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Investigation of microcrystalline silicon germanium prepared by hydrogen and helium gas mixture diluted VHFPA-RTCVD

Zhang Li-Ping Zhang Jian-Jun Zhang Xin Shang Ze-Ren Hu Zeng-Xin Zhang Ya-Ping Geng Xin-Hua Zhao Ying

Citation:

Investigation of microcrystalline silicon germanium prepared by hydrogen and helium gas mixture diluted VHFPA-RTCVD

Zhang Li-Ping, Zhang Jian-Jun, Zhang Xin, Shang Ze-Ren, Hu Zeng-Xin, Zhang Ya-Ping, Geng Xin-Hua, Zhao Ying
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  • Abstract views:  7883
  • PDF Downloads:  985
  • Cited By: 0
Publishing process
  • Received Date:  29 January 2008
  • Accepted Date:  25 April 2008
  • Published Online:  20 November 2008

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