-
-
(1)五邑大学薄膜与纳米材料研究所,江门529020; (2)五邑大学薄膜与纳米材料研究所,江门529020中山大学超快速激光光谱国家重点实验室,广州510275; (3)香港中文大学电子工程系暨材料科技研究中心,新界,香港; (4)中山大学超快速激光光谱国家重点实验室,广州510275
-
-
[1] . Effect of film thickness on photoelectric properties of β-Ga2O3 films by radio frequency magnetron sputtering*. Acta Physica Sinica, 2021, (): . doi: 10.7498/aps.70.20211744 [2] Ma Bing-Yang, Zhang An-Ming, Shang Hai-Long, Sun Shi-Yang, Li Ge-Yang. Amorphizing and mechanical properties of co-sputtered Al-Zr alloy films. Acta Physica Sinica, 2014, 63(13): 136801. doi: 10.7498/aps.63.136801 [3] Chen Ren-Gang, Deng Jin-Xiang, Chen Liang, Kong Le, Cui Min, Gao Xue-Fei, Pang Tian-Qi, Miao Yi-Ming. Spectroscopic ellipsometry study of the Zn3N2 films prepared by radio-frequency sputtering. Acta Physica Sinica, 2014, 63(13): 137701. doi: 10.7498/aps.63.137701 [4] Chen Chao, Ji Yong, Gao Xiao-Yong, Zhao Meng-Ke, Ma Jiao-Min, Zhang Zeng-Yuan, Lu Jing-Xiao. Study on the deposition of aluminum-doped zinc oxide films using direct-current pulse magnetron reactive sputtering technique. Acta Physica Sinica, 2012, 61(3): 036104. doi: 10.7498/aps.61.036104 [5] Ma Jiao-Min, Liang Yan, Gao Xiao-Yong, Chen Chao, Zhao Meng-Ke, Lu Jing-Xiao. Spectroscopic ellipsometry study of the Ag2O film deposited by radio-frequency reactive magnetron sputtering. Acta Physica Sinica, 2012, 61(5): 056106. doi: 10.7498/aps.61.056106 [6] Zhang Zeng-Yuan, Gao Xiao-Yong, Feng Hong-Liang, Ma Jiao-Min, Lu Jing-Xiao. Effect of the reactive pressure on the structure and optical properties of silver oxide films deposited by direct-current reactive magnetron sputtering. Acta Physica Sinica, 2011, 60(1): 016110. doi: 10.7498/aps.60.016110 [7] Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing. Preparation and properties of GeC thin films deposited by reactive RF magnetron sputtering. Acta Physica Sinica, 2008, 57(10): 6587-6592. doi: 10.7498/aps.57.6587 [8] Wang Zhen-Ning, Jiang Mei-Fu, Ning Zhao-Yuan, Zhu Li. Structure and photoluminescence of Zn2GeO4 polycrystalline films prepared by radio-frequency magnetron sputtering. Acta Physica Sinica, 2008, 57(10): 6507-6512. doi: 10.7498/aps.57.6507 [9] Shen Zi-Cai, Shao Jian-Da, Wang Ying-Jian, Fan Zheng-Xiu. Modeling analysis of gradient-index coatings prepared by reactive magnetron sputtering. Acta Physica Sinica, 2005, 54(10): 4842-4845. doi: 10.7498/aps.54.4842 [10] Zhao Xin-Min, Di Guo-Qing. The influence of the magnetic field magnetron under the substrate on the sputtering glow and film thickness gradient. Acta Physica Sinica, 2004, 53(1): 306-310. doi: 10.7498/aps.53.306 [11] Zheng Dai-Shun, Xie Tian, Bai Jian-Min, Wei Fu-Lin, Yang Zheng. . Acta Physica Sinica, 2002, 51(4): 908-912. doi: 10.7498/aps.51.908 [12] LIU FENG-ZHEN, ZHU MEI-FANG, LIU TAO, LI BING-CHENG. THE TRANSITION FROM Eu3+TO Eu2+ IN SiO2(Eu) THIN FILMS PREPARED BY ION IMPLANTATION AND CO-SPUTTERING. Acta Physica Sinica, 2001, 50(3): 532-535. doi: 10.7498/aps.50.532 [13] ZHU KAI-GUI, SHI JIAN-ZHONG, SHAO QING-YI. RAMAN SCATTERING FROM InAs NANOCRYSTALS EMBEDDED IN SiO2 THIN FILMS. Acta Physica Sinica, 2000, 49(11): 2304-2306. doi: 10.7498/aps.49.2304 [14] ZHU MEI-FANG, CHEN GUO, XU HUAI-ZHE, HAN YI-QIN, XIE KAN, LIU ZHEN-XIANG, TANG YONG, CHEN PEI-YI. GREEN/BLUE LIGHT EMISSION AND LUMINESCENT-MECHANISM OF NANOCRYSTALLINE SILICON-EMBEDDED IN SILICON OXIDE THIN FILM. Acta Physica Sinica, 1997, 46(8): 1645-1651. doi: 10.7498/aps.46.1645 [15] YU BAO-LONG, ZHANG GUI-LAN, TANG GUO-QING, WU XIAO-CHUN, CHEN WEN-JU, YANG BIN-ZHOU. STUDYING ON NONLINEAR OPTICAL PROPERTIES OF Fe2O3 NANOPARTICLES IN COLLOIDAL SOLUTION. Acta Physica Sinica, 1997, 46(3): 579-586. doi: 10.7498/aps.46.579 [16] YUE LAN-PING, HE YI-ZHEN. FLUORESCENCE SPECTRA OF Ge-NANOCRYSTALLITESEMBEDDED IN SiO2 THIN FILMS. Acta Physica Sinica, 1997, 46(6): 1212-1216. doi: 10.7498/aps.46.1212 [17] XIAO DING-QUAN, WEI LI-FAN, LI ZI-SEN, ZHU JIAN-GUO, QIAN ZHENG-HONG, PENG WEN-BIN. MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING OF METAL OXIDE THIN FILMS (I)——ESTABLISHMENT OF THE MODEL. Acta Physica Sinica, 1996, 45(2): 330-338. doi: 10.7498/aps.45.330 [18] YUE LAN-PING, HE YI-ZHEN. A STUDY OF THE RAMAN SCATTERING OF Ge NANOCRYSTALLITES EMBEDDED IN ＳｉＯ２ THIN FILMS. Acta Physica Sinica, 1996, 45(10): 1756-1761. doi: 10.7498/aps.45.1756 [19] Shi Wang-Zhou, Yao Wei-Guo, Qi-Zhen-Zhong, He Yi-Zhen. . Acta Physica Sinica, 1995, 44(7): 1172-1176. doi: 10.7498/aps.44.1172 [20] . X-RAY DIFFRACTION INVESTIGATION FOR ANNEALING OF Co-SPUTTERED W-Si FILMS ON S10_2_. Acta Physica Sinica, 1989, 38(8): 1379-1383. doi: 10.7498/aps.38.1379
Catalog
Metrics
- Abstract views: 7441
- PDF Downloads: 1231
- Cited By: 0
Publishing process
- Received Date:
21 March 2001
- Accepted Date:
20 August 2001
- Published Online:
05 February 2002
下载:
