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In this paper, a double epitaxial and high energy implant (DEI) is proposed to improve the performance of charge collection and radiation hardness. Three-dimensional process procedure and physical level simulation are presented. The results show that the internal distributions of electric potential and electric field are improved; the seed point pixel collected charge increases about 70% and reduces the collected time to 64%. In addition, the DEI structure increases the collecting efficiency in a radiation range from 1012 to 1015 cm-2as compared with the standard monolithic active pixel sensors.
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Keywords:
- monolithic active pixel sensors /
- detector /
- charge collection /
- high energy implant
[1] E R Fossum 1997 IEEE Trans. Electron. Dev. 44 1689
[2] E R Fossum 1993 Proc. SPIE 1900 2
[3] Wang B, Li Y D, Guo Q, Liu C J, Wen L, Ma L Y, Sun J, Wang H J, Cong Z C, Ma W Y 2014 Acta Phys. Sin. 63 056102 (in Chinese)[汪波, 李豫东, 郭旗, 刘昌举, 文林, 玛丽娅, 孙静, 王海娇, 丛忠超, 马武英 2014 63 056102]
[4] Turchetta R, Berst J D, Casadei B, Claus G, Colledani C, Dulinski W, Hu Y, Husson D, Le Normand J P, Riester J L, Deptuch G, Goerlach U, Higueret S, Winter M 2001 Nucl. Instrum. Meth. A 458 677
[5] Ma X Y, Guo Y M, Rao C H, Wei K, Tian Y, Rao X J 2012 Acta Phys. Sin. 61 242902 (in Chinese)[马晓燠, 郭友明, 饶长辉, 魏凯, 田雨, 饶学军 2012 61 242902]
[6] Ma X Y, Mu J, Rao C H 2012 Acta Phys. Sin. 61 072903 (in Chinese)[马晓燠, 郭友明, 饶长辉 2012 61 072903]
[7] Claus G, Colledani C, Deptuch G, Dulinski W, Gornushkin Y, Hu Y, Husson D, Orazi G, Turchetta R, Riester J L, Winter M 2001 Nucl. Instrum. Meth. A 473 83
[8] Noschis E, Eremin V, Ruggiero G 2007 Nucl. Instrum. Meth. A 574 420
[9] Dulinski W, Berst J D, Besson A, Claus G, Colledani C, Deptuch G, Deveaux M, Gay A, Grandjean D, Gornushkin Y, Himmi A, Hu C, Riester J L, Valin I, Winter M 2004 IEEE Trans. Nucl. Sci. 51 1613
[10] Deptuch G, Winter M, Dulinski W, Husson D, Turchetta R, Riester J L 2001 Nucl. Instrum. Meth. A 465 92
[11] Moses W W, Derenzo S E, Melcher C L, Manente R A 1995 IEEE Trans. Nucl. Sci. 42 1085
[12] Niraula M, Yasuda K, Agata Y, Nakamura A, Aoki T, Hatanaka Y 2003 IEEE Nucl. Sci. Symp. Conf. Rec. 5 3320
[13] Dorokhov A, Bertolone G, Baudot J, Brogna A S, Colledani C, Claus G, De Masi R, Deveaux M, Dozière G, Dulinski W, Fontaine J C, Goffe M, Himmi A, Hu-Guo Ch, Jaaskelainen K, Koziel M, Morel F, Santos C, Specht M, Valin I, Voutsinas G, Wagner F M, Winter M 2010 Nucl. Instrum. Meth. A 624 432
[14] Fu M, Tang Z 2011 Nucl. Instrum. Meth. A 646 153
[15] Parkera S I, Kenneya C J, Segalb J 1997 Nucl. Instrum. Meth. A 395 328
[16] Piemonte C, Boscardin M, Dalla Betta G F, Ronchin S, Zorzi N 2005 Nucl. Instrum. Meth. A 541 441
[17] Silvaco International 2012 Atlas3D User's Manual-Device Simulation Software
[18] Silvaco International 2012 Victory Process Cell User's Manual-Device Simulation Software
[19] Silvaco International 2012 Tonyplot3D User's Manual-Device Simulation Software
[20] Silvaco International 2012 Maskviews User's Manual-Device Simulation Software
[21] Claus G, Colledani C, Dulinski W, Husson D, Turchetta R, Riester J L, Deptuch G, Orazi G, Winter M 2001 Nucl. Instrum. Meth. A 465 120
[22] Deptuch G 2005 Nucl. Instrum. Meth. A 543 537
[23] Sadrozinski H F W, Betancourt C, Heffern R, Henderson I, Pixley J, Polyakov A, Wilder M, Boscardin M, Piemonte C, Pozza A, Zorzi N, Dalla Betta G F, Resta G, Bruzzi M, Macchiolo A, Borrello L, Messineo A, Creanza D, Manna N 2007 Nucl. Instrum. Meth. A 579 769
