质子辐照下Mo/Si多层膜反射镜的微观结构状态

关庆丰; 吕鹏; 王孝东; 万明珍; 顾倩倩; 陈波

doi:10.7498/aps.61.016107

摘要

利用透射电子显微镜对质子辐照前后空间太阳望远镜Mo/Si多层膜的微观结构进行了表征, 并对其辐照前后反射率的变化进行了测量.研究表明, Mo/Si多层膜经质子辐照后形成了一些缺陷结构,局部区域Mo/Si的周期性遭到破坏, Mo层与Si层的宽度发生了变化,多层膜层与层之间的界面也比辐照前更为粗糙,部分层状结构由于质子辐照发生了明显的扭曲和折断等现象;此外,质子辐照导致了Mo/Si多层膜反射率的下降,这些微观缺陷的形成是光学性能降低的直接诱因.

关键词:

Abstract

In this paper we characterize the microstructures of Mo/si multilager in space solar telescope induced by proton irradiation by transmission electron microscope (TEM). The optical performances of the Mo/Si multilayer mirror before and after proton irradiation are also determined. The experimental results show that some defect structures are introduced after proton irradiation. The Mo/Si periodic structure is destructed in some irradiation regions. The widths of Mo layer and Si layer significantly change and the Mo/Si interface is much rougher than before irradiation. Moreover, the obvious distortions of the Mo/Si interface and the formation of the small islands in Mo layer are also found. Furthermore, proton irradiation reduces the reflectivity of Mo/Si multilayer mirror. The dominante mechanism of optical degeneration of the Mo/Si multilayer induced by proton irradiation should be attributed to the formation of the defect structures.

Keywords:

作者及机构信息

1.
中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 长春 130033;

2.
江苏大学材料科学与工程学院, 镇江 212013

基金项目: 国家自然科学基金(批准号:10878004, 50671042)和应用光学国家重点实验室开放基金资助的课题．

Authors and contacts

1.
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences, Changchun 130033, China;

2.
College of Material Science and Engineering, Jiangsu University, Zhenjiang 212013, China

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 10878004, 50671042), and the Opening Foundation of State Key Laboratory of Applied Optics, China.

参考文献

[1]	Gussenhoven M S, Mullon E G 1993 IEEE Trans. Nucl. Sci. 40 221
[2]	Fan X H, Chen B, Guan Q F 2008 Acta Phys. Sin. 57 1829(in Chinese) [范鲜红,陈波,关庆丰 2008 57 1829]
[3]	Cheng X W, Guan Q F, Fan X H, Chen B 2010 Chin. Phys. B 19 016103
[4]	Fan X H, Ni Q L, Chen B 2008 Acta Phys. Sin. 57 6494 (in Chinese) [范鲜红,尼启良,陈波 2008 57 6494]
[5]	Lauriente M, VampolaA L, Koga R, Hosken R 1999 Spacecraft Rockets 36 902
[6]	Stearns G, RosenR S, Vernon S P 1993 Appl. Opt. 32 6952
[7]	Feng D 2000 Metallogrphy Physics (Vol.1)(Beijing:Science Press) p223 (in Chinese) [冯端 2000 金属物理学 (第一卷)(北京:科学出版社)第223页]
[8]	Wirth B D, Caturla M J, Diaz de la R T, Khraishi T, Zbib H 2001 J. Nucl. Mater. 180 23
[9]	Wang X T, Guan Q F, Qiu D H, Cheng X W, Li Y, Peng D J, Gu Q Q Acta Phys. Sin. 59 7252 (in Chinese) [王雪涛,关庆丰,邱冬华,程秀围,李艳,彭冬晋,顾倩倩 2010 59 7252]
[10]	Wang X T, Guan Q F, Gu Q Q, Peng D J, Li Y, Chen B 2010 J. Inorganic Mater. 25 1313(in Chinese) [王雪涛,关庆丰,顾倩倩,彭东晋,李艳,陈波 2010 无机材料学报 25 1313]
[11]	Guan Q F, Chen D Q, Zhu J, Qiu D H,Wang X T, Chen XW2009 Acta Phys. Sin. 58 4846 (in Chinese) [关庆丰,程笃庆,朱键,邱冬华,王雪涛,程秀围 2009 58 4846]
[12]	Chen D Q, Guan Q F, Zhu J, Qiu D H, Chen XW,Wang X T 2009 Acta Phys. Sin. 58 7300 (in Chinese) [程笃庆,关庆丰,朱健,邱东华,程秀围,王雪涛 2009 58 7300]
[13]	Guan Q F, Chen B, Zhang Q Y, Dong C, Zou G T 2008 Acta Phys. Sin. 57 392 (in Chinese) [关庆丰,陈波,张庆瑜,董闯,邹广田 2008 57 392]
[14]	Guan Q F, An C X, Qin Y, Zou J X, Hao S Z, Zhang Q Y, Dong C, Zou G T 2005 Acta Phys. Sin. 54 3927 (in Chinese) [关庆丰,安春香,秦颖,邹建新,郝胜志,张庆瑜,董闯,邹广田 2005 54 3927]
[15]	Morawe C, Peffen J C, Hignete O 2001 SPIE High resolution multilayer X-ray 4145 61
[16]	Liu X, Wang Z S, Yi K 2008 Optical Interference Coatings (Hangzhou: Zhejiang University Press) p215 (in Chinese) [刘旭,王占山,易葵 2008 光学干涉薄膜 (杭州:浙江大学出版社)第215页]

