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In this paper,the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors (SNSPD). Besides,the device failure analysis is also introduced. With those methods,we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4.2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c/s,the detection efficiencies were 20% (660 nm) and 3% (1550 nm) with the SNSPD fabricated with above mentioned methods.
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Keywords:
- single photon /
- niobium nitride /
- nanowire /
- detector
[1] Goltsman G N, Okunev O, Chulkova G, Lipatov A, Semenov A, Smirnov K, Voronov B, Dzardanov A, Williams C, Sobolewski R 2001 Appl. Phys. Lett. 79 705
[2] Wei Z J, Li K Z, Zhou P, Wang J D, Liao C J, Guo J P, Liang R S, Liu S H 2008 Chin. Phys. B 17 4142
[3] Liu Y, Wu Q L, Han Z F, Dai Y M, Guo G C 2006 Chin. Phys. Lett. 23 252
[4] Chang J T, Wu L A 2003 Acta Phys. Sin. 52 1132 (in Chinese) [常君弢、吴令安 2003 52 1132]
[5] Wang J D, Wu Z H, Zhang B, Wei Z J, Liao C J, Ju S H 2008 Acta Phys. Sin. 57 5620 (in Chinese) [王金东、吴祖恒、张 兵 2008 57 5620]
[6] Takesue H, Nam S W, Zhang Q, Hadfield R H, Honjo T, Tamaki K, Yamamoto Y 2007 Nat. Photonics 1 343
[7] Rosenberg D, Peterson C G, Harrington J W, Rice P R, Dallmann N, Tyagi K T, McCabe K P, Nam S, Baek B, Hadfield R H, Hughes R J, Nordholt J E 2009 New J. Phys. 11 045009
[8] Stucki D, Walenta N, Vannel F, Thew R T, Gisin N, Zbinden H, Gray S, Towery C R, Ten S 2009 New J. Phys. 11 075003
[9] Hadfield R H, Habif J L, Schlafer J, Schwall R E, Nam S W 2006 Appl. Phys. Lett. 89 031109
[10] Zhang X Z, Gong W G, Tan Y G, Ren Z Z, Guo X T 2009 Chin. Phys. B 18 2143
[11] Quan D X, Pei C X, Liu D, Zhao N 2010 Acta Phys Sin. 59 2493 (in Chinese) [权东晓、裴昌幸、刘 丹 2010 59 2493]
[12] Hadfield R H, Stevens M J, Mirin R P, Nam S W 2007 J. Appl. Phys. 101 7
[13] Hadfield R H, Stevens M J, Mirin R P, Nam S W 2007 Journal of Applied Physics 101 103104
[14] Zhang J, Boiadjieva N, Chulkova G, Deslandes H, Goltsman G N, Korneev A, Kouminov P, Leibowitz A, Lo W, Malinsky R, Okunev O, Pearlman A, Slysz W, Smirnov K, Tsao C, Verevkin A, Voronov B, Wilsher K, Sobolewski R 2003 Electron. Lett. 39 1086
[15] Robinson B S, Kerman A J, Dauler E A, Barron R O, Caplan D O, Stevens M L, Carney J J, Hamilton S A, Yang J K W, Berggren K K 2006 Opt. Lett. 31 444
[16] Fujiyoshi S, Fujiwara M, Matsushita M 2008 Phys. Rev. Lett. 100 4
[17] Kadin A M, Leung M, Smith A D 1990 Phys. Rev. Lett. 65 3193
[18] Gupta D, Kadin A M 1999 IEEE Trans. Appl. Supercond. 9 4487
[19] Semenov A D, Gol'tsman G N, Korneev A A 2001 Physica C 351 349
[20] Verevkin A, Zhang J, Sobolewski R, Lipatov A, Okunev O, Chulkova G, Korneev A, Smirnov K, Goltsman G N, Semenov A 2002 Appl. Phys. Lett. 80 4687
[21] Annunziata A J, Santavicca D F, Chudow J D, Frunzio L, Rooks M J, Frydman A, Prober D E 2009 IEEE Trans. Appl. Supercond. 19 327
[22] Miki S, Takeda M, Fujiwara M, Sasaki M, Otomo A, Wang Z 2009 Appl. Phys. Express 2
[23] Dorenbos S N, Reiger E M, Perinetti U, Zwiller V, Zijlstra T, Klapwijk T M 2008 Appl. Phys. Lett. 93 131101
[24] Shibata H, Asahi M, Maruyama T, Akazaki T, Takesue H, Honjo T, Tokura Y 2009 IEEE Trans. Appl. Supercond. 19 358
[25] Portesi C, Borini S, Taralli E, Rajteri M, Monticone E 2008 Supercond. Sci. Technol. 21 034006
[26] Seleznez V A, Tarkhov M A, Voronov B M, Milostnaya, II, Lyakhno V Y, Garbuz A S, Mikhailov M Y, Zhigallina O M, Goltsman G N 2008 Supercond. Sci. Technol. 21 6
[27] Zhang L, Zhao Q, Zhong Y, Chen J, Cao C, Xu W, Kang L, Wu P, Shi W 2009 Applied Physics B: Lasers and Optics 97 187
[28] Miki S, Fujiwara M, Sasaki M, Baek B, Miller A J, Hadfield R H, Nam S W, Wang Z 2008 Applied Physics Letters 92 061116
[29] Thew R T, Stucki D, Gautier J D, Zbinden H, Rochas A 2007 Appl. Phys. Lett. 91
