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In this paper, ZrN/TaN nano-multilayers are fabricated in mixing atmosphere by radio frequency magnetron sputtering. The phase structures, He-related defects, helium content and cross-section morphologies of ZrN/TaN nano-multilayers are characterized by X-ray diffraction, slow positron beam analysis, enhanced proton backscattering spectrome and scanning electron microscope, respectively. The results show that the interface of ZrN/TaN nano-multilayer with 30 nm modulation period is stable and could resist the damage of helium even annealed at 600℃. The He retention rate of ZrN/TaN nano-multilayer with 30 nm modulation period can reach up to 45.6%.
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Keywords:
- ZrN/TaN /
- nano-multilayer /
- interface /
- helium retention
[1] Samaras M 2009 Mater. Today 12 46
[2] Maugeri E, Wiss T, Hiernaut J P, Desai K, Thiriet C, Rondinella V V, Colle J Y, Konings R J M 2009 J. Nucl. Mater. 385 461
[3] Trinkaus H, Singh B N 2003 J. Nucl. Mater. 323 229
[4] Fabritsiev S A, Pokrovsky A S 1998 J. Nucl. Mater. 258-263 1991
[5] Zhang X, Fu E G, Misra A, Demkowicz M J 2010 JOM 62 75
[6] Wilson W D, Bisson C L, Baskes M I 1981 Phys. Rev. B 24 5618
[7] Fu C C, Willaime F 2005 Phys. Rev. B 72 064117
[8] Zu X T, Yang L, Gao F, Peng S M, Heinisch H L, Long X G, Kurtz R J 2009 Phys. Rev. B 80 054104
[9] Chen J, Pouchon M A, Kimura A, Jung P, Hoffelner W 2009 J. Nucl. Mater. 386-388 143
[10] Borisenko A 2011 J. Nucl. Mater. 410 69
[11] Wang H, Araujo R, Swadener J G, Wang Y Q, Zhang X, Fu E G, Cagin T 2007 Nucl. Instrum. Meth. B 261 1162
[12] Yu K Y, Liu Y, Sun C, Wang H, Shao L, Fu E G, Zhang X 2011 J. Nucl. Mater. 425 140
[13] Li N, Nastasi M, Misra A 2012 Inter. J. Plas. 32-33 1
[14] Misra A, Demkowicz M J, Zhang X, Hoagland R G 2007 JOM 59 62
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[16] Gao Y, Yang T F, Xue J M, Yan S, Zhou S Q, Wang Y G, Kwok D T K, Chu P K, Zhang Y W 2011 J. Nucl. Mater. 413 11
[17] Fu E G, Misra A, Wang H, Shao L, Zhang X 2010 J. Nucl. Mater. 407 178
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[19] Kashinath A, Misra A, Demkowicz M J 2013 Phys. Rev. Lett. 110 086101
[20] Demkowicz M J, Wang Y Q, Hoagland R G, Anderoglu O 2007 Nucl. Instrum. Methods Phys. Res. B 261 524
[21] Odette G R, Hoelzer D T 2010 JOM 62 84
[22] Veen A V, Schut H, Vries J D, Hakvoort R A, Ijpma M R 1990 AIP Conf. Proc. 218 171
[23] Liu C Z 2007 Ph. D. Dissertation (Shanghai: Fudan University) (in Chinese) [刘超卓 2007博士学位论文(上海: 复旦大学)]
[24] Liu W, Wu Q Q, Chen S L, Zhu J J, An Z, Wang Y 2012 Acta Phys. Sin. 61 176802 (in Chinese) [刘望, 邬琦琦, 陈顺礼, 朱敬军, 安竹, 汪渊 2012 61 176802]
[25] Hao W L, Ding W, Cheng G J, Long X G, Zhao B J, Peng S M 2012 Atom. Energy Sci. Technol. 46 987 (in Chinese) [郝万立, 丁伟, 程贵钧, 龙兴贵, 赵北君, 彭述明 2012 原子能科学技术 46 987]
