 Google Scholar Chen J F, Zhu L F 2024 Acta Phys. Sin. 73 095201 Google Scholar
[17]	Shen Z C, Jiang Y H, Yu J D, Zhu Y W, Bu L J, LuG H 2020 Adv. Mater. Interfaces 8 2101476 Google Scholar
[18]	Huang Y J, Li M, Pan F, Zhu Z Y, Sun H M, Tang Y W, Fu G T 2023 Carbon Energy 5 e279 Google Scholar
[19]	Zhang G B, Xiong T F, Yan M Y, He L, Liao X B, He C Q, Yin C S, Zhang H N, Mai L Q 2018 Nano Energy 49 555 Google Scholar
[20]	姜国平, 汪正兵, 闫永潘 2017 66 086801 Google Scholar Jiang P G, Wang Z B, Yan Y P 2017 Acta Phys. Sin. 66 086801 Google Scholar
[21]	Zhu Y W, Qiao N, Dong S Q, Qu G, Chen Y, Lu W L, Qin Z Z, Li D F, Wu K N, Nie Y J, Li S T, Lu G H 2022 Chem. Mater. 34 6505 Google Scholar
[22]	杨光敏, 徐强, 李冰, 张汉壮, 贺小光 2015 64 127301 Google Scholar Yang G M, Xu Q, Li B, Zhang H Z, He X G 2015 Acta Phys. Sin. 64 127301 Google Scholar
[23]	薛丽, 任一鸣 2016 65 156301 Google Scholar Xue L, Ren Y M 2016 Acta Phys. Sin. 65 156301 Google Scholar
[24]	Stampfl C, Van de Walle C 1999 Phys. Rev. B 59 5521 Google Scholar
[25]	Arvizu M A, Qu H Y, Cindemir U, Qiu Z, Rojas-González E A, Primetzhofer D, Granqvis, C G, Österlund L, Niklasson G A 2019 J. Mater. Chem. A 7 2908 Google Scholar
[26]	Khong Y J, Niang K M, Han S, Coburn N J, Wyatt-Moon G, Flewitt A J 2021 Adv. Mater. Interfaces 8 210049 Google Scholar
[27]	Lee S H, Cheong M H, Han S, Tracy C E, Mascarenhas A, Czanderna A W, Deb S K 1999 Appl. Phys. Lett. 75 1541 Google Scholar

Cited By

图 1 (a)WO₃和(b)缺氧WO₃的晶胞结构

Figure 1. Cell structures of (a) WO₃ and (b) anoxic WO₃.

DownLoad: Full-Size Img PowerPoint

图 2 (a) WO₃和(b)缺氧WO₃的能带结构以及(c)总态密度

Figure 2. Band structure of (a) WO₃ and (b) anoxic WO₃ and (c) total state density.

DownLoad: Full-Size Img PowerPoint

图 3 等离子体改性装置系统示意图

Figure 3. System diagram of plasma modification device.

DownLoad: Full-Size Img PowerPoint

图 4 (a)不同处理前后的WO₃薄膜XRD测试结果; (b)不同等离子体处理时长前后的WO₃薄膜XRD测试结果

Figure 4. (a) XRD results of WO₃ films before and after different treatments; (b) XRD results of WO₃ films before and after different plasma treatment times.

DownLoad: Full-Size Img PowerPoint

图 5 不同处理前后的WO₃薄膜拉曼光谱测试结果

Figure 5. Raman spectrum test results of WO₃ films before and after different treatments.

DownLoad: Full-Size Img PowerPoint

图 6 不同处理前后的SEM图像

Figure 6. SEM images before and after different processing.

DownLoad: Full-Size Img PowerPoint

图 7 不同处理前后 (a) W 4f和(b) O 1s高分辨率XPS光谱; (c)不同处理前后W 4f高分辨率XPS光谱的拟合分峰结果

Figure 7. (a) W 4f and (b) O 1s high-resolution XPS spectra before and after different treatments; (c) fitting peak-splitting results of W 4f high-resolution XPS spectra before and after different treatments.

