Research progress of quartz-enhanced photoacoustic spectroscopy based gas sensing

Ma Yu-Fei

doi:10.7498/aps.70.20210685

Abstract

Laser spectroscopy based techniques have the advantages of high sensitivities, high selectivities, non-invasiveness and in situ, real-time observations. They are widely used in numerous fields, such as environmental monitoring, life science, medical diagnostics, manned space flight, and planetary exploration. Owing to the merits of low cost, compact volume and strong environment adaptability, quartz-enhanced photoacoustic spectroscopy (QEPAS) based sensing is an important laser spectroscopy-based method of detecting the trace gas, which was invented in 2002. Detection sensitivity is a key parameter for gas sensors because it determines their real applications. In this paper, focusing on the detection sensitivity, the common methods for QEPAS are summarized. High power laser including amplified diode laser by erbium doped fiber amplifier (EDFA), and quantum cascade laser are used to improve the excitation intensity of acoustic wave. The absorption line of gas molecules located at the fundamental bands of mid-infrared region is adopted to increase the laser absorption strength. Micro-resonator is employed to enhance the generated acoustic pressure by forming a standing wave cavity. Quartz tuning forks (QTFs) with low resonant frequency are used to increase the accumulation time of acoustic energy in itself. Multi-pass strategy is utilized to amplify the action length between laser beam and target gas in the prongs of QTF. The advantages and disadvantages of the above methods are discussed respectively. For the issues in real applications, the all-fiber strucure in near-infared region and mid-infrared region and miniaturization using three-dimensional(3D) printing technique for QEPAS sensor are summarized. A QEPAS technique based multi-gas sensor is used to quantify the concentration of carbon monoxide (CO), carbon dioxide (CO₂), hydrogen cyanide (HCN), and hydrogen chloride (HCl) for post-fire cleanup aboard spacecraft, which is taken for example for the real application.Finally, the methods of further improving the sensitivity of QEPAS sensor are proposed.

Keywords:

trace gas detection /
quartz tuning fork /
detection sensitivity /
quartz-enhanced photoacoustic spectroscopy

Authors and contacts

Ma Yu-Fei

National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China

Corresponding author: Ma Yu-Fei, mayufei@hit.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 62022032, 61875047, 61505041), the Outstanding Youth Scientsit Fund of the Natural Science Foundation of Heilongjiang Province of China (Grant No. YQ2019F006), the Scientific Rearch Starting Funds for the Postdoctoral of Heilongjiang Province, China (Grant No. LBH-Q18052), the Fundamental Research Funds for the Central Universities

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References

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Cited By

图 1 QEPAS传感示意图　(a) QEPAS技术原理; (b) 声波产生及探测

Figure 1. Schematic diagram of QEPAS sensing: (a) Principle of QEPAS; (b) generation and detection of acoustics wave.

DownLoad: Full-Size Img PowerPoint

图 2 石英音叉弯曲振动模式　(a) 音叉模型; (b) 面外基频模态; (c) 面内基频模态; (d) 面内第一泛频模态

Figure 2. Flexural mode of quartz tuning fork: (a) Mode of quartz tuning fork; (b) out-of-plane fundamental mode; (c) in-plane fundamental mode; (d) in-plane 1^st overtone mode

DownLoad: Full-Size Img PowerPoint

图 3 EDFA光放大　(a) 种子光发射谱; (b) 放大后的发射谱^[38]

Figure 3. Laser amplification by EDFA: (a) Emission spectrum for seed diode laser; (b) emission spectrum for amplified diode laser. Reproduced from Ref. [38], with the permission of AIP Publishing.

DownLoad: Full-Size Img PowerPoint

图 4 内腔增强型QEPAS传感系统^[59]

Figure 4. Intracavity enhanced QEPAS sensor system. Reproduced from Ref. [59], with the permission of AIP Publishing.

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图 5 基于THz激光源的QEPAS传感系统^[45]

Figure 5. QEPAS sensing system based on THz laser. Reproduced from Ref. [45], with the permission of AIP Publishing.

DownLoad: Full-Size Img PowerPoint

图 6 微共振腔对石英音叉QTF的增强效果示意图

Figure 6. The configuration of micro-resonator and the enhanced effect of acoustic pressure.

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图 7 微共振腔结构　(a) “共轴”式; (b) “离轴”式; (c) 单管“共轴”式; (d) 嵌入“离轴”式

Figure 7. The configuration of micro-resonator: (a) On-beam; (b) off-beam; (c) single-tube on-beam; (d) embedded off-beam.

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图 8 (a) 不同模式下石英音叉的最佳激发位置; (b) 基频振动模态; (c) 第一泛频振动模态; (d) 基频与第一泛频的复合振动模态^[62]

Figure 8. (a) Optimal excitation position for different modes of quartz tuning fork; (b) fundamental mode; (c) 1^st overtone mode; (d) combined mode. Reproduced from Ref. [62], with the permission of AIP Publishing.