[26] Kim I 2011 Ph. D. Dissertation (Texas: Texas A&M University)
[27] Wang K, Deng A H, Liu L, Li Y, Zhou Y L, Hou Q, Zhou B, Wang S L 2012 Acta Phys. Sin. 61 226802 (in Chinese) [王康, 邓爱红, 刘莉, 李悦, 周宇璐, 侯氢, 周冰, 王珊玲2012 61 226802]
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[1] Samaras M 2009 Mater. Today 12 46
[2] Maugeri E, Wiss T, Hiernaut J P, Desai K, Thiriet C, Rondinella V V, Colle J Y, Konings R J M 2009 J. Nucl. Mater. 385 461
[3] Trinkaus H, Singh B N 2003 J. Nucl. Mater. 323 229
[4] Fabritsiev S A, Pokrovsky A S 1998 J. Nucl. Mater. 258-263 1991
[5] Zhang X, Fu E G, Misra A, Demkowicz M J 2010 JOM 62 75
[6] Wilson W D, Bisson C L, Baskes M I 1981 Phys. Rev. B 24 5618
[7] Fu C C, Willaime F 2005 Phys. Rev. B 72 064117
[8] Zu X T, Yang L, Gao F, Peng S M, Heinisch H L, Long X G, Kurtz R J 2009 Phys. Rev. B 80 054104
[9] Chen J, Pouchon M A, Kimura A, Jung P, Hoffelner W 2009 J. Nucl. Mater. 386-388 143
[10] Borisenko A 2011 J. Nucl. Mater. 410 69
[11] Wang H, Araujo R, Swadener J G, Wang Y Q, Zhang X, Fu E G, Cagin T 2007 Nucl. Instrum. Meth. B 261 1162
[12] Yu K Y, Liu Y, Sun C, Wang H, Shao L, Fu E G, Zhang X 2011 J. Nucl. Mater. 425 140
[13] Li N, Nastasi M, Misra A 2012 Inter. J. Plas. 32-33 1
[14] Misra A, Demkowicz M J, Zhang X, Hoagland R G 2007 JOM 59 62
[15] Zhernenkov M, Jablin M S, Misra A, Nastasi M, Wang Y Q, Demkowicz M J, Baldwin J K, Majewski J 2011 Appl. Phys. Lett. 98 241913
[16] Gao Y, Yang T F, Xue J M, Yan S, Zhou S Q, Wang Y G, Kwok D T K, Chu P K, Zhang Y W 2011 J. Nucl. Mater. 413 11
[17] Fu E G, Misra A, Wang H, Shao L, Zhang X 2010 J. Nucl. Mater. 407 178
[18] Li N, Fu E G, Wang H, Carter J J, Shao L, Maloy S A, Misra A, Zhang X 2009 J. Nucl. Mater. 389 233
[19] Kashinath A, Misra A, Demkowicz M J 2013 Phys. Rev. Lett. 110 086101
[20] Demkowicz M J, Wang Y Q, Hoagland R G, Anderoglu O 2007 Nucl. Instrum. Methods Phys. Res. B 261 524
[21] Odette G R, Hoelzer D T 2010 JOM 62 84
[22] Veen A V, Schut H, Vries J D, Hakvoort R A, Ijpma M R 1990 AIP Conf. Proc. 218 171
[23] Liu C Z 2007 Ph. D. Dissertation (Shanghai: Fudan University) (in Chinese) [刘超卓 2007博士学位论文(上海: 复旦大学)]
[24] Liu W, Wu Q Q, Chen S L, Zhu J J, An Z, Wang Y 2012 Acta Phys. Sin. 61 176802 (in Chinese) [刘望, 邬琦琦, 陈顺礼, 朱敬军, 安竹, 汪渊 2012 61 176802]
[25] Hao W L, Ding W, Cheng G J, Long X G, Zhao B J, Peng S M 2012 Atom. Energy Sci. Technol. 46 987 (in Chinese) [郝万立, 丁伟, 程贵钧, 龙兴贵, 赵北君, 彭述明 2012 原子能科学技术 46 987]
[26] Kim I 2011 Ph. D. Dissertation (Texas: Texas A&M University)
[27] Wang K, Deng A H, Liu L, Li Y, Zhou Y L, Hou Q, Zhou B, Wang S L 2012 Acta Phys. Sin. 61 226802 (in Chinese) [王康, 邓爱红, 刘莉, 李悦, 周宇璐, 侯氢, 周冰, 王珊玲2012 61 226802]
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