DownLoad: Full-Size Img PowerPoint

图 8 不同处理前后的WO₃薄膜　(a) XPS和表面EDS 原子比; (b) 薄膜深度方向原子比

Figure 8. WO₃ films before and after different treatment: (a) XPS and surface EDS atomic ratio; (b) film depth direction atomic ratio.

DownLoad: Full-Size Img PowerPoint

图 9 等离子体处理前后的WO₃薄膜的(a)透过率光谱和(b)带隙能量图

Figure 9. (a) Transmittance spectrum and (b) bandgap energy diagram of WO₃ thin films before and after plasma treatment.

DownLoad: Full-Size Img PowerPoint

图 10 (a)原始状态、(b)退火处理后和(c)等离子体处理后WO₃薄膜不同电位范围的CV测试和注入和抽出电荷数量

Figure 10. CV tests and charge quantities inserted and extracted for (a) initial preparation, (b) after annealing and (c) after plasma treatment of WO₃ films at different potential ranges.

DownLoad: Full-Size Img PowerPoint

图 11 (a)原始状态、(b)退火处理后和(c)等离子体处理后WO₃薄膜的CV测试和实时光谱透过率以及施加不同电压后的薄膜照片; (d)原始状态、(e)退火处理后和(f)等离子体处理后WO₃薄膜在–1.0和+2.0 V电势下30s的电流密度变化(黑色曲线)、透光率变化(红色曲线)以及在有色和漂白状态之间的切换时间特性

Figure 11. CV test and real-time spectral transmittance of WO₃ films at (a) initial preparation, (b) annealing and (c) plasma treatment, and photographs of films at different voltages; (d) changes in current density (black curve), transmittance (red curve) and switching time between colored and bleached WO₃ films at –1.0 V and + 2.0 V potentials for 30s after initial preparation, (e) annealing and (f) plasma treatment.

DownLoad: Full-Size Img PowerPoint

图 12 (a)原始状态、(b)退火处理后和(c)等离子体处理后WO₃薄膜的长时CV测试; (d)原始状态、(e)退火处理后和(f)等离子体处理后WO₃薄膜的长时透过率测试

Figure 12. Long-term CV tests of WO₃ films (a) in their original state, (b) after annealing and (c) after plasma treatment; long term transmittance tests of WO₃ films (d) in their original state, (e) after annealing, and (f) after plasma treatment.

DownLoad: Full-Size Img PowerPoint

表 1 不同处理工艺方案的四探针电导率测试结果

Table 1. Results of four-probe conductivity tests for various treatment schemes.

样品处理方式	电导率/(10^–3 S·m^–1)
原始状态	8.27
退火处理	25.30
等离子体处理	10.80

DownLoad: CSV

表 2 不同等离子体处理工艺方案设计及测试结果

Table 2. Design and test results of different plasma treatment processes.

等离子体放电功率/W	改性时间/min	O/W原子比	光学透过率/%
5	10	2.86	84.5
10	20	2.75	81.1
20	30	2.58	74.2
5	20	2.83	82.8
10	30	2.71	78.4
20	10	2.68	79.7
5	30	2.80	80.6
10	10	2.79	83.2
20	20	2.63	76.3