[30] Divochiy A, Marsili F, Bitauld D, Gaggero A, Leoni R, Mattioli F, Korneev A, Seleznev V, Kaurova N, Minaeva O, Goltsman G, Lagoudakis K G, Benkhaoul M, Levy F, Fiore A 2008 Nat. Photonics 2 377
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[1] Goltsman G N, Okunev O, Chulkova G, Lipatov A, Semenov A, Smirnov K, Voronov B, Dzardanov A, Williams C, Sobolewski R 2001 Appl. Phys. Lett. 79 705
[2] Wei Z J, Li K Z, Zhou P, Wang J D, Liao C J, Guo J P, Liang R S, Liu S H 2008 Chin. Phys. B 17 4142
[3] Liu Y, Wu Q L, Han Z F, Dai Y M, Guo G C 2006 Chin. Phys. Lett. 23 252
[4] Chang J T, Wu L A 2003 Acta Phys. Sin. 52 1132 (in Chinese) [常君弢、吴令安 2003 52 1132]
[5] Wang J D, Wu Z H, Zhang B, Wei Z J, Liao C J, Ju S H 2008 Acta Phys. Sin. 57 5620 (in Chinese) [王金东、吴祖恒、张 兵 2008 57 5620]
[6] Takesue H, Nam S W, Zhang Q, Hadfield R H, Honjo T, Tamaki K, Yamamoto Y 2007 Nat. Photonics 1 343
[7] Rosenberg D, Peterson C G, Harrington J W, Rice P R, Dallmann N, Tyagi K T, McCabe K P, Nam S, Baek B, Hadfield R H, Hughes R J, Nordholt J E 2009 New J. Phys. 11 045009
[8] Stucki D, Walenta N, Vannel F, Thew R T, Gisin N, Zbinden H, Gray S, Towery C R, Ten S 2009 New J. Phys. 11 075003
[9] Hadfield R H, Habif J L, Schlafer J, Schwall R E, Nam S W 2006 Appl. Phys. Lett. 89 031109
[10] Zhang X Z, Gong W G, Tan Y G, Ren Z Z, Guo X T 2009 Chin. Phys. B 18 2143
[11] Quan D X, Pei C X, Liu D, Zhao N 2010 Acta Phys Sin. 59 2493 (in Chinese) [权东晓、裴昌幸、刘 丹 2010 59 2493]
[12] Hadfield R H, Stevens M J, Mirin R P, Nam S W 2007 J. Appl. Phys. 101 7
[13] Hadfield R H, Stevens M J, Mirin R P, Nam S W 2007 Journal of Applied Physics 101 103104
[14] Zhang J, Boiadjieva N, Chulkova G, Deslandes H, Goltsman G N, Korneev A, Kouminov P, Leibowitz A, Lo W, Malinsky R, Okunev O, Pearlman A, Slysz W, Smirnov K, Tsao C, Verevkin A, Voronov B, Wilsher K, Sobolewski R 2003 Electron. Lett. 39 1086
[15] Robinson B S, Kerman A J, Dauler E A, Barron R O, Caplan D O, Stevens M L, Carney J J, Hamilton S A, Yang J K W, Berggren K K 2006 Opt. Lett. 31 444
[16] Fujiyoshi S, Fujiwara M, Matsushita M 2008 Phys. Rev. Lett. 100 4
[17] Kadin A M, Leung M, Smith A D 1990 Phys. Rev. Lett. 65 3193
[18] Gupta D, Kadin A M 1999 IEEE Trans. Appl. Supercond. 9 4487
[19] Semenov A D, Gol'tsman G N, Korneev A A 2001 Physica C 351 349
[20] Verevkin A, Zhang J, Sobolewski R, Lipatov A, Okunev O, Chulkova G, Korneev A, Smirnov K, Goltsman G N, Semenov A 2002 Appl. Phys. Lett. 80 4687
[21] Annunziata A J, Santavicca D F, Chudow J D, Frunzio L, Rooks M J, Frydman A, Prober D E 2009 IEEE Trans. Appl. Supercond. 19 327
[22] Miki S, Takeda M, Fujiwara M, Sasaki M, Otomo A, Wang Z 2009 Appl. Phys. Express 2
[23] Dorenbos S N, Reiger E M, Perinetti U, Zwiller V, Zijlstra T, Klapwijk T M 2008 Appl. Phys. Lett. 93 131101
[24] Shibata H, Asahi M, Maruyama T, Akazaki T, Takesue H, Honjo T, Tokura Y 2009 IEEE Trans. Appl. Supercond. 19 358
[25] Portesi C, Borini S, Taralli E, Rajteri M, Monticone E 2008 Supercond. Sci. Technol. 21 034006
[26] Seleznez V A, Tarkhov M A, Voronov B M, Milostnaya, II, Lyakhno V Y, Garbuz A S, Mikhailov M Y, Zhigallina O M, Goltsman G N 2008 Supercond. Sci. Technol. 21 6
[27] Zhang L, Zhao Q, Zhong Y, Chen J, Cao C, Xu W, Kang L, Wu P, Shi W 2009 Applied Physics B: Lasers and Optics 97 187
[28] Miki S, Fujiwara M, Sasaki M, Baek B, Miller A J, Hadfield R H, Nam S W, Wang Z 2008 Applied Physics Letters 92 061116
[29] Thew R T, Stucki D, Gautier J D, Zbinden H, Rochas A 2007 Appl. Phys. Lett. 91
[30] Divochiy A, Marsili F, Bitauld D, Gaggero A, Leoni R, Mattioli F, Korneev A, Seleznev V, Kaurova N, Minaeva O, Goltsman G, Lagoudakis K G, Benkhaoul M, Levy F, Fiore A 2008 Nat. Photonics 2 377
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