[24] Gao B, Yu X F, Ren D Y, Li Y D, Cui J W, Li M S, Li M, Wang Y Y 2011 Acta Phys. Sin. 60 036106 (in Chinese) [高博, 余学峰, 任迪远, 李豫东, 崔江维, 李茂顺, 李明, 王义元 2011 60 036106]
[25] Zheng Z S, Liu Z L, Yu F, Li N 2012 Chin. Phys. B 21 116104
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[1] E R Fossum 1997 IEEE Trans. Electron. Dev. 44 1689
[2] E R Fossum 1993 Proc. SPIE 1900 2
[3] Wang B, Li Y D, Guo Q, Liu C J, Wen L, Ma L Y, Sun J, Wang H J, Cong Z C, Ma W Y 2014 Acta Phys. Sin. 63 056102 (in Chinese)[汪波, 李豫东, 郭旗, 刘昌举, 文林, 玛丽娅, 孙静, 王海娇, 丛忠超, 马武英 2014 63 056102]
[4] Turchetta R, Berst J D, Casadei B, Claus G, Colledani C, Dulinski W, Hu Y, Husson D, Le Normand J P, Riester J L, Deptuch G, Goerlach U, Higueret S, Winter M 2001 Nucl. Instrum. Meth. A 458 677
[5] Ma X Y, Guo Y M, Rao C H, Wei K, Tian Y, Rao X J 2012 Acta Phys. Sin. 61 242902 (in Chinese)[马晓燠, 郭友明, 饶长辉, 魏凯, 田雨, 饶学军 2012 61 242902]
[6] Ma X Y, Mu J, Rao C H 2012 Acta Phys. Sin. 61 072903 (in Chinese)[马晓燠, 郭友明, 饶长辉 2012 61 072903]
[7] Claus G, Colledani C, Deptuch G, Dulinski W, Gornushkin Y, Hu Y, Husson D, Orazi G, Turchetta R, Riester J L, Winter M 2001 Nucl. Instrum. Meth. A 473 83
[8] Noschis E, Eremin V, Ruggiero G 2007 Nucl. Instrum. Meth. A 574 420
[9] Dulinski W, Berst J D, Besson A, Claus G, Colledani C, Deptuch G, Deveaux M, Gay A, Grandjean D, Gornushkin Y, Himmi A, Hu C, Riester J L, Valin I, Winter M 2004 IEEE Trans. Nucl. Sci. 51 1613
[10] Deptuch G, Winter M, Dulinski W, Husson D, Turchetta R, Riester J L 2001 Nucl. Instrum. Meth. A 465 92
[11] Moses W W, Derenzo S E, Melcher C L, Manente R A 1995 IEEE Trans. Nucl. Sci. 42 1085
[12] Niraula M, Yasuda K, Agata Y, Nakamura A, Aoki T, Hatanaka Y 2003 IEEE Nucl. Sci. Symp. Conf. Rec. 5 3320
[13] Dorokhov A, Bertolone G, Baudot J, Brogna A S, Colledani C, Claus G, De Masi R, Deveaux M, Dozière G, Dulinski W, Fontaine J C, Goffe M, Himmi A, Hu-Guo Ch, Jaaskelainen K, Koziel M, Morel F, Santos C, Specht M, Valin I, Voutsinas G, Wagner F M, Winter M 2010 Nucl. Instrum. Meth. A 624 432
[14] Fu M, Tang Z 2011 Nucl. Instrum. Meth. A 646 153
[15] Parkera S I, Kenneya C J, Segalb J 1997 Nucl. Instrum. Meth. A 395 328
[16] Piemonte C, Boscardin M, Dalla Betta G F, Ronchin S, Zorzi N 2005 Nucl. Instrum. Meth. A 541 441
[17] Silvaco International 2012 Atlas3D User's Manual-Device Simulation Software
[18] Silvaco International 2012 Victory Process Cell User's Manual-Device Simulation Software
[19] Silvaco International 2012 Tonyplot3D User's Manual-Device Simulation Software
[20] Silvaco International 2012 Maskviews User's Manual-Device Simulation Software
[21] Claus G, Colledani C, Dulinski W, Husson D, Turchetta R, Riester J L, Deptuch G, Orazi G, Winter M 2001 Nucl. Instrum. Meth. A 465 120
[22] Deptuch G 2005 Nucl. Instrum. Meth. A 543 537
[23] Sadrozinski H F W, Betancourt C, Heffern R, Henderson I, Pixley J, Polyakov A, Wilder M, Boscardin M, Piemonte C, Pozza A, Zorzi N, Dalla Betta G F, Resta G, Bruzzi M, Macchiolo A, Borrello L, Messineo A, Creanza D, Manna N 2007 Nucl. Instrum. Meth. A 579 769
[24] Gao B, Yu X F, Ren D Y, Li Y D, Cui J W, Li M S, Li M, Wang Y Y 2011 Acta Phys. Sin. 60 036106 (in Chinese) [高博, 余学峰, 任迪远, 李豫东, 崔江维, 李茂顺, 李明, 王义元 2011 60 036106]
[25] Zheng Z S, Liu Z L, Yu F, Li N 2012 Chin. Phys. B 21 116104
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