DownLoad: CSV

map

[1]	Thai L H, Thanh N, Le T, Hiep N M, Khan D T, Dat T N, Truong S, Le V T, Truong T Q, Sinh L H 2024 Sol. Energy Mater Sol. Cells 278 113179 Google Scholar
[2]	Invernale M A, Ding Y J, Sotzing G A 2010 ACS Appl. Mater. Interfaces 2 296 Google Scholar
[3]	Liu L, Wang T, He Z B, Yi Y, Wang M Y, Luo Z H, Liu Q R, Huang J L, Zhong X L, Du K, Diao, X G 2021 Chem. Eng. J. 414 128892 Google Scholar
[4]	Zhang D S, Wang J X, Tong Z F, Ji H B , Qu H Y 2021 Adv. Funct. Mater. 31 2106577 Google Scholar
[5]	邵光伟, 于瑞, 傅婷, 陈南梁, 刘向阳 2022 71 028201 Google Scholar Shao G W, Yu R, Fu T, Chen N L, Liu X Y 2022 Acta Phys. Sin. 71 028201 Google Scholar
[6]	方成, 汪洪, 施思齐 2016 65 168201 Google Scholar Fang C, Wang H, Shi S Q 2016 Acta Phys. Sin. 65 168201 Google Scholar
[7]	Shi, Y D, Sun M J, Zhang Y, Cui J W, Shu X, Wang Y, Qin Y Q, Liu J Q, Tan H H , Wu Y C 2020 ACS Appl. Mater. Interfaces 12 32658 Google Scholar
[8]	Wang X Q, Yang Y, Jin Q Y, Lou Q C, Hu Q Z, Xie Z L, Song W J 2023 Adv. Funct. Mater. 33 2214417 Google Scholar
[9]	Zheng Y F, Fu K X, Yu Z H, Su Y, Han R, Liu Q L 2023 J. Mater. Chem. A 10 14171 Google Scholar
[10]	Shi Y D, Sun M J, Zhang Y, Cui J W, Wang Y, Shu X, Qin Y, Tan H H, Liu J Q, Wu Y C 2020 Sol. Energy Mater. Sol. Cells 212 110579 Google Scholar
[11]	Yu H, Guo J J, Wang C, Zhang J Y, Liu J, Dong G B, Zhong X L, Diao X G 2020 Electrochim. Acta 332 135504 Google Scholar
[12]	Li Z X, Liu Z F, Li J W, Yan W G 2022 Colloids Surf. , A 641 128615 Google Scholar
[13]	Qiao N, Wei P, Xing Y F, Qin X S, Wang X, Li X, Bu L J, Lu G H, Zhu Y W 2022 Adv. Mater. Interfaces 9 2200713 Google Scholar
[14]	Qiu Y M, Wei P, Wang Z H, Lu W L, Jiang Y H, Zhang C F, Qu Y Q, LuG H 2018 Phys. Status Solidi RRL 12 1800297 Google Scholar
[15]	Xing Y F, Qiao N, Yu J D, Zhang M, Dai J P, Niu T T, Wang Y H, Zhu Y W, Bu L J, LuG H 2022 Rev. Sci. Instrum. 93 073903 Google Scholar
[16]	陈锦峰, 朱林繁 2024 73 095201 Google Scholar Chen J F, Zhu L F 2024 Acta Phys. Sin. 73 095201 Google Scholar
[17]	Shen Z C, Jiang Y H, Yu J D, Zhu Y W, Bu L J, LuG H 2020 Adv. Mater. Interfaces 8 2101476 Google Scholar
[18]	Huang Y J, Li M, Pan F, Zhu Z Y, Sun H M, Tang Y W, Fu G T 2023 Carbon Energy 5 e279 Google Scholar
[19]	Zhang G B, Xiong T F, Yan M Y, He L, Liao X B, He C Q, Yin C S, Zhang H N, Mai L Q 2018 Nano Energy 49 555 Google Scholar
[20]	姜国平, 汪正兵, 闫永潘 2017 66 086801 Google Scholar Jiang P G, Wang Z B, Yan Y P 2017 Acta Phys. Sin. 66 086801 Google Scholar
[21]	Zhu Y W, Qiao N, Dong S Q, Qu G, Chen Y, Lu W L, Qin Z Z, Li D F, Wu K N, Nie Y J, Li S T, Lu G H 2022 Chem. Mater. 34 6505 Google Scholar
[22]	杨光敏, 徐强, 李冰, 张汉壮, 贺小光 2015 64 127301 Google Scholar Yang G M, Xu Q, Li B, Zhang H Z, He X G 2015 Acta Phys. Sin. 64 127301 Google Scholar
[23]	薛丽, 任一鸣 2016 65 156301 Google Scholar Xue L, Ren Y M 2016 Acta Phys. Sin. 65 156301 Google Scholar
[24]	Stampfl C, Van de Walle C 1999 Phys. Rev. B 59 5521 Google Scholar
[25]	Arvizu M A, Qu H Y, Cindemir U, Qiu Z, Rojas-González E A, Primetzhofer D, Granqvis, C G, Österlund L, Niklasson G A 2019 J. Mater. Chem. A 7 2908 Google Scholar
[26]	Khong Y J, Niang K M, Han S, Coburn N J, Wyatt-Moon G, Flewitt A J 2021 Adv. Mater. Interfaces 8 210049 Google Scholar
[27]	Lee S H, Cheong M H, Han S, Tracy C E, Mascarenhas A, Czanderna A W, Deb S K 1999 Appl. Phys. Lett. 75 1541 Google Scholar

