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Solar-grade p-type Czochralski silicon wafers are doped with phosphorus by single-face and double-face diffusions, and the influence of Fe-B pairs on the minority carrier lifetime, the trapping centers density and the internal quantum efficiency （IQE） of cells （fabricated from the wafers） is analyzed by measuring microwave-detected photo-conductance decay minority carrier lifetime. In the doped wafers with single-face diffusion, the minority carrier lifetime is determined mainly by the density distribution of Fe-B pairs. However, in the doped wafers with double-face diffusion, the minority carrier lifetime is less influenced by the concentration distribution of Fe-B pairs than by other impurities and defects. Numerical calculation based on the combination of the transient voltage signal and the trapping model indicates that the density of trapping centers is reduced by either of diffusion process. On the other hand, detailed analysis of selected specific spots in one wafer with single-face diffusion shows that Fe-B pairs are not the major factor influencing the density of trapping centers. The wafers with different diffusion processes are fabricated into c-Si solar cells and the IQE is measured by using a light beam induced current. The results show that the IQEs of cells with double-face diffusion are higher than those with single-face diffusion, which demonstrates the negative effect of Fe-B pairs on the IQE of solar cells.
[1] ［1］Davis J R, Rohatgi A, Hopkins R H, Blais P D, Choudhury P R, McCormick J R, Mollenkoff H C 1980 IEEE Trans. Electron. Dev. 27 677
[2] ［2］Macdonald D H, Geerligs L J 2004 Appl. Phys. Lett. 85 4061
[3] ［3］Macdonald D H, Geerligs L J, Azzizi A 2004 J. Appl. Phys. 95 1021
[4] ［4］Terakawa T, Wang D, Nakashima H 2005 Jpn. J. Appl. Phys. 44 4060
[5] ［5］Geerligs L J 2003 3rd World Conference on Photovoltaic Energy Conversion （Osaka: Arisumi Printing Incorporated） p1044
[6] ［6］Cuevas A, Stocks M, Macdonald D, Kerr M, Samundsett C 1999 IEEE Trans. Electron. Dev. 46 2026
[7] ［7］Wang H, Yang H, Wu H C, Yu H C 2006 J. Mater. Sci. 41 1905
[8] ［8］Yang D R 2007 Solar Cell Materials （Beijing: Chemistry Industry Press） p130 （in Chinese） ［杨德仁 2007 太阳电池材料 （北京：化学工业出版社） 第130页］
[9] ［9］Macdonald D H, Cuevas A 2001 Sol. Energy Mater. Sol. Cells 65 509
[10] ］Macdonald D H 2001 Ph. D. Dissertation （Canberra: The Australian National University）
[11] ］Li B, Liu C, Feng L H, Zhang J Q, Zhen J G, Cai Y P, Cai W, Wu L L, Li W, Lei Z, Zeng G G, Xia G P 2009 Acta Phys. Sin. 58 1987 （in Chinese） ［黎兵、刘才、冯良桓、张静全、郑家贵、蔡亚平、蔡伟、武莉莉、李卫、雷智、曾广根、夏庚培 2009 58 1987］
