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实验中设计了一种基于微型非共振腔的石英增强光声光谱痕量气体传感器, 用来检测非纯氦气中的痕量氨气浓度. 该传感器采用的微型非共振腔只在空间上限制声波扩散以达到增强信号目的, 而不是像传统微型共振腔一样依靠共振效应. 如此的设计使探测小分子无机气体的光谱测声器尺寸远远小于共振腔的配置而有利于准直. 不同气压下的信号和噪声也被研究, 用来优化传感器性能. 在这种配置下和27.7 kPa的最优气压下, 获得的最佳氨气探测灵敏度为463 ppb (1 , 1 s积分时间), 相应的归一化噪声等效吸收系数为4.310-9cm-1W/Hz.A trace gas sensor, based on quartz-enhanced photoacoustic spectroscopy (QEPAS) with two non-resonant micro-tubes, was designed to detect the ammonia concentration in impure helium. Unlike the traditional micro-resonator, the non-resonant micro-tubes are used to confine the sound wave, but do not exhibit a well-defined resonant behavior. Such a design makes the dimension of the spectrophone much smaller than the micro-resonant configuration, which facilitates the optical alignment. Signal and noise, that were dependent on gas pressure, were also investigated to optimize sensor performance. With the optimal sensor parameters and the optimal gas pressure, the detection sensitivity was found to be 463 ppb (1 , 1 s averaging time), which corresponds to the normalized absorption sensitivity of 4.310-9cm-1W/Hz.
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Keywords:
- gas sensor /
- quartz-enhanced photoacoustic spectroscopy /
- quartz tuning fork /
- purity analysis of hydrogen-like gas
[1] Li Z Y, Wang H H, Jiang N, Cheng S L, Zhao L, Yu X 2009 Acta Phys.Sin. 58 3821 (in Chinese) [李政颖, 王洪海, 姜宁, 程松林, 赵磊, 余鑫 2009 58 3821]
[2] Liu Z M, Liu W Q, Gao M G, Tong J J, Zhang T S, Xu L, Wei X L 2008 Chin. Phys. B 17 4184
[3] Kosterev A A, Tittel F K, Serebryakov D V, Malinovsky A L, Morozov I V 2005 Rev. Sci. Instrum. 76 043105
[4] Kosterev A A, Bakhirkin Y A, Curl R F, Tittel F K 2002 Opt. Lett. 27 1902
[5] Dong L, Kosterev A A, Thomazy D, Tittel F K 2010 Appl. Phys. B 100 627
[6] Liu K, Guo X, Yi H, Chen W, Zhang W, Gao X 2009 Opt. Lett. 34 1594
[7] Yi H, Liu K, Chen W, Tan T, Wang L, Gao X 2011 Opt. Lett. 36 481
[8] Petra N, Zweck J, Kosterev A A, Minkoff S E, Thomazy D 2009 Appl. Phy. B 94 73
[9] Wang G S, Yi H M, Cai T D, Wang L, Tan T, Zhang W J, Gao X M 2012 Acta Phys. Sin. 61 120701 (in Chinese) [王贵师, 易红明, 蔡廷栋, 汪磊, 谈图, 张为俊, 高晓明 2012 61 120701]
[10] Serebryakov D V, Morozov L V, Kosterev A A, Letokhov V S 2010 Quantum Electron 40 167
[11] Engeln R, Berden G, Peeters R, Meijer G 1998 Rev. Sci. Instrum. 69 3763
[12] Jia H, Zhao W X, Cai T D , Chen W D, Zhang W J, Gao X M 2009 ELSEVIER 110 347
[13] Webber M E, Pushkarsky M , Patel C K N 2003 Appl. Opt. 42 2119
[14] Dong L, Zhang L, Dou H P, Ying W B, Jia S T 2008 Chin. Phys. B 17 152
[15] Tittel F K, Kosterev A A 2004 Appl. Opt. 43 6213
[16] Kosterev A A, Bakhirkin Y A, Tittel F K, Mcwhorter S, Ashcraft B 2008 Appl. Phys. B Lasers and Optics 92 103
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[1] Li Z Y, Wang H H, Jiang N, Cheng S L, Zhao L, Yu X 2009 Acta Phys.Sin. 58 3821 (in Chinese) [李政颖, 王洪海, 姜宁, 程松林, 赵磊, 余鑫 2009 58 3821]
[2] Liu Z M, Liu W Q, Gao M G, Tong J J, Zhang T S, Xu L, Wei X L 2008 Chin. Phys. B 17 4184
[3] Kosterev A A, Tittel F K, Serebryakov D V, Malinovsky A L, Morozov I V 2005 Rev. Sci. Instrum. 76 043105
[4] Kosterev A A, Bakhirkin Y A, Curl R F, Tittel F K 2002 Opt. Lett. 27 1902
[5] Dong L, Kosterev A A, Thomazy D, Tittel F K 2010 Appl. Phys. B 100 627
[6] Liu K, Guo X, Yi H, Chen W, Zhang W, Gao X 2009 Opt. Lett. 34 1594
[7] Yi H, Liu K, Chen W, Tan T, Wang L, Gao X 2011 Opt. Lett. 36 481
[8] Petra N, Zweck J, Kosterev A A, Minkoff S E, Thomazy D 2009 Appl. Phy. B 94 73
[9] Wang G S, Yi H M, Cai T D, Wang L, Tan T, Zhang W J, Gao X M 2012 Acta Phys. Sin. 61 120701 (in Chinese) [王贵师, 易红明, 蔡廷栋, 汪磊, 谈图, 张为俊, 高晓明 2012 61 120701]
[10] Serebryakov D V, Morozov L V, Kosterev A A, Letokhov V S 2010 Quantum Electron 40 167
[11] Engeln R, Berden G, Peeters R, Meijer G 1998 Rev. Sci. Instrum. 69 3763
[12] Jia H, Zhao W X, Cai T D , Chen W D, Zhang W J, Gao X M 2009 ELSEVIER 110 347
[13] Webber M E, Pushkarsky M , Patel C K N 2003 Appl. Opt. 42 2119
[14] Dong L, Zhang L, Dou H P, Ying W B, Jia S T 2008 Chin. Phys. B 17 152
[15] Tittel F K, Kosterev A A 2004 Appl. Opt. 43 6213
[16] Kosterev A A, Bakhirkin Y A, Tittel F K, Mcwhorter S, Ashcraft B 2008 Appl. Phys. B Lasers and Optics 92 103
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