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Residual stress in the GaN epitaxial film prepared by in situ SiNx deposition

Qin Qi Yu Nai-Sen Guo Li-Wei Wang Yang Zhu Xue-Liang Chen Hong Zhou Jun-Ming

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Residual stress in the GaN epitaxial film prepared by in situ SiNx deposition

Qin Qi, Yu Nai-Sen, Guo Li-Wei, Wang Yang, Zhu Xue-Liang, Chen Hong, Zhou Jun-Ming
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  • Abstract views:  8078
  • PDF Downloads:  792
  • Cited By: 0
Publishing process
  • Received Date:  05 May 2005
  • Accepted Date:  08 May 2005
  • Published Online:  20 November 2005

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