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SiO2 is one of important low refractive index materials, and SiO2 films are prepared by both ion-beam sputtering (IBS) and electron-beam evaporating (EB) technology. Dielectric constants of SiO2 films are calculated by infrared spectrum inversion technique in a wavenumber range from 400 cm-1 to 1500 cm-1. Through analyzing dielectric energy loss function, the oscillation frequency and the Si–O–Si angle of two types of SiO2 films are obtained in the transverse optics and longitudinal optics oscillating mode. The research results indicate that the attended modes of SiO4 are main coesite-like structure, three-plane folding ring structure, and keatite-like structure in the range of short-range order for EB-SiO2 films, but the attended modes of SiO4 are main coesite-like structure, three-plane folding ring structure, four-plane folding ring structure, and keatite-like structure in the range of short-range order for IBS-SiO2 films.
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Keywords:
- SiO2 films /
- ion beam sputtering /
- electric beam evaporating /
- short-range order
[1] Martinet C, Devine R A B 1995 J. Appl. Phys. 77 4343
[2] Lisovskii I P, Litovchenko V G, Lozinskii V G, Steblovskii G I 1992 Thin Solid Films 213 164
[3] Tabata A, Matsuno N, Suzuoki Y, Mizutani T 1996 Thin Solid Films 289 84
[4] Pliskin W A 1977 J. Vac. Sci. Technol. 14 1064
[5] Klemberg-Sapieha J E, Oberste-Berghaus J, Martinu L, Richard B, Stevenson I, Sadkhin G, Morton D, McEldowney S, Klinger R, Martin P J, Court N, Dligatch S, Gross M, Netterfield R P 2004 Appl. Opt. 43 2670
[6] Brunet-Bruneau A, Fisson S, Vuye G, Rivory J 2000 J. Appl. Phys. 87 7303
[7] Brunet-Bruneau A, Fisson S, Gallas B, Vuye G, Rivory J 2000 Thin Solid Films 377-378 57
[8] Brunet-Bruneau A, Rivory J, Rafin B, Robic J Y, Chaton P 1997 J. Appl. Phys. 82 1330
[9] Palik E D 1991 Hand Book of Optical Constant of Solids II (New York: Academic) p224
[10] Miloua R, Kebbab Z, Chiker F, Sahraoui K, Khadraoui M, Benramdane N 2012 Opt. Lett. 37 449
[11] Macleod H A 1986 Thin Film Optical Filters (Bristol: Adam Hilger) p35
[12] Dobrowolski J A, Kemp R A 1990 Appl. Opt. 29 2876
[13] Gunde M K 2000 Physica B 292 286
[14] Martinet C, Devin R A B 1995 Journal of Non-Crystalline Solids 187 96
[15] Pulker H K 1999 Coating on Glass (Amsterdam: Elsevier) p351
[16] Zhang X G, Wang C, Lu Z Q, Yang J, Li L, Yang Y 2011 Acta Phys. Sin. 60 096101 (in Chinese) [张学贵, 王茺, 鲁植全, 杨杰, 李亮, 杨宇 2011 60 096101]
[17] Luo Y Y, Zhu X F 2011 Acta Phys. Sin. 60 086104 (in Chinese) [罗银燕, 朱贤方 2011 60 086104]
[18] Yuan W J, Zhang Y G, Shen W D, Ma Q, Liu X 2011 Acta Phys. Sin. 60 047803 (in Chinese) [袁文佳, 章岳光, 沈伟东, 马群, 刘旭 2011 60 047803]
[19] Yan Z J, Wang Y Y, Xu R, Jiang Z M 2004 Acta Phys. Sin. 53 2771 (in Chinese) [阎志军, 王印月, 徐闰, 蒋最敏 2004 53 2771]
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[1] Martinet C, Devine R A B 1995 J. Appl. Phys. 77 4343
[2] Lisovskii I P, Litovchenko V G, Lozinskii V G, Steblovskii G I 1992 Thin Solid Films 213 164
[3] Tabata A, Matsuno N, Suzuoki Y, Mizutani T 1996 Thin Solid Films 289 84
[4] Pliskin W A 1977 J. Vac. Sci. Technol. 14 1064
[5] Klemberg-Sapieha J E, Oberste-Berghaus J, Martinu L, Richard B, Stevenson I, Sadkhin G, Morton D, McEldowney S, Klinger R, Martin P J, Court N, Dligatch S, Gross M, Netterfield R P 2004 Appl. Opt. 43 2670
[6] Brunet-Bruneau A, Fisson S, Vuye G, Rivory J 2000 J. Appl. Phys. 87 7303
[7] Brunet-Bruneau A, Fisson S, Gallas B, Vuye G, Rivory J 2000 Thin Solid Films 377-378 57
[8] Brunet-Bruneau A, Rivory J, Rafin B, Robic J Y, Chaton P 1997 J. Appl. Phys. 82 1330
[9] Palik E D 1991 Hand Book of Optical Constant of Solids II (New York: Academic) p224
[10] Miloua R, Kebbab Z, Chiker F, Sahraoui K, Khadraoui M, Benramdane N 2012 Opt. Lett. 37 449
[11] Macleod H A 1986 Thin Film Optical Filters (Bristol: Adam Hilger) p35
[12] Dobrowolski J A, Kemp R A 1990 Appl. Opt. 29 2876
[13] Gunde M K 2000 Physica B 292 286
[14] Martinet C, Devin R A B 1995 Journal of Non-Crystalline Solids 187 96
[15] Pulker H K 1999 Coating on Glass (Amsterdam: Elsevier) p351
[16] Zhang X G, Wang C, Lu Z Q, Yang J, Li L, Yang Y 2011 Acta Phys. Sin. 60 096101 (in Chinese) [张学贵, 王茺, 鲁植全, 杨杰, 李亮, 杨宇 2011 60 096101]
[17] Luo Y Y, Zhu X F 2011 Acta Phys. Sin. 60 086104 (in Chinese) [罗银燕, 朱贤方 2011 60 086104]
[18] Yuan W J, Zhang Y G, Shen W D, Ma Q, Liu X 2011 Acta Phys. Sin. 60 047803 (in Chinese) [袁文佳, 章岳光, 沈伟东, 马群, 刘旭 2011 60 047803]
[19] Yan Z J, Wang Y Y, Xu R, Jiang Z M 2004 Acta Phys. Sin. 53 2771 (in Chinese) [阎志军, 王印月, 徐闰, 蒋最敏 2004 53 2771]
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