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Effect of rise-time patterns on dynamics of sheath expansion during plasma immersion ion implantation

Huang Yong-Xian Tian Xiu-Bo Yang Shi-Qin Ricky Fu Paul Chu K.

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Effect of rise-time patterns on dynamics of sheath expansion during plasma immersion ion implantation

Huang Yong-Xian, Tian Xiu-Bo, Yang Shi-Qin, Ricky Fu, Paul Chu K.
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  • Abstract views:  8178
  • PDF Downloads:  944
  • Cited By: 0
Publishing process
  • Received Date:  27 November 2006
  • Accepted Date:  06 April 2007
  • Published Online:  05 April 2007

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