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图 9 双波腹激发下的QEPAS传感器^[56]

Figure 9. Double antinode excited QEPAS sensor. Reproduced from Ref. [56], with the permission of AIP Publishing.

DownLoad: Full-Size Img PowerPoint

图 10 基于多光程吸收的QEPAS传感器^[57]

Figure 10. Multi-pass based QEPAS sensor. Reprinted with permission from Ref. [57] © The Optical Society.

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图 11 面内激光入射的QEPAS传感器^[58]

Figure 11. In-plane QEPAS sensor. Reproduced from Ref. [58], with the permission of AIP Publishing.

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图 12 基于倏逝场激发的准分布式全光纤QEPAS传感器^[66]

Figure 12. Quasi-distributed gas sensing based on fiber evanescent wave QEPAS sensor. Reproduced from Ref. [66], with the permission of AIP Publishing.

DownLoad: Full-Size Img PowerPoint

图 13 基于机械加工方式所得到的光学及声波探测部分^[69]

Figure 13. Optical and acoustic detection parts for QEPAS sensor based on mechanical processing^[69].

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图 14 基于3D打印方式所得到的光学及声波探测部分^[70]

Figure 14. Optical and acoustic detection parts for QEPAS sensor based on 3D printing. Reprinted with permission from Ref. [70] © The Optical Society.

DownLoad: Full-Size Img PowerPoint

图 15 多通道QEPAS传感器^[71]

Figure 15. Multi-channel QEPAS sensor^[71].

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map

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[4]	Milde T, Hoppe M, Tatenguem H, Mordmüller M, Ogorman J, Willer U, Schade W, Sacher J 2018 Appl. Opt. 57 C120 Google Scholar
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[17]	Ma Y F, Yu G, Zhang J B, Yu X, Sun R, Tittel F K 2015 Sensors 15 7596 Google Scholar
[18]	Rousseau R, Loghmari Z, Bahriz M, Chamassi K, Teissier R, Baranov A N, Vicet A 2019 Opt. Express 27 7435 Google Scholar
[19]	Ma Y F, Yu X, Yu G, Li X D, Zhang J B, Chen D Y, Sun R, Tittel F K 2015 Appl. Phys. Lett. 107 021106 Google Scholar
[20]	Lassen M, Lamard L, Feng Y, Peremans A, Petersen J C 2016 Opt. Lett. 41 4118 Google Scholar
[21]	Ma Y F 2018 Appl. Sci. 8 1822 Google Scholar
[22]	Petra, N, Zweck J, Kosterev A A, Minkoff S E, Thomazy D 2009 Appl. Phys. B 94 673 Google Scholar
[23]	He Y, Ma Y F, Tong Y, Yu X, Tittel F K 2019 Opt. Lett. 44 1904 Google Scholar
[24]	Giessibl F J 1998 Appl. Phys. Lett. 73 3956 Google Scholar
[25]	Barbic M, Eliason L, Ranshaw J 2007 Sens. Actuators, A 136 564 Google Scholar
[26]	Babic B, Hsu M T L, Gray M B, Lu M Z, Herrmann J 2015 Sens. Actuators, A 223 167 Google Scholar
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[28]	Zhang M, Chen D H, He X, Wang X M 2020 Sensors 20 198
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[31]	Patimisco P, Borri S, Sampaolo A, Beere H E, Ritchie D A, Vitiello M S, Scamarcio G, Spagnolo V 2014 Analyst 139 2079 Google Scholar
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[33]	Patimisco P, Sampaolo A, Dong L, Giglio M, Scamarcio G, Tittel F K, Spagnolo V 2016 Sens. Actuators, B 227 539 Google Scholar
[34]	Kosterev A A, Tittel F K, Serebryakov D V, Malinovsky A L, Morozov I V 2005 Rev. Sci. Instrum. 76 043105 Google Scholar
[35]	Li Y, Wang R Z, Tittel F K, Ma Y F 2020 Opt. Lasers Eng. 132 106155 Google Scholar
[36]	Ma Y F, Lewicki R, Razeghi M, Tittel F K 2013 Opt. Express 21 1008 Google Scholar
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[38]	Ma Y F, He Y, Zhang L G, Yu X, Zhang J B, Sun R, Tittel F K 2017 Appl. Phys. Lett. 107 031107
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[41]	He Y, Ma Y F, Tong Y, Yu X, Tittel F K 2018 Opt. Express 26 9666 Google Scholar
[42]	Yi H M, Maamary R, Gao X M, Sigrist M W, Fertein E, Chen W D 2015 Appl. Phys. Lett. 106 101109 Google Scholar
[43]	Waclawek J P, Moser H, Lendl B 2016 Opt. Express 24 6559 Google Scholar
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Vol. 70, Issue 16 - 2021-08-20

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