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A fast algorithm for reflectivity calculation of micro/nano deep trench structures by corrected effective medium approximation

Liu Shi-Yuan Gu Hua-Yong Zhang Chuan-Wei Shen Hong-Wei

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A fast algorithm for reflectivity calculation of micro/nano deep trench structures by corrected effective medium approximation

Liu Shi-Yuan, Gu Hua-Yong, Zhang Chuan-Wei, Shen Hong-Wei
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  • Abstract views:  9484
  • PDF Downloads:  1311
  • Cited By: 0
Publishing process
  • Received Date:  27 December 2007
  • Accepted Date:  25 February 2008
  • Published Online:  20 September 2008

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