[1]	Wang Yu-Xiao, Cheng Ze-Shuai, Jiang Ke-Yang, Wei Lin-Yang, Li Xiu-Ming. Performance of adjustable multilayer film based on radiation cooling and electrochromism. Acta Physica Sinica, 2024, 73(21): 214401. doi: 10.7498/aps.73.20240863
[2]	Zhang Mao-Lin, Ma Wan-Yu, Wang Lei, Liu Zeng, Yang Li-Li, Li Shan, Tang Wei-Hua, Guo Yu-Feng. Investigation of high-temperature performance of WO₃/β-Ga₂O₃ heterojunction deep-ultraviolet photodetectors. Acta Physica Sinica, 2023, 72(16): 160201. doi: 10.7498/aps.72.20230638
[3]	Zhang Xing-Wen, He Chao-Tao, Li Xiu-Lin, Qiu Xiao-Yan, Zhang Yun, Chen Peng. Resistance switching effect regulated by magnetic field in Ni/ZnO/BiFeO₃/ZnO multilayers. Acta Physica Sinica, 2022, 71(18): 187303. doi: 10.7498/aps.71.20220609
[4]	Shao Guang-Wei, Yu Rui, Fu Ting, Chen Nan-Liang, Liu Xiang-Yang. Growth behavior of WO₃crystal topological structure and its electrochromic properties. Acta Physica Sinica, 2022, 71(2): 028201. doi: 10.7498/aps.71.20211555
[5]	Wang Zhi-Qing, Yao Xiao-Ping, Shen Jie, Zhou Jing, Chen Wen, Wu Zhi. Micromechanism of ferroelectric fatigue and enhancement of fatigue resistance of lead zirconate titanate thin films. Acta Physica Sinica, 2021, 70(14): 146302. doi: 10.7498/aps.70.20202196
[6]	Tang Hui, Tang Xin-Gui, Jiang Yan-Ping, Liu Qiu-Xiang, Li Wen-Hua. Oxygen vacancy effect on ionic conductivity and relaxation phenomenon of Sr_xBa_1–xNb₂O₆ ceramics. Acta Physica Sinica, 2019, 68(22): 227701. doi: 10.7498/aps.68.20190562
[7]	Chen Ya-Qi, Xu Hua-Kai, Tang Dong-Sheng, Yu Fang, Lei Le, Ouyang Gang. Electrical transport properties and related mechanism of single SnO₂ nanowire device. Acta Physica Sinica, 2018, 67(24): 246801. doi: 10.7498/aps.67.20181402
[8]	Fang Cheng, Wang Hong, Shi Si-Qi. Research progress of electrochromic performances of WO3. Acta Physica Sinica, 2016, 65(16): 168201. doi: 10.7498/aps.65.168201
[9]	Gong Yu, Chen Bai-Hua, Xiong Liang-Ping, Gu Mei, Xiong Jie, Gao Xiao-Ling, Luo Yang-Ming, Hu Sheng, Wang Yu-Hua. Effect of oxygen vacancies on the fluorescence and phosphorescence properties of Ca5MgSi3O12：Eu2+, Dy3+. Acta Physica Sinica, 2013, 62(15): 153201. doi: 10.7498/aps.62.153201
[10]	Yang Chang-Ping, Li Min-Yi, Song Xue-Ping, Xiao Hai-Bo, Xu Ling-Fang. Effect of oxygen content on giant dielectric constant and dielectric process in CaCu3Ti4O12. Acta Physica Sinica, 2012, 61(19): 197702. doi: 10.7498/aps.61.197702