施引文献

[1]	Gussenhoven M S, Mullon E G 1993 IEEE Trans. Nucl. Sci. 40 221
[2]	Fan X H, Chen B, Guan Q F 2008 Acta Phys. Sin. 57 1829(in Chinese) [范鲜红,陈波,关庆丰 2008 57 1829]
[3]	Cheng X W, Guan Q F, Fan X H, Chen B 2010 Chin. Phys. B 19 016103
[4]	Fan X H, Ni Q L, Chen B 2008 Acta Phys. Sin. 57 6494 (in Chinese) [范鲜红,尼启良,陈波 2008 57 6494]
[5]	Lauriente M, VampolaA L, Koga R, Hosken R 1999 Spacecraft Rockets 36 902
[6]	Stearns G, RosenR S, Vernon S P 1993 Appl. Opt. 32 6952
[7]	Feng D 2000 Metallogrphy Physics (Vol.1)(Beijing:Science Press) p223 (in Chinese) [冯端 2000 金属物理学 (第一卷)(北京:科学出版社)第223页]
[8]	Wirth B D, Caturla M J, Diaz de la R T, Khraishi T, Zbib H 2001 J. Nucl. Mater. 180 23
[9]	Wang X T, Guan Q F, Qiu D H, Cheng X W, Li Y, Peng D J, Gu Q Q Acta Phys. Sin. 59 7252 (in Chinese) [王雪涛,关庆丰,邱冬华,程秀围,李艳,彭冬晋,顾倩倩 2010 59 7252]
[10]	Wang X T, Guan Q F, Gu Q Q, Peng D J, Li Y, Chen B 2010 J. Inorganic Mater. 25 1313(in Chinese) [王雪涛,关庆丰,顾倩倩,彭东晋,李艳,陈波 2010 无机材料学报 25 1313]
[11]	Guan Q F, Chen D Q, Zhu J, Qiu D H,Wang X T, Chen XW2009 Acta Phys. Sin. 58 4846 (in Chinese) [关庆丰,程笃庆,朱键,邱冬华,王雪涛,程秀围 2009 58 4846]
[12]	Chen D Q, Guan Q F, Zhu J, Qiu D H, Chen XW,Wang X T 2009 Acta Phys. Sin. 58 7300 (in Chinese) [程笃庆,关庆丰,朱健,邱东华,程秀围,王雪涛 2009 58 7300]
[13]	Guan Q F, Chen B, Zhang Q Y, Dong C, Zou G T 2008 Acta Phys. Sin. 57 392 (in Chinese) [关庆丰,陈波,张庆瑜,董闯,邹广田 2008 57 392]
[14]	Guan Q F, An C X, Qin Y, Zou J X, Hao S Z, Zhang Q Y, Dong C, Zou G T 2005 Acta Phys. Sin. 54 3927 (in Chinese) [关庆丰,安春香,秦颖,邹建新,郝胜志,张庆瑜,董闯,邹广田 2005 54 3927]
[15]	Morawe C, Peffen J C, Hignete O 2001 SPIE High resolution multilayer X-ray 4145 61
[16]	Liu X, Wang Z S, Yi K 2008 Optical Interference Coatings (Hangzhou: Zhejiang University Press) p215 (in Chinese) [刘旭,王占山,易葵 2008 光学干涉薄膜 (杭州:浙江大学出版社)第215页]

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