[12] ］Li Y J, Zhen J G, Feng L H, Li B, Zeng G G, Cai Y P, Zhang J Q, Li W, Lei Z, Wu L L, Cai W 2010 Acta Phys. Sin. 59 625 （in Chinese） ［李愿洁、郑家贵、冯良桓、黎兵、曾广根、蔡亚平、张静全、李卫、雷智、武莉莉、蔡伟 2010 59 625］
[13] ］Zhang X, Hu J M, Wu Y Y, Lu F 2009 J. Phys. D 42 145401
[14] ］Hornbeck J A, Haynes J R 1955 Phys. Rev. 97 311
[15] ］Macdonald D H, Cuevas A 1999 Appl. Phys. Lett. 74 1710
[16] ］Schmidt J, Bothe K, Hezel R 2002 Appl. Phys. Lett. 80 4395
[17] ］Dekkers H F W, Carnel L, Beaucame G 2006 Appl. Phys. Lett. 89 013508
[18] ］Lauer K, Laades A, bensee H, Metzner H, Lawerenz A 2008 J. Appl. Phys. 104 104503
[19] ］Zoth G, Bergholz W 1990 J. Appl. Phys. 67 6764
[20] ］Macdonald D H, Cuevas A, Leung J W 2001 J. Appl. Phys. 89 7932
[21] ］Green M A 1990 J. Appl. Phys. 67 2944
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[1] ［1］Davis J R, Rohatgi A, Hopkins R H, Blais P D, Choudhury P R, McCormick J R, Mollenkoff H C 1980 IEEE Trans. Electron. Dev. 27 677
[2] ［2］Macdonald D H, Geerligs L J 2004 Appl. Phys. Lett. 85 4061
[3] ［3］Macdonald D H, Geerligs L J, Azzizi A 2004 J. Appl. Phys. 95 1021
[4] ［4］Terakawa T, Wang D, Nakashima H 2005 Jpn. J. Appl. Phys. 44 4060
[5] ［5］Geerligs L J 2003 3rd World Conference on Photovoltaic Energy Conversion （Osaka: Arisumi Printing Incorporated） p1044
[6] ［6］Cuevas A, Stocks M, Macdonald D, Kerr M, Samundsett C 1999 IEEE Trans. Electron. Dev. 46 2026
[7] ［7］Wang H, Yang H, Wu H C, Yu H C 2006 J. Mater. Sci. 41 1905
[8] ［8］Yang D R 2007 Solar Cell Materials （Beijing: Chemistry Industry Press） p130 （in Chinese） ［杨德仁 2007 太阳电池材料 （北京：化学工业出版社） 第130页］
[9] ［9］Macdonald D H, Cuevas A 2001 Sol. Energy Mater. Sol. Cells 65 509
[10] ］Macdonald D H 2001 Ph. D. Dissertation （Canberra: The Australian National University）
[11] ］Li B, Liu C, Feng L H, Zhang J Q, Zhen J G, Cai Y P, Cai W, Wu L L, Li W, Lei Z, Zeng G G, Xia G P 2009 Acta Phys. Sin. 58 1987 （in Chinese） ［黎兵、刘才、冯良桓、张静全、郑家贵、蔡亚平、蔡伟、武莉莉、李卫、雷智、曾广根、夏庚培 2009 58 1987］
[12] ］Li Y J, Zhen J G, Feng L H, Li B, Zeng G G, Cai Y P, Zhang J Q, Li W, Lei Z, Wu L L, Cai W 2010 Acta Phys. Sin. 59 625 （in Chinese） ［李愿洁、郑家贵、冯良桓、黎兵、曾广根、蔡亚平、张静全、李卫、雷智、武莉莉、蔡伟 2010 59 625］
[13] ］Zhang X, Hu J M, Wu Y Y, Lu F 2009 J. Phys. D 42 145401
[14] ］Hornbeck J A, Haynes J R 1955 Phys. Rev. 97 311
[15] ］Macdonald D H, Cuevas A 1999 Appl. Phys. Lett. 74 1710
[16] ］Schmidt J, Bothe K, Hezel R 2002 Appl. Phys. Lett. 80 4395
[17] ］Dekkers H F W, Carnel L, Beaucame G 2006 Appl. Phys. Lett. 89 013508
[18] ］Lauer K, Laades A, bensee H, Metzner H, Lawerenz A 2008 J. Appl. Phys. 104 104503
[19] ］Zoth G, Bergholz W 1990 J. Appl. Phys. 67 6764
[20] ］Macdonald D H, Cuevas A, Leung J W 2001 J. Appl. Phys. 89 7932
[21] ］Green M A 1990 J. Appl. Phys. 67 2944
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