[11]	Ouyang Jian-Ming, Shao Fu-Qiu, Zou De-Bin. Numerical simulation of negative oxygen ion generation and temporal evolution in atmospheric plasma. Acta Physica Sinica, 2011, 60(11): 110209. doi: 10.7498/aps.60.110209
[12]	Du Hong-Liang, He Li-Ming, Lan Yu-Dan, Wang Feng. Influence of reduced electric field on the evolvement characteristics of plasma under conditions of N2/O2 discharge. Acta Physica Sinica, 2011, 60(11): 115201. doi: 10.7498/aps.60.115201
[13]	Yu Song-Nan, Wu Han-Hua, Chen Gen-Yu, Yuan Xin, Li Yue. Effect of Al(OH)3 sol concentration on characteristics of microarc oxidation coatings of titanium alloy. Acta Physica Sinica, 2011, 60(2): 028104. doi: 10.7498/aps.60.028104
[14]	Liu Yan-Yan, Liu Fa-Min, Shi Xia, Ding Peng, Zhou Chuan-Cang. Preparation, structure and ferromagnetic properties of perovskite BaFeO3 nanocrystals. Acta Physica Sinica, 2008, 57(11): 7274-7278. doi: 10.7498/aps.57.7274
[15]	Zhao Su-Chuan, Li Guo-Rong, Zhang Li-Na, Wang Tian-Bao, Ding Ai-Li. Dielectric properties of Na0.25K0.25Bi0.5TiO3 lead-free ceramics. Acta Physica Sinica, 2006, 55(7): 3711-3715. doi: 10.7498/aps.55.3711
[16]	Li Bao-Shan, Zhu Zhi-Gang, Li Guo-Rong, Yin Qing-Rui, Ding Ai-Li. Frequency and temperature dependence of the hysteresis loop in PMnN-PZT ceramics. Acta Physica Sinica, 2005, 54(2): 939-943. doi: 10.7498/aps.54.939
[17]	Tang Chang-Jian, Gong Yu-Bin, Yang Yu-Zhi. Dielectric tensor of 2D relativistic motional plasma. Acta Physica Sinica, 2004, 53(4): 1145-1149. doi: 10.7498/aps.53.1145
[18]	Yang Xin-Sheng, Wang Yu, Dong Liang, Zhang Feng, Qi Li-Zhen. Electrochromic effect of nanostructured WO3 bulk. Acta Physica Sinica, 2004, 53(8): 2724-2727. doi: 10.7498/aps.53.2724
[19]	Dai Fu-Ping, Lü Shu-Yuan, Feng Bo-Xue, Jiang Sheng-Rui, Chen Chong. Study on electrochromic performances of amorphous WO3 films. Acta Physica Sinica, 2003, 52(4): 1003-1008. doi: 10.7498/aps.52.1003
[20]	FENG BO-XUE, XIE LIANG, WANG JUN, JIANG SHENG-RUI, CHEN GUANG-HUA. STUDY ON ELECTROCHROMIC PERFORMANCES AND MECHANISM OF MICROCRYSTAL NiOxHy THIN FILMS FABRICATED BY R.F.DEPOSITION. Acta Physica Sinica, 2000, 49(10): 2066-2071. doi: 10.7498/aps.49.2066

Catalog

Vol. 74, Issue 5 - 2025-03-05

Metrics

Abstract views: 880
PDF Downloads: 28
Cited By: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

Search

Article

留言板